• 제목/요약/키워드: Micro fabrication

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동결-젤 주조 공정 기반 삼차부틸알코올을 이용한 단일방향 기공구조를 가지는 이상인산칼슘 세라믹 지지체의 제조 및 특성평가 (Fabrication and Characterization of Biphasic Calcium Phosphate Scaffolds with an Unidirectional Macropore Structure Using Tertiary-Butyl Alcohol-Based Freeze-Gel Casting Method)

  • 김경록;옥경민;김동현;박홍채;윤석영
    • 한국세라믹학회지
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    • 제50권4호
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    • pp.263-268
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    • 2013
  • Porous biphasic calcium phosphate scaffolds were fabricated by a freeze-gel casting technique using a tertiary-butyl alcohol (TBA)-based slurry. After sintering, unidirectional macropore channels of scaffolds aligned regularly along the TBA ice growth direction were tailored simultaneously with micropores formed in the outer wall of the pore channels. The crystallinity, micro structure, pore configuration, bulk density, and compressive strength for the scaffolds were investigated with X-ray diffractometery, scanning electron microscopy analysis, a water immersion method, and a universal test machine. The results revealed that the sintered porosity and pore size generally resulted in a high solid loading which resulted in low porosity and small pore size, which relatively increased the higher compressive strength. After being sintered at $1100-1300^{\circ}C$, the scaffolds showed an average porosity and compressive strength in the range 35.1-74.9% and 65.1-3.0 MPa, respectively, according to the processing conditions.

MEMS 응용을 위한 $Ar^+$ 이온 레이저에 의한 단결정/다결정 실리콘 식각 특성 (Characteristics of single/poly crystalline silicon etching by$Ar^+$ ion laser for MEMS applications)

  • 이현기;한승오;박정호;이천
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권5호
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    • pp.396-401
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    • 1999
  • In this study, $Ar^+$ ion laser etching process of single/poly-crystalline Si with $CCl_2F_2$ gas is investigated for MEMS applications. In general, laser direct etching process is useful in microelectronic process, fabrication of micro sensors and actuators, rapid prototyping, and complementary processing because of the advantages of 3D micromachining, local etching/deposition process, and maskless process with high resolution. In this study, a pyrolytic method, in which $CCl_2F_2$ gasetches molten Si by the focused laser, was used. In order to analyze the temperature profile of Si by the focused laser, the 3D heat conduction equation was analytically solved. In order to investigate the process parameters dependence of etching characteristics, laser power, $CCl_2F_2$ gas pressure, and scanning speed were varied and the experimental results were observed by SEM. The aspect ratio was measured in multiple scanning and the simple 3D structure was fabricated. In addition, the etching characteristics of $6\mum$ thick poly-crystalline Si on the insulator was investigated to obtain flat bottom and vertical side wall for MEMS applications.

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ZnO와 TiO2 함유 복합나노섬유의 제조와 유해물질분해 성능 평가 (Fabrication of ZnO and TiO2 Nanocomposite Fibers and Their Photocatalytic Decomposition of Harmful Gases)

  • 허윤선;이승신
    • 한국의류학회지
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    • 제35권11호
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    • pp.1297-1308
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    • 2011
  • This research investigates the application of ZnO (zinc oxide) nanoparticles and $TiO_2$ (titanium dioxide) nanoparticles to polypropylene nonwoven fabrics via an electrospinning technique for the development of textile materials that can decompose harmful gases. To fabricate uniform ZnO nanocomposite fibers, two types of ZnO nanoparticles were applied. Colloidal $TiO_2$ nanoparticles were chosen to fabricate $TiO_2$ nano- composite fibers. ZnO/poly(vinyl alcohol) (PVA) and $TiO_2$/PVA nanocomposite fibers were electrospun under a variety of conditions that include various feed rates, electric voltages, and capillary diameters. The morphology of electrospun nanocomposite fibers was examined with a field-emission scanning electron micro- scope and a transmission electron microscope. Decomposition efficiency of gaseous materials (formaldehyde, ammonia, toluene, benzene, nitrogen dioxide, sulfur dioxide) by nanocomposite fiber webs with 3wt% nano-particles (ZnO or $TiO_2$) and 7$g/m^2$ web area density was assessed. This study shows that ZnO nanoparticles in colloid were more suitable for fabricating nanocomposite fibers in which nanoparticles are evenly dispersed than in powder. A heat treatment was applied to water-soluble PVA nanofiber webs in order to stabilize the electrospun nanocomposite fibrous structure against dissolution in water. ZnO/PVA and $TiO_2$/PVA nanofiber webs exhibited a range of degradation efficiency for different types of gases. For nitrogen dioxide, the degradation efficiency was 92.2% for ZnO nanocomposite fiber web and 87% for $TiO_2$ nanocomposite fiber web after 20 hours of UV light irradiation. The results indicate that ZnO/PVA and $TiO_2$/PVA nano- composite fiber webs have possible uses in functional textiles that can decompose harmful gases.

이온성 폴리머-금속 복합재료 작동층을 사용한 플랩 밸브 마이크로 펌프의 설계, 개발 및 특성 규명 (Design, fabrication and characterization of a flap valve mircopump using an ionic polymer-metal composite actuator)

  • 구엔탄텅;구옌빈칸;유영태;구남서
    • 한국항공우주학회지
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    • 제35권4호
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    • pp.302-307
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    • 2007
  • 본 연구에서는 이온성 폴리머-금속 복합재료 (IPMC) 작동기를 사용한 플랩 밸브 마이크로 펌프의 설계, 제작 및 실험적 특성 규명을 수행하였다. 나피온/실리케이트 층과 나피온/실리카 나노복합재료를 기반으로 한 다층형 IPMC를 마이크로 펌프의 작동층으로 사용하였다. 마이크로 펌프의 핵심 요소인 IPMC 다이아프램의 주위를 유연한 폴리디메틸실옥산(PDMS)을 사용하여 지지하도록 함으로써 상당히 큰 작동 변위를 내도록 설계하였다. 이렇게 개발된 마이크로 펌프의 크기는 $20{\times}20{\times}5$ ${mm}^3$ 이고, 최대 유량은 760 l/min, 최대 배압은 1.5 kPa이었다. 본 연구에서 개발한 마이크로 펌프는 간단하고 효율적인 설계를 수행하여 제작이 용이할 뿐 아니라, 동작 전압이 1-3V라는 장점이 있다.

Fe계 벌크 비정질 합금을 이용한 레이저 용접층의 파손 거동 (Failure Behavior of Laser Cladding Layer used by Fe-based Bulk Metallic Glass)

  • 임병철;김대환;박상흡
    • 한국산학기술학회논문지
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    • 제16권9호
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    • pp.5743-5747
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    • 2015
  • 본 연구에서는 가스아토마이저로 제조된 Fe계 벌크비정질 합금 분말을 이용하여 제작된 시험편에 레이저 육성용접을 하였고, 인장시험과 경도시험의 실시 및 미세조직을 관찰하여 육성용접 층의 파괴거동을 분석하였다. 인장시험 결과 육성용접층은 탄성변형 후 바로 파괴가 일어났고, 모재는 소성변형 후 파괴가 일어났다. 육성용접층과 모재의 실제 최대인장강도는 각 각 955.9Mpa과 220.4Mpa이다. 육성용접층과 모재의 미소경도는 각 각 $485.5{\pm}21$$197.4{\pm}14$ 이었고, 육성용접층은 매우 높은 경도를 갖는다. 모재는 조대한 결정립을 갖는 미세 구조를 나타내었다. 인장시험 후 파단면을 고분해능주사전자현미경으로 관찰한 결과 육성용접층과 모재의 파괴형태는 각각 취성파괴와 연성파괴를 나타내었다.

MEMS 공정을 이용한 마이크로 PZT 외팔보 에너지 수확소자의 제작 및 특성 (Fabrication and Characteristics of Micro PZT Cantilever Energy Harvester Using MEMS Technologies)

  • 김문근;황범석;정재화;민남기;권광호
    • 한국전기전자재료학회논문지
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    • 제24권6호
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    • pp.515-518
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    • 2011
  • In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)$O_3$ cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 12 ${\mu}M$, and an integrated Si proof mass with dimensions of about 1,410 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 450 ${\mu}M$. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 ${\mu}Wat$ 1.0 g and 23.7 ${\Omega}$, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.

진공 압력차이법에 의한 나노 정밀도를 가지는 폴리디메틸실록산 형상복제 (Fabrication Process of a Nano-precision Polydimethylsiloxane Replica using Vacuum Pressure-Difference Technique)

  • 박상후;임태우;양동열;공홍진;이광섭
    • 폴리머
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    • 제28권4호
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    • pp.305-313
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    • 2004
  • 본 연구는 나노 복화공정을 이용하여 마이크로 혹은 나노공정에 응용이 가능한 형상모형 제작공정 개발과 폴리디메틸실록산 (polydimethylsiloxane)를 이용하여 만들어진 형상모형의 몰드로 나노급 정밀도의 폴리디메틸실록산 형상을 복제하는 공정에 관한 것이다. 본 연구에서 제안한 나노 복화공정은 복잡한 형상모형 (pattern)이나 2차원 형상을 CAD 파일 없이 비트맵 그림파일을 이용하여 직접적으로 200nm 정밀도를 가지는 형상으로 만들 수 있다. 형상모형은 펨토초 레이저를 이용하여 이광자 흡수 중합법으로 제작하기 때문에 형상의 정밀도는 레이저 범의 회절한계 이하로 얻을 수 있다. 이렇게 제작된 마스터 형상모형은 본 연구에서 제안한 진공압력차이법으로 폴리디메틸실록산 몰드를 제작하여 기존의 제작방법에 비하여 정밀한 제작이 가능함을 보였으며 또한 제작된 몰드를 이용하여 양각의 플리디메틸실록산 스탬프를 제작하였다.

스테인레스강 Overlay 용접부의 Disbonding에 관한 연구 1

  • 이영호;윤의박
    • Journal of Welding and Joining
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    • 제1권2호
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    • pp.45-52
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    • 1983
  • Many pressure vessels for the hot H$\sub$2//H$\sub$2/S service are made of 2+1/4Cr-1Mo steel with austenitic stainless steel overlay to combat agressive corrosion due to hydrogen sulfide. Hydrogen dissolves in to materials during operation, and sometimes gives rise to unfore-seeable damages. Appropriate precautions must, therefore, be taken to avoid the hydrogen induced damages in the design, fabrication and operation stage of such reactor vessels. Recently, hydrogeninduced cracking (or Disbonding) was found at the interface between base metal and stainless weld overlay of a desulfurizing reactor. Since the stainless steel overlay weld metal is subjected to thermal and internal-pressure loads in reactor operation, it is desirable for the overlay weld metal to have high strength and ductility from the stand point of structural safety. In section III of ASME Boiler and Pressure Vessel Code, Post-Weld Heat Treatment(PWHT) of more than one hour per inch at over 1100.deg. F(593.deg. C) is required for the weld joints of low alloy pressure vessel steels. This heat treatment to relieve stresses in the welded joint during construction of the pressure vessel is considered to cause sensitization of the overlay weld metal. The present study was carried out to make clear the diffusion of carbon migration by PWHT in dissimilar metal welded joint. The main conclusion reached from this study are as follows: 1) The theoretical analysis for diffusion of carbon in stainless steel overlay weld metal does not agree with Fick's 2nd law but the general law of molecular diffusion phenomenon by thermodynamic chemical potential. 2) In the stainless steel overlay welded joint, the PWHT at 720.deg. C for 10 hours causes a diffusion of carbon atoms from ferritic steel into austenitic steel according to the theoretical analysis for carbon migration and its experiment. 3) In case of PWHT at 720.deg. C for 10 hours, the micro-hardness of stainless steel weld metal in bonded zone increase very highly in the carburized layer with remarkable hardening than that of weld metal.

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광공진 현상을 이용한 입체 영상센서 및 신호처리 기법 (Optical Resonance-based Three Dimensional Sensing Device and its Signal Processing)

  • 박용화;유장우;박창영;윤희선
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2013년도 추계학술대회 논문집
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    • pp.763-764
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    • 2013
  • A three-dimensional image capturing device and its signal processing algorithm and apparatus are presented. Three dimensional information is one of emerging differentiators that provides consumers with more realistic and immersive experiences in user interface, game, 3D-virtual reality, and 3D display. It has the depth information of a scene together with conventional color image so that full-information of real life that human eyes experience can be captured, recorded and reproduced. 20 Mega-Hertz-switching high speed image shutter device for 3D image capturing and its application to system prototype are presented[1,2]. For 3D image capturing, the system utilizes Time-of-Flight (TOF) principle by means of 20MHz high-speed micro-optical image modulator, so called 'optical resonator'. The high speed image modulation is obtained using the electro-optic operation of the multi-layer stacked structure having diffractive mirrors and optical resonance cavity which maximizes the magnitude of optical modulation[3,4]. The optical resonator is specially designed and fabricated realizing low resistance-capacitance cell structures having small RC-time constant. The optical shutter is positioned in front of a standard high resolution CMOS image sensor and modulates the IR image reflected from the object to capture a depth image (Figure 1). Suggested novel optical resonator enables capturing of a full HD depth image with depth accuracy of mm-scale, which is the largest depth image resolution among the-state-of-the-arts, which have been limited up to VGA. The 3D camera prototype realizes color/depth concurrent sensing optical architecture to capture 14Mp color and full HD depth images, simultaneously (Figure 2,3). The resulting high definition color/depth image and its capturing device have crucial impact on 3D business eco-system in IT industry especially as 3D image sensing means in the fields of 3D camera, gesture recognition, user interface, and 3D display. This paper presents MEMS-based optical resonator design, fabrication, 3D camera system prototype and signal processing algorithms.

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센서네트워크용 Sequenced Directed Diffusion 기법 연구 (A study on a sequenced directed diffusion algorithm for sensor networks)

  • 장재신
    • 한국정보통신학회논문지
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    • 제11권5호
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    • pp.889-896
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    • 2007
  • 센서기술 및 무선통신 기술의 발달로 센서네트워크에 대한 연구가 가속화되고 있다. 센서노드는 크기 및 용량의 제한 때문에 간단하면서 에너지를 효율적으로 사용할 수 있는 프로토콜을 설계하는 것이 매우 중요하다. 기존 센서네트워크용 라우팅 프로토콜로 널리 알려져 있는 directed diffusion 프로토콜은 간단하다는 장점을 갖지만 Interest/Exploratory data 메시지를 Flooding 기법에 따라 전송하게 됨에 따라 에너지 소모가 크다는 단점을 가지고 있다. 따라서 본 논문에서는 directed diffusion 기법이 가진 단점을 보완하면서 각 센서노드가 에너지를 균형 있게 소비할 수 있는 설계된 센서 네트워크 용 라우팅 기법을 제안하고 시뮬레이션을 통해 성능평가를 수행하였다. 성능평가 결과에 따르면 본 연구에서 제안한 라우팅 프로토콜이 기존 directed diffusion 기법에 비해 에너지를 훨씬 효율적으로 사용하면서 센서노드간 에너지 소비 불균형 문제를 해결하고 있음을 수치계산 결과를 통해 확인할 수 있었다.