Design and Fabrication of Six-Degree of Freedom Piezoresistive Turbulent Water Flow Sensor |
Dao, Dzung Viet
(Graduate School of Science and Engineering, Ritsumeikan University)
Toriyama, Toshiyuki (New Energy and Industrial Technology Development Organization) Wells, John (Graduate School of Science and Engineering, Ritsumeikan University) Sugiyama, Susumu (Graduate School of Science and Engineering, Ritsumeikan University) |
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MEMS based transducers for boundary layer control
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2 |
Piezoresistive properties of silicon diffused layers
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DOI |
3 |
MEMS surface fence sensor for wall shear stress measurement in turbulent flow areas
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Graphical representation of the piezoresistance coefficients in Si shear coefficients in plane
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DOI |
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Flat-type six-axial force-senseor
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Triaxial normal and shear force sensor
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Closed-form force sensing of a 6-axis force transducer based on the Stewart platform
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9 |
Semiconducting stress transducers utilizing the transverse
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DOI |
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the corss-stream plane of a turbulent channel flow
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11 |
A planar capacitive force sensor
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12 |
Youngs modulus, shear modulus
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DOI |
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