• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
• /
• pp.739-742
• /
• 2002

This paper described on the fabrication of microstructures by DRIE(deep reactive ion etching). SOI(Si-on-insulator) electric devices with buried cavities are fabricated by SDB technology and electrochemical etch-stop. The cavity was fabricated the upper handling wafer by Si anisotropic etch technique. SDB process was performed to seal the fabricated cavity under vacuum condition at -760 mmHg. In the SDB process, captured air and moisture inside of the cavities were removed by making channels towards outside. After annealing($1000^{\circ}C$, 60 min.), The SDB SOI structure was thinned by electrochemical etch-stop. Finally, it was fabricated microstructures by DRIE as well as an accurate thickness control and a good flatness.

• 한국정밀공학회지
• /
• 제24권10호
• /
• pp.83-90
• /
• 2007

The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• 대한기계학회논문집A
• /
• 제35권1호
• /
• pp.33-37
• /
• 2011

디스플레이, 광학, 에너지 분야 부품의 미세형상화, 대면적화, 저가격화 요구에 대응하기 위하여 대면적 롤금형의 미세형상 가공기술개발에 대한 필요성이 대두되고 있다. 롤금형은 기존의 평판금형에 비해서 금형의 납기가 빠르고, 대면적화에 용이하며, 연속성형이 가능하다는 장점을 갖고 있다. 본 연구는 롤금형에 미세형상을 가공할 때 발생하는 형상오차의 원인을 규명하는 것을 목적으로 하고 있으며, 가공 현장에서 개선 가능한 요소로서 롤금형의 동적밸런싱 보정방안을 제시하고 있다. 기존보다 정밀한 동적밸런싱 보정을 통하여 롤금형의 질량불평형이 최대 90%까지 감소되었고, 롤금형의 진동량이 0.044 mm/sec (RMS)에서 0.004mm/sec (RMS)로 감소하였으며, 결과적으로 미세패턴의 형상정밀도가 개선되는 것을 확인할 수 있었다.

• 한국정밀공학회지
• /
• 제25권12호
• /
• pp.39-46
• /
• 2008

Asymmetric glass lens core for portable projection optic system was designed and simulated. And it was machined by newly developed non-rotational ultra precision grinding method. With the designed lens data which optimized for multi-collimation, we generated the we core surface data. Mold pressing conditions analyzed by FEM. In the machining process, ground profile errors were compensated based on measured data, minimized feed rate and depth of cut. The deviations of machined core profile were acceptable level for glass mold press. Mold pressed glass array lens was coated with $SiO_2\;and\;Ta_2O_5$ for anti-reflection.

• 한국기계가공학회지
• /
• 제2권2호
• /
• pp.5-13
• /
• 2003

In this study, experiments of high speed grinding had been earned out in a STD11 specimen for evaluating the grindability with designed CBN grinding wheels Ground surfaces were analyzed and evaluated by means of surface Integrities and wheel damages. The surface roughness and 3 dimensional profile had been used for analyzing the micro-surface integrity. The residual stress of the ground surface had been measured by the x-ray diffraction method. Also, the surface state of the ground specimens and the grinding wheels were evaluated by a metallurgical microscope and SEM system after high speed grinding in order to choose the suitable machining conditions.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.653-654
• /
• 2006

In case of ultrashort laser ablation of metals, the transfer of energy from the electronic system causing strong absorption of laser light to the lattice needs relaxation times of the order of some picoseconds. Under the above theoretical background, nickel was ablated using femtosecond, picosecond and nanosecond laser. As a result, nickel ablation by picosecond laser and femtosecond laser, which are called ultrashort laser, has similar machinability because of relaxation time of metals, whereas nanosecond Nd:YAG laser has lower absorption, higher thermalization effect in comparison with ultrashort laser.

• Advances in Computational Design
• /
• 제5권1호
• /
• pp.13-34
• /
• 2020

As small size and complex metal machining components demand increases, cutting processes in microscale become necessary. Ball-end milling is a commonly used finishing process, which nowadays can be applied in the microscale size. Surface quality and dimensional accuracy are two basic parameters that affect small size components in their assembly and functionality. Thus, good quality can be achieved by optimizing the cutting conditions of the procedure. This study presents a 3D simulation model of ball-end milling in microscale developed in a commercial CAD software and its optical and computing results. These carried out results are resumed to surface topomorphy, surface roughness, chip geometry and cutting forces calculations that arising during the cutting process. A great number of simulations were performed in a milling machine centre, applying the discretized kinematics of the procedure and the final results were compared with measurements of Al7075-T651 experiments.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2003년도 춘계학술대회논문집
• /
• pp.434-438
• /
• 2003

The shearing process for the sheet metal is normally used in the precision elements such as semi-conductor components. In these precision elements, the burr formation brings a bad effect on the system assembly and demands the additional de-burring process. In this paper, we have developed the desktop-type precision punching system to investigate the burr formation mechanism and present kinematically Punch-die auto aligning methodology, for the purpose of burr unifomizing and minimizing, between the rectangular shaped punch and die. By using the scanning electron microscope, the aligned punching results are compared with the miss-aligned ones. Also, we measured the relative burr heights using the self-designed laser measuring device for insitu self aligning. Since it is hard to get the perfect, so called, burr-free edges during the shearing process, we introduced the ultrasonic do-burring machine. The de-burring operation was carried out by a novel do-burring method, the reversal flow resistance method, under different machining loads and abrasive types. The final do-burring results show the validity of our punching do-burring system pursuing the burr-free punched elements.

• 대한치과보철학회지
• /
• 제42권2호
• /
• pp.192-209
• /
• 2004

Purpose : The purpose of this study was to evaluate the machining accuracy and consistency of implant/abutment/screw combination or internal connection type. Material and methods: In this study, each two randomly selected internal implant fixtures from ITI, 3i, Avana, Bicon, Friadent, Astra, and Paragon system were used. Each abutment was connected to the implant with 32Ncm torque value using a digital torque controller or tapping. All samples were cross-sectioned with grinder-polisher unit (Omnilap 2000 SBT Inc) after embeded in liquid unsaturated polyester (Epovia, Cray Valley Inc). Then optical microscopic and scanning electron microscopic(SEM) evaluations of the implant-abutment interfaces were conducted to assess quality of fit between the mating components. Results : 1) Generally, the geometry of the internal connection system provided for a precision fit of the implant/abutment into interface. 2) The most precision fit of the implant/abutment interface was provided in the case of Bicon System which has not screw. 3) The fit of the implant/abutment interface was usually good in the case of ITI, 3I and Avana system and the amount of fit of the implant/abutment interface was similar to each other. 4) The fit of the implant/abutment interface was usually good in the case of Friadent, Astra and Paragon system. The case of Astra system with the inclined contacting surface had the most Intimate contact among them. 5) Amount of intimate contact in the abutment screw thread to the mating fixture was larger in assembly with two-piece type which is separated screw from abutment such as Friadent, Astra and Paragon system than in that with one-piece type which is not seperated screw from abutment such as ITI, 3I and Avana system. 6) Amount of contact in the screw and the screw seat of abutment was larger in assembly of Friadent system than in asembly of Astra system of Paragon system. Conclusion: Although a little variation in machining accuracy and consistency was noted in the samples, important features of all internal connection systems were the deep, internal implant-abutment connections which provides intimate contact with the implant walls to resist micro-movement, resulting in a strong stable interface. From the results of this study, further research of the stress distribution according to the design of internal connection system will be required.

• 한국기계가공학회지
• /
• 제18권4호
• /
• pp.93-99
• /
• 2019

A cross drilling/milling Unit is an important mechanical part which is widely used in many kinds of machining tool, and various gear trains with good accuracy and reliability features are widely used in power transmission systems. A study on a novel power transmission optimization method for driving gear trains in cross drilling/milling units is presented in this paper. A commercial program for gear system simulation, Romax Designer, was used in this research to intuitively observe the gear meshing and the load distribution conditions on the gear teeth. We obtained the optimal modification value through comparing the results of repeated experiments. For validation, optimized gears were fabricated and then measured with a precision tester.