• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1115-1117
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• 2005

This paper describes the three dimension model and simulation results of a thermal actuator based on polyMUMPs process, known as thermal multimorph actuator. The device has potential application in micro-transducers such as atomic force microscope (AFM) tip and scanning tunneling microscope (STM) tip. This device made of a multi-layer materials stack together with consisted of polysilicon, $SiO_2$ and gold. A mask layout design, three dimension model and simulation results are reported and discussed.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.502-505
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• 2005

Researches about micro technology travel lively in these days. Such many researches are concentrated in the field of materials and a process field. But properties of micro materials should be known to give results of research developed into still more. In these various material properties, mechanical property such as tensile strength, elastic modulus, etc is the basic property. To measure mechanical properties in micro or nano scale, actuating must be very precise. PZT is a famous actuator which becomes a lot of use to measure very precise mechanical properties in micro research field. But PZT has a nonlinearity which is called as hysteresis. Not precision result is caused because of this hysteresis property in PZT actuator. Therefore feedback control method is used in many researches to prevent this hysteresis of PZT actuator. Feedback control method produce a good result in processing view, but cause a loss in a resolution view. In this paper, hysteresis is compensated by open loop control method. Hysteresis property is modeled in Mathematical function and compensated control input is constructed using inverse function of original data. Reliability of this control method can be confirmed by testing nickel thin film that is used in MEMS material broadly.

• Journal of the KSME
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• v.46 no.1 s.302
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• pp.58-64
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• 2006

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.68-69
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• 2009

Heat Assisted Magnetic Recording (HAMR) is one of the most promising candidates for high density magnetic storages over 1 Tb/$in^2$ areal density. Since the precise light delivery to the head is a key factor to realize HAMR application, it is required to establish the light delivery using micro laser module and micro actuator. For the careful control of micro actuator, a laser module was designed including laser diode, optical fiber, collimating lens, and fabricated V-groove substrate. In addition, the basic aligning method between the laser module and HAMR head was studied by the detection of current change in photo diode due to the amount of reflected light from the head.

• Smart Structures and Systems
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• v.24 no.2
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• pp.183-191
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• 2019

A piezoelectric paper feeder actuator using Micro Virtual Roller (MVR) is proposed, designed, fabricated and tested. This actuator can drive a sheet of paper forward or backward without any mechanical parts, such as the costly and heavy rollers used in traditional paper feeders. In this paper feeder actuator, two vibrating stators which produce traveling waves are used to drive the paper. The vibrations of the stators are similar to those of piezoelectric motors and follow a similar procedure to move the paper. A feasibility study simulated the actuator in COMSOL Multiphysics Software. Traveling wave and elliptical trajectories were obtained and the dimensions of the stator were optimized using FEM so that the paper could move at top speed. Next, the eigenfrequencies of the actuator was determined. Experimental testing was done in order to validate the FEM results that revealed the relationships between speed and parameters such as frequency and voltage. Advantages of this new mechanism are the sharp decrease in power consumption and low maintenance.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.3
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• pp.472-477
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• 2003

A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.

• Journal of Advanced Marine Engineering and Technology
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• v.38 no.10
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• pp.1232-1236
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• 2014

Numerical models of fluid dynamics inside the micro actuator chamber and nozzle are presented. The models include ink flow from reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of refill process. Since high tapered nozzle is one of the very important parameters for overall actuator performance design. The effects of variations of nozzle thickness, diameter, and taper angles are simulated and some results are compared with the experimental results. It is found that the ink droplet ejection through the thinner and high tapered nozzle is more steady, fast, and robust.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.78.3-78
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• 2002

In this paper, we present a five-DOF actuator based on dielectric elastomer. The actuator is designed for generating five DOFs motions to drive a micro camera steering module and provides all the functions for controlling CCD array such as focusing, pan and tilting. Basic modeling of the actuator is performed, and simulation works and experimental verifications are conducted, too. The camera steering module includes most parts necessary for driving the actuator such as a micro-controller and DC-DC converter, etc. It can be operated with a personal computer using only communication lines without external power supply. A prototype is developed and its performance is experimentally proved. $\textbullet$ artificial muscle, EAP, actuator.

• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.49-52
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• 2008

The present study conducts a series of experiments to develop a novel air supplying module for a micro fuel cell using piezoelectric linear actuator. An intermittently and operating air breathing module with reciprocating motion of the linear actuator has been suggested in the present study. A test bench for a micro fuel cell system has been constructed to estimate performance of the active fuel cell system using the air supplying module. With the stroke and operating duty as main control parameters, the optimal operating method of the air supplying module has been discussed.