• Smart Structures and Systems
• /
• v.30 no.3
• /
• pp.239-243
• /
• 2022

We investigate the influence of nonlinear viscoelastic damping on the response of a cantilever sensor covered by piezoelectric layers in a symmetric or asymmetric configuration. We formulate an initial-boundary-value problem which consistently incorporates both geometric and material nonlinearities including the effect of viscoelastic damping which cannot be ignored for micro- and nano-mechanical sensor operation in a vacuum environment. We employ an asymptotic multiple-scales methodology to yield the system nonlinear frequency response near its primary resonance and employ a model-based estimation procedure to deduce the system damping backone curve from controlled experiments in vacuum. We discuss the effect of nonlinear damping on sensor applications for scanning probe microscopy.

• Structural Engineering and Mechanics
• /
• v.48 no.2
• /
• pp.195-205
• /
• 2013

The buckling problem of linearly tapered micro-columns is investigated on the basis of modified strain gradient elasticity theory. Bernoulli-Euler beam theory is used to model the non-uniform micro column. Rayleigh-Ritz solution method is utilized to obtain the critical buckling loads of the tapered cantilever micro-columns for different taper ratios. Some comparative results for the cases of rectangular and circular cross-sections are presented in graphical and tabular form to show the differences between the results obtained by modified strain gradient elasticity theory and those achieved by modified couple stress and classical theories. From the results, it is observed that the differences between critical buckling loads achieved by classical and those predicted by non-classical theories are considerable for smaller values of the ratio of the micro-column thickness (or diameter) at its bottom end to the additional material length scale parameters and the differences also increase due to increasing of the taper ratio.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.637-640
• /
• 2005

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of $0\~30{\mu}N$ by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), and the force vs. deflection. From this relationship, the force constant of the cantilever was calculated to 3.45 N/m with a standard deviation of 0.01 N/m. It shows that there is a big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer s specifications.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.12
• /
• pp.64-72
• /
• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.41 no.11
• /
• pp.743-748
• /
• 2017

For diseases that are difficult to detect by conventional imaging techniques, the development of a diagnostic method that allows sensors to be inserted into the human body to aid the diagnosis of local spots of the target tissue, is highly desirable. In particular, it is extremely difficult to determine whether vulnerable plaque can later develop into atherosclerosis using only imaging techniques. However, vulnerable plaques are expected to have slightly different mechanical properties than healthy tissue. In this study, we aim to develop a piezoelectric cantilever-type sensor that can be inserted into the human body and can detect the local mechanical properties of the target tissue. A piezoelectric polymer composite based on $BaTiO_3$ nanoparticles was optimized for fabrication of a piezoelectric cantilever. Next, a micro-cone tip was fabricated at the end of the piezoelectric cantilever by thermal drawing. Finally, stiffness of biological tissue samples was measured with the piezoelectric cantilever sensor for verifying its functionality.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.493-494
• /
• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.59-60
• /
• 2008

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.250-250
• /
• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ $40{\mu}m$ long cantilevers, the fundamental frequency appeared at 147.2 kHz - 856.3 kHz. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz. Therefore, polycrystalline 3C-SiC micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Structural Engineering and Mechanics
• /
• v.71 no.3
• /
• pp.223-232
• /
• 2019

Since the actuators with small- scale structures may be exposed to external reciprocal actions lead to create undesirable loads causing instability, the buckling behaviors of them are interested to make reliable or accurate actions. Therefore, the purpose of this paper is to analyze plastic buckling behavior of the micro beam structures by adopting a Conventional Mechanism-based Strain Gradient plasticity (CMSG) theory. The effect of length scale on critical force is considered for three types of boundary conditions, i.e. the simply supported, cantilever and clamped - simply supported micro beams. For each case, the stability equations of the buckling are calculated to obtain related critical forces. The constitutive equation involves work hardening phenomenon through defining an index of multiple plastic hardening exponent. In addition, the Euler-Bernoulli hypothesis is used for kinematic of deflection. Corresponding to each length scale and index of the plastic work hardening, the critical forces are determined to compare them together.

• Journal of the Korean Ceramic Society
• /
• v.38 no.7
• /
• pp.634-638
• /
• 2001

본 연구에서는 마이크로 내시경용 바이오 센서로 응용하기 위한 Al/PZT/RuO$_2$로 이루어진 마이크로 캔틸레버를 제작하였으며, 공진 특성 및 병원체의 흡착에 따른 공진 특성 그리고 검출 감도(sensitivity)에 미치는 구조적인 영향을 전산모사를 통하여 알아보았다. 길이 100$mu extrm{m}$, 폭 50$\mu\textrm{m}$, 두께 0.3$\mu\textrm{m}$/0.25$\mu\textrm{m}$/0.7$\mu\textrm{m}$ (Al/PZT/RuO$_2$)의 크기의 제작된 마이크로 캔틸레버는 89kHz의 공진주파수를 가지고 있음을 전산모사를 통해 알 수 있었다. 바이오 센서로 응용될 때의 검출 감도는 흡착 질량의 증가에 비례하여 향상되었으며, 5% 이상의 검출 감도를 갖기 위해서는 흡착 질량이 약 5 나노그램 이상이 되어야 함을 확인할 수 있었다. 캔틸레버의 크기를 결정하는 길이, 폭, 두께중 사용 주파수 대역은 길이의 조절을 통하여 결정할 수 있고, 검출 감도의 향상을 위해서는 가능한 한 두께를 얇게 해야 함을 알 수 있었다. 반면에 폭의 변화는 공진주파수나 검출 감도에 거의 영향을 미치지 않았다.