• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.2
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• pp.33-38
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• 2004

We have demonstrated a tunable Inter based on an asymmetric directional coupler made of a side-polished polarization maintaining fiber coupled with a polymer planar waveguide. The thermo-optic effects of the polymer planar waveguide induced by a micro-strip heater placed on the top layer of the device leads to shift of resonance wavelength of the coupler. The fabricated device exhibited wide tunable range exceeding 230 nm with 720 ㎽ of applied electrical power.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.10
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• pp.1598-1602
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• 2004

In this paper, we report a microthermostat using PDMS (poly-dimethylsiloxane) and glass. This PDMS/glass chip is able to maintain constant temperature that is necessary for restriction enzyme reaction. Since PDMS is the low-cost and the mass-producible material and has very good biochemical compatibility, PDMS chip has more benefit than general Si chip. Heater was made of Au wiring patterned on Pyrex glass. A reaction chamber has a capacity of about 3 ${mu}ell$. We performed a restriction enzyme reaction by using the fabricated microthermostat and conventional method. Then, with the electrophoresis, we made a comparison between the result from the micro reactor and the one from conventional method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.894-900
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• 2006

This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1225-1230
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• 2004

The effects of substrate material on the local heating performance of microheaters are studied by both numerical analysis and experiment. Transient conduction analysis shows that the substrate material with low thermal conductivity is critical to the local heating and fast response. A measurement technique for surface temperature field in microscale is newly proposed, which uses temperature sensitive fluorescent dye coated on the surface. The measured surface temperature fields on microheater arrays fabricated on different substrates are presented.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1233-1236
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• 2008

This study presents the fabrication process and display characteristics of a flexible organic polymer display device that consists of a thin substrate of Polyether Sulfone, a multilayer serpentine-type microheater array that is fabricated on the substrate, and a UV-sensitive polydiacetylene (PDA)-polyvinyl alcohol (PVA) composite film. A retention time of one second is achieved with cell sizes of $500{\mu}m$ and $700{\mu}m$ with cell-to-cell distances of $100{\mu}m$ and $200{\mu}m$, respectively.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.198-200
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• 1993

This paper represents the experimental results of electrohrdrodynamic(EHD) micropump driven by traveling- wave voltage. We fabricated 60 electrodes array with $100{\mu}m$ width and $100{\mu}m$ interval on the pyrex glass. On that glass we fabricated the micro channel which had the cross section of 3mm by 0.5mm. This pump was driven by 6 phase square traveling-wave voltage. We used the corn oil for experiments and increased the temperature of fluid by resistive heater. An optical microscope with CCD camera and monitor was used for observation. The fluid velocity was large for the large driving voltage and the high temperature. This EHD pump had the fluid velocity in specific frequency (near 1Hz) which had relation to the charge relaxation time in that oil.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1909-1914
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• 2003

Bubble growth on microheater has been experimentally investigated in this study. The experiment was performed using platinum micro heaters having dimensions of $100{\times}10{\times}0.2{\mu}m^3$ with constant heat flux. A high speed video camera was used to observe bubble growth at 250 frames per second. Microheater temperature was measured at the rate of 300Hz with a data acquisition system. When heater temperature was $139^{\circ}C$ a bubble was nucleated in the liquid FC-72. The temperature profiles and the high speed camera images were combined to explain heat transfer and bubble growth on microheater.

• Journal of the Korean Society of Visualization
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• v.13 no.3
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• pp.20-23
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• 2015

In this experiment, a heterogeneous droplet consisted of de-ionized water and olive oil was made through two 31G injection needles. The injection flow rate was $50{\mu}{\ell}/min$ and the droplet size was 2 mm. The droplet was impinged onto a sapphire plate which was heated up to $300^{\circ}C$ by a heater. Two high speed cameras were used for visualization, and the frame rate was 20,000 fps. A 150W metal halite lamp was used for illumination. The dropping height was fixed to 20 mm and the corresponding Weber number was 10.6 based on water. Due to different boiling points of two liquids, partial boiling features of heterogeneous droplet was observed. At the Leidenfrost condition, micro explosion phenomenon has occurred.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1951-1956
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• 2008

Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.123-123
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• 2018

최근 웨어러블 디바이스에 연구가 집중되면서 투명하고 유연한 마이크로 히터의 필요성이 증가되고 있다. 그럼에도 불구하고, 기존의 사용되는 마이크로 히터들은 딱딱하고 불투명하다. 게다가, 기존의 금속성의 마이크로 히터들의 경우 저항이 너무 작아 웨어러블 디바이스에 사용되는 에너지 하베스터로 구동되기에 효율이 떨어지는 경향이 있다. 이 논문에서 우리는 CVD 방식으로 성장된 그래핀으로 열 발생 라인을 패시베이션 레이어로 h-BN을 이용하여 투명하고 유연한 마이크로 히터를 제작하였다. 제작한 마이크로 히터는 균일한 온도 분포와 200도까지의 온도 상승에 걸리는 시간이 4초 정도로 굉장히 좋은 성능을 보유하고 있다. 또한 소비 전력은 39mW 이하로 효율적이다. 또한 기존의 메탈릭 히터에 비해 저항이 굉장히 높기 때문에 웨어러블 에너지 하베스터로 작동하기 적합하다. 또한 미래의 휴대용/웨어러블 개인 전자기기와 무선 헬스케어 제품, 휴대용 환경 센서에도 적용될 것으로 기대한다.