• Title/Summary/Keyword: Micro Fabrication

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Fabrication and Characterization of Biphasic Calcium Phosphate Scaffolds with an Unidirectional Macropore Structure Using Tertiary-Butyl Alcohol-Based Freeze-Gel Casting Method (동결-젤 주조 공정 기반 삼차부틸알코올을 이용한 단일방향 기공구조를 가지는 이상인산칼슘 세라믹 지지체의 제조 및 특성평가)

  • Kim, Kyeong-Lok;Ok, Kyung-Min;Kim, Dong-Hyun;Park, Hong-Chae;Yoon, Seog-Young
    • Journal of the Korean Ceramic Society
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    • v.50 no.4
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    • pp.263-268
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    • 2013
  • Porous biphasic calcium phosphate scaffolds were fabricated by a freeze-gel casting technique using a tertiary-butyl alcohol (TBA)-based slurry. After sintering, unidirectional macropore channels of scaffolds aligned regularly along the TBA ice growth direction were tailored simultaneously with micropores formed in the outer wall of the pore channels. The crystallinity, micro structure, pore configuration, bulk density, and compressive strength for the scaffolds were investigated with X-ray diffractometery, scanning electron microscopy analysis, a water immersion method, and a universal test machine. The results revealed that the sintered porosity and pore size generally resulted in a high solid loading which resulted in low porosity and small pore size, which relatively increased the higher compressive strength. After being sintered at $1100-1300^{\circ}C$, the scaffolds showed an average porosity and compressive strength in the range 35.1-74.9% and 65.1-3.0 MPa, respectively, according to the processing conditions.

Characteristics of single/poly crystalline silicon etching by$Ar^+$ ion laser for MEMS applications (MEMS 응용을 위한 $Ar^+$ 이온 레이저에 의한 단결정/다결정 실리콘 식각 특성)

  • Lee, Hyun-Ki;Han, Seung-Oh;Park, Jung-Ho;Lee, Cheon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.5
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    • pp.396-401
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    • 1999
  • In this study, $Ar^+$ ion laser etching process of single/poly-crystalline Si with $CCl_2F_2$ gas is investigated for MEMS applications. In general, laser direct etching process is useful in microelectronic process, fabrication of micro sensors and actuators, rapid prototyping, and complementary processing because of the advantages of 3D micromachining, local etching/deposition process, and maskless process with high resolution. In this study, a pyrolytic method, in which $CCl_2F_2$ gasetches molten Si by the focused laser, was used. In order to analyze the temperature profile of Si by the focused laser, the 3D heat conduction equation was analytically solved. In order to investigate the process parameters dependence of etching characteristics, laser power, $CCl_2F_2$ gas pressure, and scanning speed were varied and the experimental results were observed by SEM. The aspect ratio was measured in multiple scanning and the simple 3D structure was fabricated. In addition, the etching characteristics of $6\mum$ thick poly-crystalline Si on the insulator was investigated to obtain flat bottom and vertical side wall for MEMS applications.

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Fabrication of ZnO and TiO2 Nanocomposite Fibers and Their Photocatalytic Decomposition of Harmful Gases (ZnO와 TiO2 함유 복합나노섬유의 제조와 유해물질분해 성능 평가)

  • Hur, Yoon-Sun;Lee, Seung-Sin
    • Journal of the Korean Society of Clothing and Textiles
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    • v.35 no.11
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    • pp.1297-1308
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    • 2011
  • This research investigates the application of ZnO (zinc oxide) nanoparticles and $TiO_2$ (titanium dioxide) nanoparticles to polypropylene nonwoven fabrics via an electrospinning technique for the development of textile materials that can decompose harmful gases. To fabricate uniform ZnO nanocomposite fibers, two types of ZnO nanoparticles were applied. Colloidal $TiO_2$ nanoparticles were chosen to fabricate $TiO_2$ nano- composite fibers. ZnO/poly(vinyl alcohol) (PVA) and $TiO_2$/PVA nanocomposite fibers were electrospun under a variety of conditions that include various feed rates, electric voltages, and capillary diameters. The morphology of electrospun nanocomposite fibers was examined with a field-emission scanning electron micro- scope and a transmission electron microscope. Decomposition efficiency of gaseous materials (formaldehyde, ammonia, toluene, benzene, nitrogen dioxide, sulfur dioxide) by nanocomposite fiber webs with 3wt% nano-particles (ZnO or $TiO_2$) and 7$g/m^2$ web area density was assessed. This study shows that ZnO nanoparticles in colloid were more suitable for fabricating nanocomposite fibers in which nanoparticles are evenly dispersed than in powder. A heat treatment was applied to water-soluble PVA nanofiber webs in order to stabilize the electrospun nanocomposite fibrous structure against dissolution in water. ZnO/PVA and $TiO_2$/PVA nanofiber webs exhibited a range of degradation efficiency for different types of gases. For nitrogen dioxide, the degradation efficiency was 92.2% for ZnO nanocomposite fiber web and 87% for $TiO_2$ nanocomposite fiber web after 20 hours of UV light irradiation. The results indicate that ZnO/PVA and $TiO_2$/PVA nano- composite fiber webs have possible uses in functional textiles that can decompose harmful gases.

Design, fabrication and characterization of a flap valve mircopump using an ionic polymer-metal composite actuator (이온성 폴리머-금속 복합재료 작동층을 사용한 플랩 밸브 마이크로 펌프의 설계, 개발 및 특성 규명)

  • Nguyen, Thanh Tung;Nguyen, Vinh Khanh;Yoo, Young-Tai;Goo, Nam-Seo
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.35 no.4
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    • pp.302-307
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    • 2007
  • In this paper, a flap valve micropump with an ionic polymer-metal composite (IPMC) actuator was designed, fabricated, and experimentally characterized. A multilayered IPMC based on Nafion/layered silicate and Nafion/silica nanocomposites was fabricated for the actuation section of the micropump. The IPMC diaphragm, a key element of the mircopump, was designed so that the IPMC actuator was supported by a flexible polydimethylsiloxane (PDMS) structure at its perimeter. This design feature enabled a significantly high displacement of the IPMC diaphragm. The overall size of the micropump is $20{\times}20{\times}5$ ${mm}^3$. Water flow rates of up to 760 ${\mu}l$/min and a maximum backpressure of 1.5 kPa were recorded. A significant advantage of the proposed micropump is its low driven voltage from only 1-3 V. In addition, a simple and effective design, and an ease of manufacturing are other advantages of the present micropump.

Failure Behavior of Laser Cladding Layer used by Fe-based Bulk Metallic Glass (Fe계 벌크 비정질 합금을 이용한 레이저 용접층의 파손 거동)

  • Lim, Byung-Chul;Kim, Dae-Hwan;Park, Sang-Heup
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.9
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    • pp.5743-5747
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    • 2015
  • In this study, Fe-based bulk amorphous alloy powder manufactured using gas atomization fabrication was used for laser welding. the fracture behavior of welding layer were analyzed. Tensile test results show that the destruction occurred immediately after the elastic deformation, After plastic deformation of the substrate, the destruction occurred. The actual maximum tensile strength of the welding layer and the substrate are 959.9MPa and 220.4MPa. welding layer were each $485.5{\pm}21$ and $197.4{\pm}14$ to the substrate and the actual microhardness, The welding layer has very high hardness. The welding layer showed a very weak fine acicular structure. The base material was shown in the micro structure appear a coarse grain. SEM observations of the fracture after the tensile test. Fracture morphology of the base metal and the welding layer showed ductile fracture and brittle fracture, respectively.

Fabrication and Characteristics of Micro PZT Cantilever Energy Harvester Using MEMS Technologies (MEMS 공정을 이용한 마이크로 PZT 외팔보 에너지 수확소자의 제작 및 특성)

  • Kim, Moon-Keun;Hwang, Beom-Seok;Jeong, Jae-Hwa;Min, Nam-Ki;Kwon, Kwang-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.6
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    • pp.515-518
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    • 2011
  • In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)$O_3$ cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 12 ${\mu}M$, and an integrated Si proof mass with dimensions of about 1,410 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 450 ${\mu}M$. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 ${\mu}Wat$ 1.0 g and 23.7 ${\Omega}$, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.

Fabrication Process of a Nano-precision Polydimethylsiloxane Replica using Vacuum Pressure-Difference Technique (진공 압력차이법에 의한 나노 정밀도를 가지는 폴리디메틸실록산 형상복제)

  • 박상후;임태우;양동열;공홍진;이광섭
    • Polymer(Korea)
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    • v.28 no.4
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    • pp.305-313
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    • 2004
  • A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure-difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications.

스테인레스강 Overlay 용접부의 Disbonding에 관한 연구 1

  • 이영호;윤의박
    • Journal of Welding and Joining
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    • v.1 no.2
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    • pp.45-52
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    • 1983
  • Many pressure vessels for the hot H$\sub$2//H$\sub$2/S service are made of 2+1/4Cr-1Mo steel with austenitic stainless steel overlay to combat agressive corrosion due to hydrogen sulfide. Hydrogen dissolves in to materials during operation, and sometimes gives rise to unfore-seeable damages. Appropriate precautions must, therefore, be taken to avoid the hydrogen induced damages in the design, fabrication and operation stage of such reactor vessels. Recently, hydrogeninduced cracking (or Disbonding) was found at the interface between base metal and stainless weld overlay of a desulfurizing reactor. Since the stainless steel overlay weld metal is subjected to thermal and internal-pressure loads in reactor operation, it is desirable for the overlay weld metal to have high strength and ductility from the stand point of structural safety. In section III of ASME Boiler and Pressure Vessel Code, Post-Weld Heat Treatment(PWHT) of more than one hour per inch at over 1100.deg. F(593.deg. C) is required for the weld joints of low alloy pressure vessel steels. This heat treatment to relieve stresses in the welded joint during construction of the pressure vessel is considered to cause sensitization of the overlay weld metal. The present study was carried out to make clear the diffusion of carbon migration by PWHT in dissimilar metal welded joint. The main conclusion reached from this study are as follows: 1) The theoretical analysis for diffusion of carbon in stainless steel overlay weld metal does not agree with Fick's 2nd law but the general law of molecular diffusion phenomenon by thermodynamic chemical potential. 2) In the stainless steel overlay welded joint, the PWHT at 720.deg. C for 10 hours causes a diffusion of carbon atoms from ferritic steel into austenitic steel according to the theoretical analysis for carbon migration and its experiment. 3) In case of PWHT at 720.deg. C for 10 hours, the micro-hardness of stainless steel weld metal in bonded zone increase very highly in the carburized layer with remarkable hardening than that of weld metal.

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Optical Resonance-based Three Dimensional Sensing Device and its Signal Processing (광공진 현상을 이용한 입체 영상센서 및 신호처리 기법)

  • Park, Yong-Hwa;You, Jang-Woo;Park, Chang-Young;Yoon, Heesun
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2013.10a
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    • pp.763-764
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    • 2013
  • A three-dimensional image capturing device and its signal processing algorithm and apparatus are presented. Three dimensional information is one of emerging differentiators that provides consumers with more realistic and immersive experiences in user interface, game, 3D-virtual reality, and 3D display. It has the depth information of a scene together with conventional color image so that full-information of real life that human eyes experience can be captured, recorded and reproduced. 20 Mega-Hertz-switching high speed image shutter device for 3D image capturing and its application to system prototype are presented[1,2]. For 3D image capturing, the system utilizes Time-of-Flight (TOF) principle by means of 20MHz high-speed micro-optical image modulator, so called 'optical resonator'. The high speed image modulation is obtained using the electro-optic operation of the multi-layer stacked structure having diffractive mirrors and optical resonance cavity which maximizes the magnitude of optical modulation[3,4]. The optical resonator is specially designed and fabricated realizing low resistance-capacitance cell structures having small RC-time constant. The optical shutter is positioned in front of a standard high resolution CMOS image sensor and modulates the IR image reflected from the object to capture a depth image (Figure 1). Suggested novel optical resonator enables capturing of a full HD depth image with depth accuracy of mm-scale, which is the largest depth image resolution among the-state-of-the-arts, which have been limited up to VGA. The 3D camera prototype realizes color/depth concurrent sensing optical architecture to capture 14Mp color and full HD depth images, simultaneously (Figure 2,3). The resulting high definition color/depth image and its capturing device have crucial impact on 3D business eco-system in IT industry especially as 3D image sensing means in the fields of 3D camera, gesture recognition, user interface, and 3D display. This paper presents MEMS-based optical resonator design, fabrication, 3D camera system prototype and signal processing algorithms.

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A study on a sequenced directed diffusion algorithm for sensor networks (센서네트워크용 Sequenced Directed Diffusion 기법 연구)

  • Jang, Jae-Shin
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.11 no.5
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    • pp.889-896
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    • 2007
  • Advances in wireless networking, micro-fabrication and integration, and embedded microprocessors have enabled a new generation of massive-scale sensor networks. Because each sensor node is limited in size and capacity, it is very important to design a new simple and energy efficient protocol. Among conventional sensor networks' routing protocols, the directed diffusion scheme is widely blown because of its simplicity. This scheme, however, has a defect in that sending interest and exploratory data messages while setting connection paths consumes much energy because of its flooding scheme. Therefore, this paper proposes a new sensor network routing protocol, called sequenced directed diffusion with a threshold control, which compromises the conventional directed diffusion scheme's defect and offers an energy efficient routing idea. With a computer simulation, its performance is evaluated and compared to the conventional directed diffusion scheme. Numerical results show that the proposed scheme offers energy efficiency while routing packets, and resolves ill-balanced energy consumption among sensor nodes.