• 한국전기전자재료학회논문지
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• 제18권9호
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• pp.787-792
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• 2005

Chemical mechanical polishing(CMP) has become the process of choice for modem semiconductor devices to achieve both local and global planarization. CMP is a complex process which depends on numerous variables such as macro, micro and nano-geometry of pad, relative velocity between pad and wafer stiffness and dampening characteristics of pad, slurry, pH, chemical components of slurry, abrasive concentration, abrasive size, abrasive shape, etc. Especially, an oxidizer of chemical components is very important remove a target material in metal CMP process. This paper introduces the effect of oxidizer such as $H_2O_2,\;Fe(NO_3)_3\;and\;KIO_3$ in slurry for tungsten which is used in via or/and plug. Finally the duplex reacting mechanism of $oxidizer(H_2O_2)$ through adding the $catalyst(Fe(NO_3)_3)$ could acquire the sufficient removal rate in tungsten CMP.

• KIEAE Journal
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• 제12권2호
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• pp.25-32
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• 2012

This paper focused on the daylighting performance of residential high-rise buildings in South-Korea. the purpose of this study is to estimate the visual environment of sunlight coming into opening according to sky conditions, orientation of windows and each space of Apartment buildings. Season of the year, weather, and time of day combine with predictable movement patterns of the sun to create highly variable and dynamic daylighting conditions. Daylighting design is usually based on the dominant sky condition and the micro-climate for the building site. There are three common sky conditions: clear sky, overcast sky, and partly cloudy sky. The clear sky includes sunshine and is intense and brighter at the horizon than at the zenith, except in the area around the sun. Daylight received within a building is directly dependent upon the sun's position and the atmospheric conditions. Easily used charts, diagrams, and software programs allow study of solar geometry for any geographic location and time of day. on the other hand, the overcast sky is characterized by diffuse and variable levels of light and has dense cloud cover over 90% of the sky. This paper was calculated by a Desktop Radiance program. The space dimensions were based on a unit module of real constructed apartment having divided into five sections such as living room, room1, room2, room3 and kitchen.

• 한국생산제조학회지
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• 제21권5호
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• pp.773-777
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• 2012

Recently UV laser micromachining processes is widely introduced to meet the needs of advanced components of IT, BT and ET industries. Due to the characteristics of non-contact and high-speed laser processing, UV laser micromachining is applied to manufacture very thin substrate such as polymer, metals and composite. These minimum line width obtained by UV laser micromachining is generally determined from laser wavelength, optical lens and its numerical aperture. In this paper we will show the lens effect of water droplet on the surface of workpiece to reduce the line width when UV laser light is irradiated and focused through the water droplet. Because of the refraction effect generated by the semi-spherical or spherical shape of water droplet, we can find smaller line width. And water droplet could not only protect thermal deformation, but also carry away burr around micro dent. Firstly fundamental theory of minimum line width was derived from relationship between the geometry of water droplet and laser light trace, and then experimental and simulation results will be finally compared to verify the effectiveness of water droplet lens effect of UV laser micromachining process.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계 학술대회논문집(수송기계편)
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• pp.190-193
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• 2005

The air filter in engine intake system filters the dirt in the breathing air but also it attenuates the noise although the phenomenon has been regarded negligible. For the analysis of the acoustical performance of air filter, an acoustical model is suggested in this paper. The air filter consists of a porous filter element, which catches the particulate dirt, and a plastic filter box, which supports the filter element. Fibrous structure of the filter element is modeled as a micro-perforated panel using the flow resistivity and porosity. The pleated geometry of the filter element is modeled as two coupled ducts and a mathematical model is developed for the analysis of sound propagation. The filter box Is modeled as a rigid rectangular box. By combining two models, a 4-pole transfer matrix for the air filter is derived. The transmission loss calculated using the transfer matrix of the suggested model is compared with the measured data. Reasonably good agreement is observed. The result can be improved by considering the visco-thermal effect in modeling, in particular at a frequency range near the troughs of TL curve.

• 한국추진공학회지
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• 제15권1호
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• pp.1-10
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• 2011

가스연소와 촉매연소 실험을 통해 열교환 연소기의 연소 및 소염한계에 대하여 레이놀즈 수에 적용하여 성능평가를 수행하였으며, 마이크로 스케일 연소 장치에 대한 적용 가능성에 대해 살펴보았다. 본 논문에서는 연소기의 특성을 살펴보기 위해 나선형 연소기의 물리적 크기와 회전수를 변화시킨 스위스롤 연소기를 제작하여 실험을 수행하였다. 또한 연소가스 분석을 통한 연소효율에 대해서도 살펴보았다. 실험 결과를 바탕으로 스위스롤 연소기의 최적 작동상태에 대해서도 분석하였다.

• Geomechanics and Engineering
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• 제3권3호
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• pp.219-231
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• 2011

Waste fills resulting from coal mining should consist of large, free-draining sedimentary rocks fragments. The successful performance of these fills is related to the strength and durability of the individual rock fragments. When fills are made of shale fragments, some fragments will be durable and some will degrade into soil particles resulting from slaking and inter-particle point loads. The degraded material fills the voids between the intact fragments, and results in settlement. A laboratory program with point load and slake durability tests as well as thin section examination of sixty-eight shale samples from the Appalachian region of the United States revealed that pore micro-geometry has a major influence on degradation. Under saturated and unsaturated conditions, the shales absorb water, and the air in their pores is compressed, breaking the shales. This breakage was more pronounced in shales with smooth pore boundaries and having a diameter equal to or smaller than 0.060 mm. If the pore walls were rough, the air-pressure breaking mechanism was not effective. However, pore roughness (measured by the fractal dimension) had a detrimental effect on point load resistance. This study indicated that the optimum shales to resist both slaking as well as point loads are those that have pores with a fractal dimension equal to 1.425 and a diameter equal to or smaller than 0.06 mm.

• 대한전자공학회논문지SD
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• 제43권4호
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• pp.31-37
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• 2006

광 신호 제어 시스템에서 사용되는 광/안테나 연결회로의 제작 간소화에 대한 중요성이 지속적으로 대두되고 있다. 이를 위하여, 본 논문에서는 광섬유로 제작된 새로운 형태의 photonic 안테나 설계에서 광 도전 효과에 기인한 광섬유와 슬롯 결합형 마이크로 스트립 안테나 사이의 광 결합효율을 수치 해석적으로 분석하였다. 결합특성을 정확하게 분석하기 위하여 원통형, 평면형 전송구조들이 결합할 때 발생하는 불연속 특성을 포함한 새로운 모드 전송선로 이론을 정의하였다 분석결과, 서로 다른 두 전송구조에서의 최대 전력전송은 그 결합영역에서 전파하는 정확한 두 모드들의 전송전력이 균등하게 분배되는 새로운 지점에서 발생함을 보였다.

• 한국기계가공학회지
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• 제19권1호
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• pp.108-113
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• 2020

Pinions are generally heavy and integrated with a shaft. Thus, fabricating a pinion is a material- and machining-intensive task characterized by low productivity. Contact of the output pinion with a sliding surface or a cloud contact causes loss of power because of friction. Consequently, the output pinion undergoes considerable wear and tear at its ends, which adversely affects the overall transmission efficiency of decelerators. To improve transmission efficiency and extend gear life, an optimum output pinion design is required. To this end, in this study, an output pinion for worm gear decelerators was designed and optimized by means of product verification through prototyping and performance evaluation to improve gear life and productivity. The optimized design was validated and subjected to structural analysis.

• 한국생산제조학회지
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• 제24권3호
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• pp.314-319
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• 2015

Invar is a compound metal of Fe-Ni system contained 36.5% Ni. The characteristic of invar is that the coefficient of thermal expansion is $1.0{\times}10^{-6}cm/^{\circ}C$. It is approximately 10 times smaller than series of steel. Because of this low thermal expansion characteristic of Invar, it is used to shadow mask of display device such as UHDTV or OLED TV. In this study, pulse current from pulse generator instead of DC current is used to overcome the disadvantages of the conventional electrochemical machining. Pulsed current with different duty factor in PECM affect the precise geometry. Pulse electrochemical machining is conducted to machine the micro hole to the invar sheet with different duty factor. The machined shape and overcut of invar sheet with different duty factor is observed by optical microscope and scanning electron microscope (SEM).

• 한국기계가공학회지
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• 제15권4호
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• pp.46-50
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• 2016

A laser head was designed for micro-scale patterning and joining applications. The target feature size of the pattern was $100{\mu}m$, and optics were designed to perform the target. Two singlet lenses were combined to minimize the chromatic aberration, and the geometry of the lenses was calculated by using the raytracing method with a commercial software program. As a restriction of lens design, the focal length was set at 100mm, and the maximum diameter of the lens or beam size was limited to 10mm for the assembly in the limited cage size. The maximum temperatures were calculated to be $1367^{\circ}C$, $1508^{\circ}C$, and $1905^{\circ}C$ for 10, 12, and 15 Watts of power, respectively. A specially designed laser head was used to compensate for the distance between the object and the lens. The detailed design mechanism and 3D data were presented. The optics design and detailed performance of the lens were analyzed by using MTF and spot diagram calculation.