• Title/Summary/Keyword: Micro cantilever

검색결과 136건 처리시간 0.032초

Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

  • Kim, Deok-Ho;Kim, Byungkyu;Park, Jong-Oh
    • Journal of Mechanical Science and Technology
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    • 제18권5호
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    • pp.789-797
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    • 2004
  • The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

Tuning fork형 micro-cantilever sensor (Micro-cantilever sensor using a tuning fork)

  • 김충현;안효석
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.87-90
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    • 2005
  • An experimental investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics using a commercial tuning fork. Application of acetone and ethanol with a volume of $1 {\mu}l$ on the tine of a vibrating tuning fork cause immediate response in its amplitude and frequency. It has shown that the tuning fork has ability to recognize a chemical agent with high sensitivity.

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원자간격 현미경의 캔틸레버의 정량적 특성평가를 위한 계측 시스템 개발 (Development of Measurement System for Quantitative Measurement of Cantilever in Atomic Force Microscopy)

  • 권현규;남기호
    • 한국기계가공학회지
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    • 제6권2호
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    • pp.22-27
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    • 2007
  • In this study, the two methods of stiffness measurement(Spring constant) of cantilever were proposed for quantitative measurement in Atomic Force Microscopy(AFM). As the 1st method for the measurement of stiffness, the probe method, which is used in the measurement of the semiconductor mechanical and electrical properties, was applied to the measurement of the cantilever. Experiments by the probe method were performed finding the resistance value of cantilever. As the results, the resistance was measured differently along with the dimension and the thickness of cantilever that determined the stiffness(spring constant) of the lever. As the 2nd method, the vibration characteristics(Dunkerley expression) is used to obtain the stiffness of the complex structure which is combined by AFM cantilever and the standard cantilever. We measured the resonant frequency from the complex structure using the micro stages and stereo microscope. As the results, we confirmed that the vibration characteristics(Dunkerley expression) is effected the micro complex structure of AFM cantilever.

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Micro Switch용 PZT Cantilever의 설계에 관한 연구 (A Study on design of the PZT Cantilever for Micro Switch)

  • 김인성;송재성;민복기;정순종
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.422-423
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    • 2005
  • RF Micro switches is a miniature device or an array of integration devices and mechanical components and fabricated with Ie batch-processing techniques. RF Micro switches application area are in phased arrays and reconfigurable apertures for defence and telecommunication systems, switching network for satellite communication, and single-pole double throw switches for wireless application. Recently, RF Micro switches have been developed for the application to the milimeter wave system. RF Micro switches offer a substantilly higher performance than PIN diode or FET switches. In this paper, SPDT(single-pole-double-throw) switch are designed to use 10 GHz. Actuation voltage and displacement are simulated by tool.

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CO 가스측정을 위한 마이크로 캔틸레버 센서의 최적화 설계 (Optimum Design of Micro-Cantilever Sensor for measuring CO gas)

  • 손희주;나대석;백경갑;박배호;권광호;남산;주병권
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.412-413
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    • 2005
  • This paper describes resonant frequency of the structural behavior of micro-cantilever beam simulated by FEM (Finite Element Method). The resonant characteristics and the sensitivity of cantilever-shaped SOI resonant were measured for the application of chemical sensor. The resonant frequency of the fabricated micro-cantilever system was found to be 5.59kHz when the size of cantilever is $500{\mu}m$ long, $100{\mu}m$ wide and $1{\mu}m$ thick. Generation of resonant frequency measured by Modal Analysis is resulted in length of cantilever. The length was found to be a dominant factor for the selection of required resonant frequency range. On the other side, the width had influenced very little on either the magnitude of resonant frequency or the sensitivity.

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마이크로 믹서의 형상 최적화 (Shape Optimization of a Micro-Static Mixer)

  • 한석영;김성훈
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.166-171
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    • 2004
  • In this study, shape optimization of micro-static mixer with a cantilever beam was accomplished for mixing the mixing efficiency by using successive response surface approximations. Variables were chosen as the length of cantilever beam and the angle between horizontal and the cantilever beam. Sequential approximate optimization method was used to deal with both highly nonlinear and non-smooth characteristics of flow field in a micro-static mixer. Shape optimization problem of a micro-static mixer can be divided into a series of simple subproblems. Approximation to solve the subproblems was performed by response surface approximation, which does not require the sensitivity analysis. To verify the reliability of approximated objective function and the accuracy of it, ANOVA analysis and variables selection method were implemented, respectively. It was verified that successive response surface approximation worked very well and the mixing efficiency was improved very much comparing with the initial shape of a micro-static mixer.

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튜닝포크형 미소 캔틸레버 센서의 주파수 특성 (Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork)

  • 김충현;안효석
    • 한국공작기계학회논문집
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    • 제14권5호
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    • pp.35-40
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    • 2005
  • An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.

Detection of the mechanical resonance of a micromechanical cantilever using dynamic flexural measurement technique and its mass sensing application

  • 김학성;윤호열;정운석;유나리;박정호;이상욱
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.447-447
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    • 2011
  • We studied to detect the mass variation using micro mechanical resonator. For measuring the resonance frequency of the micro mechanical system, optical method using laser interference is selected. A simple resonator is prepared by attaching an AFM cantilever on the piezo stack. The piezo stack makes a the cantilever vibrated with its resonance frequency. To change the mass of the resonator, gold was evaporated on the cantilever. We measured how much resonance frequency was changed according to the amount of gold attached on cantilever. This resonator is able to perform the role of a mass sensor and has a resolution of the order of micrograms. The fabrication of the resonator and measurement setup for detecting the mechanical resonance will be introduced in this presentation.

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