• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.11a
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• pp.15-19
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• 2002

기존 형상의 미세 가열기를 이용한 마이크로 시스템 패키징의 문제점을 해결하기 위해 새로운 형상의 미세 가열기를 제작하여 패키징 실험을 실시하였다. 기존 형상의 미세 가열기와 새로운 미세 가열기의 형상을 각각 제작하여 접합시에 미세 가열기에 발생하는 열분포를 IR 카메라를 이용하여 실험하였다. 기존 형상의 미세 가열기가 불균일하게 가열되는 반면, 새로운 형상의 미세 가열기는 매우 균일하게 가열되는 형상을 나타내었다. IR 카메라 실험을 바탕으로 접합 실험을 실시하였다. 접합 실험시 사용한 미세 가열기는 폭 50$\mu\textrm{m}$, 두께 2$\mu\textrm{m}$로 제작하였으며, 0.2 Mpa의 압력을 Pyrex glass cap에 가한 상태에서 150 mA의 전류를 공급함으로서 접합을 완료하였다. 접합이 완료된 시편들에 대해서 IPA를 통한 leakage 실험을 실시하였으며, 기존 형상의 미세 가열기를 이용한 시편들은 66%가 테스트를 통과한 반면 새로운 형상의 미세 가열기를 이용한 시편들은 85% 이상이 테스트를 통과하였다. Leakage 실험을 통과한 각각의 시편들에 대해서 접합력 측정을 실시한 결과, 기존 형상의 미세 가열기를 이용한 시편들은 15~21 Mpa의 접합력을 나타내었고, 새로운 형상의 미세 가열기를 이용한 시편들은 25~30 Mpa의 우수한 접합력을 나타내었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.293.2-293.2
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• 2013

구조색에 기반을 둔 반사형 디스플레이는 낮은 전력 소모와 쉬운 제조 과정뿐만 아니라 후광 없이 작동이 가능한 장점으로 인해 최근 많은 주목을 받고 있다. 하지만 기술적으로 다양한 색체 구현이 어려워 현재까지는 많이 응용되고 있지는 않다. 이에 본 연구에서 우리는 바이러스(M13-박테리오파지)를 기반으로 한 신개념 컬러 디스플레이를 개발하고자 한다. 우리가 개발하고자 하는 컬러디스플레이는 자가 조립방법으로 만들어진 나노 구조체로 형성되어 있으며, 간단한 실험 조건 조절을 통해 다양한 색깔 구현을 할 수 있다. 특히, MEMS 공정으로 자체 제작한 Micro Heater의 온도 조절을 통해 자가 조립된 나노 구조체의 간격 주기를 조절 하면, 기존에 형성된 색을 원하는대로 자유롭게 바꿀 수 있다. 우리가 개발하고자하는 생체 재료 기반 컬러 소자는 차세대 디스플레이의 또 다른 새로운 시도가 되리라 생각한다.

• Proceedings of the Korean Nuclear Society Conference
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• 1997.05b
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• pp.415-420
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• 1997

하나로 재료 조사시험용 표준형 계장캡슐 개발의 일환으로 캡슐 mock-up (96M-01K)을 제작하여 노외에서 승온 성능실험을 수행함으로써, 실제 하나로내 장입시의 거동 및 안전성을 평가하고자 하였다. 본 실험을 통하여 표준형 계장캡슐의 설계/제작기술, 열적조절성능, 그리고 열설계용 컴퓨터 code (GENGTC) 둥을 평가할 수 있었다. 캡슐의 진공 및 micro-heater system은 만족할만한 성능을 보였으며, 캡슐의 공기중 승은거동은 계산치와 약간의 차이는 있으나, 이는 가공/조립상의 내부 gap 변화, 캡슐표면에서의 온도측정상의 오류, 그리고 상하부로의 열손실 등에 기인하는 것으로 추정된다. 본 실험을 통하여 표준형 계장캡슐의 하나로내 건전성을 추정할 수 있었으며, 향후 하나로 장입시의 승온 및 하강절차 등을 설정할 수 있었다. 현재 본 실험 결과들을 토대로 하나로 조사시험공의 (CT, IR1, IR2) 핵적특성 평가용 표준형 계장캡슐을 (97M-01K) 설계ㆍ제작 중이다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.11
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• pp.840-848
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• 2009

In the boiling heat transfer mechanism, CHF(critical heat flux) is the significantly important parameter of the system. So, many researchers have been struggling to enhance the CHF of the system in enormous methods. Recently, there were lots of researches about enormous CHF enhancement with the nanofluids. In that, the pool boiling CHF in nanofluids has the significantly increased value compared to that in pure water because of the deposition of the nanoparticle on the heater surface in the nanofluids. The aim of this study is the comparison of the effect of the nanoparticle deposited surface and the modified surface which has the similar morphology and made by MEMS fabrication. The nanoparticle deposited surface has the complex structures in nano-micro scale. Therefore, we fabricated the surfaces which has the similar wettability and coated with the micro size post and nano structure. The experiment is performed in 3 cases : the bare surface with 0.002% water-ZnO nanofluids, the nanoparticle deposited surface with pure water and the new fabricated surface with pure water. The contact angle, a representative parameter of the wettability, of the all 3 cases has the similar value about 0 and the SEM(scanning electron microscope) images of the surfaces show the complex nano-micro structure. From the pool boiling experiment of the each case, the nanoparticle deposited surface with pure water and the fabricated surface with pure water has the almost same CHF value. In other words, the CHF enhancement of the nanoparticle deposited surface is the surface effect. It also shows that the new fabricated surface follows the nanoparticle deposited surface well.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.5
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• pp.455-462
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• 2016

Output Characteristics of the spaceborn image sensor such as infrared(IR) sensor are varied according to time elapses and sensor repetition on/off operation. As a result, the quality of IR sensor image is decreased. Therefore, spaceborne image sensor require a periodic calibration using a black body system by correcting a non-uniformity of the sensor. In this paper, we proposed a MEMS-based black body system that can implement the high temperature uniformity at various standard temperatures ranging from low to high temperature and easily estimate the representative surface temperature. In addition, it has advantages lightweight, low-power and high accuracy. The feasibility of the proposed MEMS-based black body system was verified through the thermal analysis.

• Journal of the Korean Society of Marine Environment & Safety
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• v.10 no.1 s.20
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• pp.51-54
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• 2004

In recently days, the breed fish farm is increased in the beach side for farming fish. In such a farm, the heater is requested for preventing freezing in cold season. The heating material are requested high corrosion resistance and strength for endurance high corrosive salt and pressure. In case of low corrosion resistance and/or strength, the heating element shall be broke down and eventually make spillage or leaking contaminated salt. In the most cases, crevice corrosion is localized form of corrosion usually associated with a stagnant solution on the micro-environmental level. In this study, the crevice corrosion of Ferritic type 430 stainless steel is investigated. The size of specimen is $15{\times}20{\times}3mmt$. Test solution is 1N H2SO4 + 0.05N NaCl. The artificial crevice gap size is $0.24{\times}3{\times}15mmL$. Crevice corrosion is measured under applied voltage 300mV(SCE) to the external surface. the result of this study showed that 1) the induced time for initiation of crevice is 750seconds, 2) potential is dropped in the crevice from the top of gap opening from -320 to -399mV. The result confirmed that the potential drop(IR mechanism) in the crevice is one of mechanism for crevice corrosion.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.20 no.8
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• pp.517-525
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• 2008

In order to study the heat transfer and pressure drop of an internal heat exchanger for $CO_2$ heat pump under cooling condition, the experiment and numerical analysis were performed. Four kinds of internal heat exchangers with a coaxial tube type and a micro-channel tube type were used. The experimental apparatus consisted of a test section, a power supply, a heater, a chiller, a mass flow meter, a pump and a measurement system. The section-by-section method and Hardy-Cross method were used for the numerical analysis. The effects of the internal heat exchanger refrigerant flow rate, the length of the internal heat exchanger, the operating condition of the gas-cooler, the evaporator and the type of the internal heat exchangers were investigated. With increasing of the flow rate, the heat transfer rate increased about 25%. The heat transfer rate of the micro-channel tube type was higher about 100% than that of the coaxial tube type. With increasing of the length of the internal heat exchanger, the heat transfer rate increased about $20{\sim}50%$. The pressure drop of the low-side tube was larger compared with that of the high-side tube.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.69-77
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• 1996

In this paper, we fabricated the micro hotplate which consisted of a thin film heater(Pt/Cr bilayers) sandwiched with the thermal oxide and E-beam evaporated oxide. And we studied the electrical and the structural properties of Pt/Cr bilayers due to annealing temperature. When we compared the temperature measured from type k thermocouples with the temperature acquired from I.R. thermo-vision system according to the variations of emissivity, the emissivity of I-beam evaporated oxide was 0.5. The sheet resistance of Pt/Cr bilayers didn't depend on the Cr layer thickness, and it was considered as the existence of CrO between the Pt and the Cr layer. When the annealing temperature was increased from $500^{\circ}C$ to $700^{\circ}C$, the out-diffusions of Cr were increased(which was confirmed by AES depth profile) and the grain size of Pt(220) phase was enlarged also(analyzed by XRD and SEM photographs). From the results of XRD analysis and AES depth profile, the Pt/Cr bilayers annealed at $500^{\circ}C$ were more stable than any other cases in structural properties.

• Korean Journal of Environmental Agriculture
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• v.39 no.4
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• pp.319-326
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• 2020

BACKGROUND: Measurement equipment was developed for inorganic nutrient concentration inside the hydroponic culture medium with several macro- and micro compositions, and applied for measuring the compositions of conventional medium. METHODS AND RESULTS: Before the equipment development, sonicator and heater were utilized to control temperature around of the module mixing with color reagents and target samples among the inorganic compositions. The measurement module and multi-sampler were also manufactured based on the COMS (Complementary Metal-Oxide Semiconductor) and installed inside the measurement equipment. Concentration of standard solution, value measured by the equipment, standard deviation or measured average value were used for estimating the accuracy and average recall of the equipment. Yamazaki solutions with EC of 0.5, 1.5, and 2.5 dS/m were offered to confirm the equipment accuracy and standard error. CONCLUSION: It was suggested that the developed equipment could be automatically applied for measurement with accuracy of over 96% and standard errors of less than 5% on 12 macro- and micro compositions such as a NO3-N, PO43- or Fe.

• Transactions on Electrical and Electronic Materials
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• v.13 no.2
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• pp.106-109
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• 2012

A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 ${\mu}m$ and 4.5 ${\mu}m$, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high (64%) sensitivity was obtained even at as low a temperature as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$, and only 25 mW at $150^{\circ}C$.