• 센서학회지
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• 제20권6호
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• 센서학회지
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• 제11권4호
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• pp.191-199
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• 2002

This paper presents the design concept, theoretical investigation, and fabrication of a six-degree of freedom (6-DOF) turbulent flow micro sensor utilizing the piezoresistive effect in silicon. Unlike other flow sensors, which typically measure just one component of wall shear stress, the proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining conventional and four-terminal piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than the forty eight piezoresistors of the prior art piezoresistive 6-DOF force sensor.

• KSTLE International Journal
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• 제7권1호
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• pp.22-26
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• 2006

A simple finite element analysis is performed to simulate the thermal characteristics of a micro sensor package with thin film heater embedded in the glass wall of a micro-channel. In this paper, Electric characteristics of ITO sputtered heater were presented in this study, which can be used as a map of heater design in the range of available system temperature. The effects of thermo-physical properties of materials, geometrical structure and boundary condition on the thermal performance are also investigated. Finally, the design of micro-flow induced thermal sensor that is capable of measuring fluid flow with a lower flow detection limit of approximately 24pL/s is presented.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.171-172
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• 2011

• Progress in Superconductivity
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• 제12권1호
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• pp.41-45
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• 2010

Low temperature micro-calorimeters have been employed in the field of high resolution alpha spectrometers. These alpha detectors typically consist of a superconducting or metal absorber and a temperature sensor. The temperature sensor can be a transition edge sensor (TES), a metallic magnetic calorimeter (MMC) or other low temperature detectors for an accurate measurement of temperature change due to an alpha particle absorption. We report a recent study of the heat flow between a replaceable absorber and a temperature sensor. A piece of gold foil in $2.4{\times}2.7{\times}0.03\;mm^3$ is used as an absorber. A $40\;{\mu}m$ diameter Au:Er paramagnetic sensor is attached to another small piece of gold foil in $400{\times}200{\times}30\;{\mu}m^3$ to serve as the temperature sensor. This sensor assembly, Au:Er and gold foil, is placed on a miniature SQUID susceptometer in a gradiometric configuration. The thermal connection between the absorber and the sensor was made with three gold bonding wires. The measured thermal conductance shows a linear dependence to the temperature. The values are in a good agreement with Wiedemann-Franz type thermal conductance of the gold wires.

• 한국항행학회논문지
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• 제14권6호
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• pp.984-989
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• 2010

본 논문에서는 초소형 정밀 마이크로 흐름센서를 설계하기 위해 Java 멀티스레드를 이용한 병렬 프로그래밍 기법을 도입하여 센서 모듈의 성능 분석과 개선이 가능한 병렬처리형 설계 툴을 개발하였다. 연산에 따른 기본 성능을 측정하기 위하여 열운송 방정식에 지배되는 포텐셜 문제를 두 개의 실험모델로 나누어 실험을 수행하였다. 시뮬레이션 결과 네트워크 PC의 수를 증가시키면 이와 비례하는 속도향상 특성이 나타났다. 따라서 본 연구에서 제안하는 병렬화 방안은 대규모 연산모델에도 적용 가능함을 확인하였다.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제12권10호
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• pp.4754-4773
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• 2018

In sensor medium access control (SMAC) protocol, sensor nodes can only access the channel in the scheduling and listening period. However, this fixed working method may generate data latency and high conflict. To solve those problems, scheduling duty in the original SMAC protocol is divided into multiple small scheduling duties (micro duty MD). By applying different micro-dispersed contention channel, sensor nodes can reduce the collision probability of the data and thereby save energy. Based on the given micro-duty, this paper presents an adaptive duty cycle (DC) and back-off algorithm, aiming at detecting the fixed duty cycle in SMAC protocol. According to the given buffer queue length, sensor nodes dynamically change the duty cycle. In the context of low duty cycle and low flow, fair binary exponential back-off (F-BEB) algorithm is applied to reduce data latency. In the context of high duty cycle and high flow, capture avoidance binary exponential back-off (CA-BEB) algorithm is used to further reduce the conflict probability for saving energy consumption. Based on the above two contexts, we propose an improved SMAC protocol, micro duty adaptive SMAC protocol (MDA-SMAC). Comparing the performance between MDA-SMAC protocol and SMAC protocol on the NS-2 simulation platform, the results show that, MDA-SMAC protocol performs better in terms of energy consumption, latency and effective throughput than SMAC protocol, especially in the condition of more crowded network traffic and more sensor nodes.

• 한국정밀공학회지
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• 제26권11호
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• pp.138-145
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• 2009

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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• pp.17-20
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• 2000

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD's and micro-heaters on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, The MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures. In investigating output characteristics of the fabricated micro-flowsensors, the output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000 seem/min, heating power of 1.2W.