• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.326-326
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• 2014

It has been known since the mid 1960s that Ag can be photodissolved in chalcogenide glasses to form materials with interesting technological properties. In the 40 years since, this effect has been used in diverse applications such as the fabrication of relief images in optical elements, micro photolithographic schemes, and for direct imaging by photoinduced Ag surface deposition. ReRAM, also known as conductive bridging RAM (CBRAM), is a resistive switching memory based on non-volatile formation and dissolution of a conductive filament in a solid electrolyte. Especially, Ag-doped chalcogenide glasses and thin films have become attractive materials for fundamental research of their structure, properties, and preparation. Ag-doped chalcogenide glasses have been used in the formation of solid electrolyte which is the active medium in ReRAM devices. In this paper, we investigated the nature of thin films formed by the photo-dissolution of Ag into Ge-Se glasses for use in ReRAM devices. These devices rely on ion transport in the film so produced to create electrically programmable resistance states [1-3]. We have demonstrated functionalities of Ag doped chalcogenide glasses based on their capabilities as solid electrolytes. Formation of such amorphous systems by the introduction of Ag+ ions photo-induced diffusion in thin chalcogenide films is considered. The influence of Ag+ ions is regarded in terms of diffusion kinetics and Ag saturation is related to the composition of the hosting material. Saturated Ag+ ions have been used in the formation of conductive filaments at the solid electrolyte which is the active medium in ReRAM devices. Following fabrication, the cell displays a metal-insulator-metal structure. We measured the I-V characteristics of a cell, similar results were obtained with different via sizes, due to the filamentary nature of resistance switching in ReRAM cell. As the voltage is swept from 0 V to a positive top electrode voltage, the device switches from a high resistive to a low resistive, or set. The low conducting, or reset, state can be restored by means of a negative voltage sweep where the switch-off of the device usually occurs.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.299-299
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• 2014

기존의 고출력 광원들이 환경문제 등으로 외국에서 규제대상으로 지정되고 있는 가운데고체 상태의 광원인 Light-emitting diode (LED)는 기존의 광원에 비해 에너지 절감효과 크기 때문에 인해 널리 사용되고 있는 추세이다. 대부분의 백색 LED의 경우 청색 LED에 황색 형광체를 사용하는 것이 일반적이다. 그러나 이의 경우 빛의 흡수와 재방출 과정에서 생기는 에너지 변환손실의 문제가 불가피하다. 또한, 두 종류의 색을 섞어서 나타나는 낮은 연색성의 문제가 있고 사용할 수 있는 형광체의 종류와 조합도 일본 등 해외에 출원된 특허권으로 연구개발에 어려움이 있다. 이를 해결하기 위해 본 연구에서는 형광체를 사용하지 않는 단일 백색 LED를 개발을 위하여 극성과 반극성을 조합한 구조를 연구하였다. Photo-lithography를 이용하여 다양한 크기와 구조의 홀 패턴을 얻을 수 있었으며, metal organic chemical vapor deposition을 이용하여 다양한 형태의 피라미드 구조를 성장할 수 있었다. 패턴의 홀 크기와 홀 사이의 간격을 조절하면서 성장을 진행 하였고, 그 결과 pyramid와 truncated pyramid 모양의 GaN 구조를 성장할 수 있었다. [그림 1] Pyramid 구조의 반극성 면과 truncated pyramid 구조의 극성 면사이의 성장속도 차이 때문에 양자우물의 두께가 달라짐을 확인하였다. 이로 인해 양자구속효과가 달라져 다른 파장의 발광을 기대할 수 있었다. 뿐만 아니라 In의 확산거리가 Ga보다 길어서 홀사이 간격을 달리하면 In조성비가 달라지는 효과가 있음을 확인하였고 다양한 홀 사이 간격으로부터 각기 다른 파장의 발광을 얻을 수 있었다. 파장을 조금 더 상세하게 분석하기 위하여 Photoluminescence과 Cathodoluminescence을 사용하였다. 이로써 여러 파장을 발광하는 패턴을 섞어 넓은 영역의 발광 스펙트럼을 만들었다. 특히 패턴을 섞는 방법도 홀과 에피 구조를 섞는 방법, 크기가 다른 홀 패턴을 배열하는 방법등 다양히 하며 가장 좋을 패턴을 연구하였다. 그리하여 최적의 패턴과 구조, 성장조건을 찾아 백색의 CIE 좌표값을 얻을 수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.6
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• pp.554-559
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• 2005

Ni/Cr thin film is very interesting material as thin film resistors, filaments, and humidity sensors because their relatively large resistivity, more resistant to oxidation and a low temperature coefficient of resistance (TCR). These interesting properties of Ni/Cr thin films are dependent upon the preparation conditions including the deposition environment and subsequent annealing treatments. Ni/Cr thin films of 250 nm were deposited by DC magnetron sputtering on $Al_2O_3/Si$ substrate with 2-inch Ni/Cr (80/20) alloy target at room temperature for 45 minutes. Annealing treatments were performed at $400^{\circ}C,\;500^{\circ}C,\;and\;600^{\circ}C$ for 6 hours in air or $H_2$ ambient, respectively. The clear crystal boundaries without crystal growth and the densification were accomplished when the pores were disappeared in air ambient. Most of surface was oxidic including NiO, $Ni_2O_3$ and $Cr_xO_y$(x=1,2, y=2,3) after annealing in air ambient. The crystal growth in $H_2$ ambient was formed and stabilized by combination with each other due to the suppression of oxidized substance on film surface. Most oxidic Ni was restored when the oxidic Cr was present due to its stability in high-temperature $H_2$ ambient.

• Journal of Welding and Joining
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• v.28 no.5
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• pp.51-57
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• 2010

Brittle microstructure created in a heat affected zone (HAZ) during the welding of low alloy steel can be eliminated by post-weld heat treatment (PWHT). If the PWHT is not possible during a repair welding, the controlled bead depositions of multi-pass welding should be applied to obtain tempering effect on the HAZ without PWHT. In order to anticipate and control the tempering effect during the temper bead welding, the definition of temperature curve obtained from the analytical solution was suggested in this research. Because the analytical solution for heat flow is expressed as a mathematical equation of weld parameters, it may be effective in anticipating the effect of each weld parameter on the tempering in HAZ during the successive bead depositions. The reheating effect by the successive bead layer on the brittle coarse grained HAZ formed by earlier bead deposition was estimated by comparing the overlapped distance between the temperature curves in the HAZ. Three layered weld specimens of SA508 base metal with A52 filler were prepared by controlling heat input ratio between layers. The tempering effect anticipated by using the overlapped distance between the temperature curves was verified by measuring the micro-hardness distribution in the HAZ of prepared specimens. The temperature curve obtained from analytical solution was expected as a good tool to find optimal temper bead welding conditions.

• Applied Chemistry for Engineering
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• v.20 no.2
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• pp.177-185
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• 2009

The failure analysis of scales deposited on automotive thermostat housing has been carried out. Observations using energy dispersive spectroscopy and electron probe micro analyzer indicate that the main components of scales are some of additives of coolant used. For a detailed investigation of organic matters pyrolysis-GC/MS is employed. The result shows that the main organic component is benzoic acid and furthermore, a small amount of acetophenone, benzene and phenyl group is detected. Based on the results of failure analysis performed, the scales on automotive thermostat housing appear due to the deposition of coolant components, followed by crevice corrosion, into gap between housing and rubber horse. New accelerated test methodology, which could mimic the scale formation and the crevice corrosion on thermostat housing, is developed considering the above results. In order to reproduce the real operating conditions, the accelerating factors, i.e. temperature and humidity, are changed and programmed. The reproducibility of the accelerated test proposed is confirmed after analyzing the scales obtained from the accelerated test.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.346-346
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• 2011

실리콘 나노와이어는 높은 표면적으로 인해 뛰어난 감지 능력을 가지는 재료 중 하나로 다양한 센서 응용 분야에 사용되고 있다. 이를 제작하는 방법에는 Micro Electro Mechanical Systems (MEMS) 공정을 이용한 Top-down 방식과 Vapor-Liquid-Solid (VLS) 공정을 이용한 Bottom-up 방식이 널리 사용되고 있다. 특히 Plasma-Enhanced Chemical Vapor Deposition(PECVD)와 Au 촉매를 이용한 Bottom-up 방식은 수십 나노미터 이하의 실리콘 나노와이어를 간단한 변수 조절을 통해 성장시킬 수 있다. 또한 Au/Si의 공융점인 363$^{\circ}C$보다 낮은 온도에서 $SiH_4$를 분해시킬 수 있어 열적 효과로 인한 손실을 줄일 수 있는 장점을 지니고 있다. 하지만 PECVD를 이용한 실리콘 나노와이어 성장은 VLS 공정을 통해 표면으로부터 수직으로 성장하게 되는데 이는 센서 응용을 위한 전극 사이의 수평 연결 어려움을 지니고 있다. 따라서 이를 피하기 위한 표면 성장된 실리콘 나노와이어가 요구된다. 본 연구에서는 PECVD VLS 공정을 이용하여 $HAuCl_4$를 촉매로 이용한 표면 성장된 Tree-like 실리콘 나노와이어를 성장시켰다. 공정가스로는 $SiH_4$와 이를 분해시키기 위해 Ar 플라즈마를 사용 하였고 웨이퍼 표면에 HAuCl4를 분사하고 고진공 상태에서 챔버 기판을 370$^{\circ}C$까지 가열한 후 플라즈마 파워(W) 및 공정 압력(mTorr)을 변수로 두어 실험을 진행하였다. 기존의 보고된 연구와 달리 환원된 금 입자 대신 $HAuCl_4$용액을 그대로 사용하였는데 이는 표면 조도(Surface roughness)를 가지는 Au 박막 상태로 존재하게 된다. 이 중 마루(Asperite) 부분에 PECVD로부터 발생된 실리콘 나노 입자가 상대적으로 높은 확률로 흡착하게 되어 실리콘 나노와이어의 표면성장을 유도하게 된다. 성장된 실리콘 나노와이어는 SEM과 EDS를 이용하여 직경, 길이 및 화학적 성분을 측정하였다. 직경은 약 100 nm, 길이는 약 10 ${\mu}m$ 정도로 나타났으며 Tree-like 실리콘 나노와이어가 성장되었다. 향후 전극이 형성된 기판위에 이를 직접 성장시킴으로써 이 물질의 I-V 특성을 파악 할 것이며 이는 센서 응용 분야에 도움이 될 것으로 기대된다.

• Applied Chemistry for Engineering
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• v.10 no.2
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• pp.225-230
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• 1999

Low pressure metal organic chemical vapor deposition (LPMOCVD) of $Li_2O$ solid thin films from Li(DPM) in nitrogen-oxygen or argon-oxygen atmosphere was experimentally investigated by using a small hot wall tubular type reactor. XRD and ESCA analysis revealed that $Li_2CO_3$ film grew in nitrogen-oxygen atmosphere and $Li_2O$ grew in argon-oxygen atmosphere. The grown lithium oxide or carbonate reacted with silicon or silica base materials to produce silicates. The CVD model analysis by means of the well-known micro trench method and Monte Carlo simulation was not fully successful, but a set of data on gas phase reaction rate constant and surface reaction constant was obtained.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.700-702
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• 2005

A 5.0-inch transmissive type plastic TFT arrays were successfully fabricated on a plastic substrate at the resolution of $400{\times}3{\times}300$ lines (100ppi). All of the TFT processes were carried out below $150^{\circ}C$ on PES plastic films. After thin film deposition using PECVD, thin film failures such as film delamination and cracking often occurred. For successful growth of thin films (about 1um) without their failures, it is necessary to solve the critical problem related to the internal compressive stress (some GPa) leading to delamination at a threshold thickness value of the films. The Griffith's theory explains the failure process by looking at the excess of elastic energy inside the film, which overcomes the cohesive energy between film and substrate. To increase the above mentioned threshold thickness value there are two possibilities: (i) the improvement of the interface adhesion (for example, through surface micro-roughening and/or surface activation), and (ii) the reduction of the internal stress. In this work, reducing a-Si layer film thickness and optimizing a barrier SiNx layer have produced stable CVD films at 150oC, over PES substrates

• Transactions on Electrical and Electronic Materials
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• v.8 no.2
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• pp.84-88
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• 2007

[ $Bi_{1.5}Zn_{1.0}Nb_{1.5}O_7$ ] (BZN), $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMN), and $Bi_2Cu_{2/3}Nb_{4/3}O_7$ (BCN) pyrochlore thin films were prepared on $Cu/Ti/SiO_2/Si$ substrates by pulsed laser deposition and the micro-structural and electrical properties were characterized for embedded capacitor applications. The BZN, BMN, and BCN films deposited at $25\;^{\circ}C$ and $150\;^{\circ}C$, respectively show smooth surface morphologies and dielectric constants of about $39\;{\sim}\;58$. The high dielectric loss of the films deposited at $150\;^{\circ}C$ compared with films deposited at $25\;^{\circ}C$ was attributed to the defects existing at interface between the films and copper electrode by an oxidation of copper bottom electrode. The leakage current densities and breakdown voltages in 200 nm thick-BMN and BZN films deposited at $150\;^{\circ}C$ are approximately $2.5\;{\times}\;10^{-8}\;A/cm^2$ at 3 V and above 10 V, respectively. Both BZN and BMN films are considered to be suitable materials for embedded capacitor applications.

• The korean journal of orthodontics
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• v.21 no.3
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• pp.603-614
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• 1991

To study the possibility of attraction magnetic forces to expand maxillary arch, we used 2 big adult dogs, 2 small puppies, 1 small adult dog as experiments, and 1 small adult dog as a control. We measured the intercanine width and intermolar width and histologically observed in the suture and cervical and apex region of teeth and took occlusal X-rays to observe separation of suture line in the maxilla. The results were as follows: 1. Expansion velocities of intercanine (0.25mm/day) and intermolar widths (0.23mm/day) in puppies were faster than those (0.135mm/day, 0.09mm/day) in adults. 2. In all experiments in adults (0.135mm/day) and puppies (0.25mm/day), expansion velocity of intercanine widths were faster than those (0.09mm/day, 0.23mm/day) of intermolar width. 3. In all experiments ectatic changes were observed and cellularities of fibroblast increased in the suture line. Only in adults dogs the separations of palatal suture were observed in the occlusal X-ray view. 4. In the puppies bony deposition was particularly observed in the suture line and micro-bony fragments were often observed. 5. In the all experiments no root resorption was observed in the cervical and root area, but normal root resorption due to eruption of permanent teeth was observed in the puppies.