• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 1999년도 추계종합학술대회 논문집
• /
• pp.905-908
• /
• 1999

In this paper, we present a polysilicon actuator on silicon wafer using surface micromachining technology which employs an electrostatic stepwise driven Scratch Drive Actuator to generate a force that can move an external object. For optical applications, we propose wavelength selector using distributed feedback structures and this micro actuator.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2008년도 춘계학술대회 논문집
• /
• pp.247-251
• /
• 2008

This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet actuators are usually created by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. A prototype of the micro air pump, with a size of $mm{\times}mm{\times}mm$, was fabricated by PDMS replication process and was conducted performance test. To control the PZT actuator, we used the SP4423 micro chips that can be amplified input voltage to reduce the controller size and the power consumption. With a voltage of 3V at 100Hz, the air pump's pumping pressure is 600pa and its power consumption is only 0.1mW.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2005년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
• /
• pp.64-66
• /
• 2005

본 논문에서는 압전체의 타원 운동을 이용한 선형 Micro-Positioning Actuator(MPA)에 대한 설계 및 해석 기법을 제안하였다. 또한 MPA의 해석을 위해 3차원 압전체의 유한요소의 정식화를 통한 유한요소 해석기법의 검증을 수행하였다. 검증된 3차원 유한요소 해석을 이용하여 MPA의 공진 특성 즉 impedance, 모드, 그리고 타원운동 해석을 하였다. 마지막으로 제안된 해석기법을 이용하여 기계 시스템을 고려한 MPA의 최종 설계를 하였다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
• /
• pp.1023-1025
• /
• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• 센서학회지
• /
• 제27권2호
• /
• pp.99-104
• /
• 2018

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2003년도 춘계학술대회논문집
• /
• pp.780-785
• /
• 2003

Recently the trends in information storage devices need small size, mobility, high capacity, and low power consumption etc. To satisfy those, the development of high performance actuator is an important issue. Compared with general linear actuator for optical disk drive, swingarm type rotary actuator is suitable to design in small form factor and has fast access time for random access. Swingarm actuator is designed considering the structural problem and the actuating force of VCM(Voice Coil Motor). The increase of mass caused by optical components makes vibration problems of swing-arm, therefore resonance frequency should be increased and inertia has to be reduced. ANSYS FEM tool is employed in optimizing swingarm. The VCM is designed using 3-D electro-magnetic analysis, and parameters of magnetic circuit are determined to matte large flux density. The large flux density enables to achieve low power consumption. VCM holder is designed to get the mass balance of total actuator and this balance reduces the magnitude of critical mode relative to pivot bearing, It is expected that swingarm type rotary actuator designed by this method is available to variable type of micro optical disk drives.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2002년도 춘계학술대회 논문집
• /
• pp.429-434
• /
• 2002

In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 춘계학술대회 논문집
• /
• pp.932-937
• /
• 2002

The polyimide nozzle and silicon restrictor inside a thermal micro actuator have been fabricated using state of the art laser micromachining methods. Numerical models of fluid dynamics inside the actuator chamber and nozzle are presented. The models include fluid flow from reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of refill through restrictor. Since high tapered nozzle and restrictor are very important parameters for overall actuator performance design, a special setup for the beam delivery system has been developed. The effects of variations of nozzle thickness, diameter, taper angles, and restrictor shapes are simulated and some results are compared with the experimental results. It is fecund that the fluid ejection through the thinner and high tapered nozzle is more steady, fast, and robust and the tapered restrictor shows more satisfying refill than the zero taper one.

• 대한기계학회논문집
• /
• 제19권2호
• /
• pp.418-426
• /
• 1995

A bubble-powered microactuator is designed conceptually. And the actuation mechanism due to bubble growth and collapse is studied numerically and analytically. In this analysis, it is estimated that the time lag for bubble formation on micro line heater, the duration of the bubble growth and collapse and the pressure change in actuator due to the bubble evolution. Based on these calculations, the actuator control scheme is visualized. This actuator may be applicable to the system which needs to pump liquid correctly and regularly.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 1999년도 춘계학술대회 논문집
• /
• pp.51-55
• /
• 1999

Recently, manufacturing work has been transformed to advanced technology intensive form from mass production with a little items required in the past. It was demanded that superior workpiece surface integrity. However, the study of ductile mode machining was proceeded actively.In this paper, it is developed Ultra-Micro Indentation Device using the PZT actuator. Experimentally, by using theUltra-Micro Indentation device, the micro fracture behavior of the silicon wafer was invesgated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation apparatus.