• Title/Summary/Keyword: Micro Electro Mechanical Systems

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Development of an Integrated Oil Purification System (통합형 오일 정제 시스템의 개발)

  • Hong, Sung-Ho;Lee, Kyung-Hee;Jeong, Nam-Wha
    • Tribology and Lubricants
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    • v.38 no.4
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    • pp.121-127
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    • 2022
  • This study presents the development of an integrated oil purification system consisting of moisture removal, oil flushing, and oil filtering devices. In this system, the oil flushing device is combined with a micro-bubble generator. Oil purification is necessary for ensuring the high performance of the lubricant through the efficient removal of contaminants and thus enables good maintenance of mechanical systems. The developed purification system removes moisture, varnish, and solid particles. Moreover, during oil purification, the oil flushing device separates foreign materials and contaminants remaining in the lubricating oil piping or mechanical systems. The microbubble generator, which is combined with the oil flushing device, can separate harmful contaminants, such as sludge, wear particles, and rust, from piping or lubrication systems through the cavitation effect. Moisture is removed using a double high-vacuum chamber, while sludge and varnish are removed via electro-absorption using a high-voltage generator. Additionally, the total maintenance cost of the system is reduced through the use of domestically fabricated cartridge filters composed of glass fiber and cellulose. The heater, which maintains the temperature of the lubricant at 60℃, can process 41,000 L of lubricant simultaneously. Multiple tests confirmed that the proposed integrated purification system exhibits good performance in oil flushing and removal of water and varnish.

On the control of vibratory MEMS gyroscopes

  • Choura, S.;Aouni, N.;El-Borgi, S.
    • Smart Structures and Systems
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    • v.6 no.7
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    • pp.793-810
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    • 2010
  • This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers. In order to measure the angular rate of the rotating frame, a driving force is applied to the inner mass and the Coriolis force is sensed along the y-direction associated with the outer mass. Due to micro-fabrication imperfections, including anisoelasticity and damping effects, both gyroscopes do not allow accurate measurements, and therefore, it becomes necessary to devise feedback controllers to reduce the effects of such imperfections. Given an ideal gyroscope that meets certain performance specifications, a feedback control strategy is synthesized to reduce the error dynamics between the actual and ideal gyroscopes. For a dual-mass gyroscope, it is demonstrated that the error dynamics are remarkably decreased with the application of four actuators applied to both masses in the x and y directions. It is also shown that it is possible to reduce the error dynamics with only two actuators applied to the outer mass only. Simulation results are presented to prove the efficiency of the proposed control design.

Piezoelectric Ultrasound MEMS Transducers for Fingerprint Recognition

  • Jung, Soo Young;Park, Jin Soo;Kim, Min-Seok;Jang, Ho Won;Lee, Byung Chul;Baek, Seung-Hyub
    • Journal of Sensor Science and Technology
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    • v.31 no.5
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    • pp.286-292
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    • 2022
  • As mobile electronics become smarter, higher-level security systems are necessary to protect private information and property from hackers. For this, biometric authentication systems have been widely studied, where the recognition of unique biological traits of an individual, such as the face, iris, fingerprint, and voice, is required to operate the device. Among them, ultrasound fingerprint imaging technology using piezoelectric materials is one of the most promising approaches adopted by Samsung Galaxy smartphones. In this review, we summarize the recent progress on piezoelectric ultrasound micro-electro-mechanical systems (MEMS) transducers with various piezoelectric materials and provide insights to achieve the highest-level biometric authentication system for mobile electronics.

Robust Design of the Vibratory Gyroscope with Unbalanced Inner Torsion Gimbal Using Axiomatic Design (공리적 설계를 이용한 비대칭 내부 짐벌을 가진 진동형 자이로스코프의 강건설계)

  • Park, Gyeong-Jin;Hwang, Gwang-Hyeon;Lee, Gwon-Hui;Lee, Byeong-Ryeol;Jo, Yong-Cheol;Lee, Seok-Han
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.5
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    • pp.914-923
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    • 2002
  • Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.

Nonlocal strain gradient-based vibration analysis of embedded curved porous piezoelectric nano-beams in thermal environment

  • Ebrahimi, Farzad;Daman, Mohsen;Jafari, Ali
    • Smart Structures and Systems
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    • v.20 no.6
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    • pp.709-728
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    • 2017
  • This disquisition proposes a nonlocal strain gradient beam theory for thermo-mechanical dynamic characteristics of embedded smart shear deformable curved piezoelectric nanobeams made of porous electro-elastic functionally graded materials by using an analytical method. Electro-elastic properties of embedded curved porous FG nanobeam are assumed to be temperature-dependent and vary through the thickness direction of beam according to the power-law which is modified to approximate material properties for even distributions of porosities. It is perceived that during manufacturing of functionally graded materials (FGMs) porosities and micro-voids can be occurred inside the material. Since variation of pores along the thickness direction influences the mechanical and physical properties, so in this study thermo-mechanical vibration analysis of curve FG piezoelectric nanobeam by considering the effect of these imperfections is performed. Nonlocal strain gradient elasticity theory is utilized to consider the size effects in which the stress for not only the nonlocal stress field but also the strain gradients stress field. The governing equations and related boundary condition of embedded smart curved porous FG nanobeam subjected to thermal and electric field are derived via the energy method based on Timoshenko beam theory. An analytical Navier solution procedure is utilized to achieve the natural frequencies of porous FG curved piezoelectric nanobeam resting on Winkler and Pasternak foundation. The results for simpler states are confirmed with known data in the literature. The effects of various parameters such as nonlocality parameter, electric voltage, coefficient of porosity, elastic foundation parameters, thermal effect, gradient index, strain gradient, elastic opening angle and slenderness ratio on the natural frequency of embedded curved FG porous piezoelectric nanobeam are successfully discussed. It is concluded that these parameters play important roles on the dynamic behavior of porous FG curved nanobeam. Presented numerical results can serve as benchmarks for future analyses of curve FG nanobeam with porosity phases.

Characterization of Stiffness Coefficients of Silicon Versus Temperature using "Poisson's Rati" Measurements

  • Cho, Chun-Hyung;Cha, Ho-Young;Sung, Hyuk-Kee
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.2
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    • pp.153-158
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    • 2016
  • The elastic material constants, stiffness constants ($c_{11}$, $c_{12}$, and $c_{44}$), are three unique coefficients that establish the relation between stress and strain. Accurate knowledge of mechanical properties and the stiffness coefficients for silicon is required for design of Micro-Electro-Mechanical Systems (MEMS) devices for proper modeling of stress and strain in electronic packaging. In this work, the stiffness coefficients for silicon as a function of temperature from $-150^{\circ}C$ to $+25^{\circ}C$ have been extracted by using the experimental measurements of Poisson's ratio (${\nu}$) of silicon in several directions.

Lattice based Microstructure Evolution Model for Monte Carlo Finite Element Analysis of Polycrystalline Materials (격자식 미세구조 성장 모델을 이용한 다결정 박막 소재의 유한 요소 해석)

  • 최재환;김한성;이준기;나경환
    • Transactions of Materials Processing
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    • v.13 no.3
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    • pp.248-252
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    • 2004
  • The mechanical properties of polycrystalline thin-films, critical for Micro-Electro-Mechanical Systems (MEMS) components, are known to have the size effect and the scatter in the length scale of microns by the numbers of intensive investigation by experiments and simulations. So, the consideration of the microstructure is essential to cover these length scale effects. The lattice based stochastic model for the microstructure evolution is used to simulate the actual microstructure, and the fast and reliable algorithm is described in this paper. The kinetics parameters, which are the key parameters for the microstructure evolution based on the nucleation and growth mechanism, are extracted from the given micrograph of a polycrystalline material by an inverse method. And the method is verified by the comparison of the quantitative measures, the number of grains and the grain size distribution, for the actual and simulated microstructures. Finite element mesh is then generated on this lattice based microstructure by the developed code. And the statistical finite element analysis is accomplished for selected microstructure.

A Fundamental Study of the Supersonic Microjet (초음속 마이크로 제트 유동에 관한 기초적 연구)

  • Jeong, M.S.;Kim, H.S.;Kim, H.D.
    • Proceedings of the KSME Conference
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    • 2001.11b
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    • pp.622-627
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    • 2001
  • Microjet flows are often encountered in many industrial applications of micro-electro-mechanical systems as well as in medical engineering fields such as a transdermal drug delivery system for needle-free injection of drugs into the skin. The Reynolds numbers of such microjets are usually several orders of magnitude below those of larger-scale jets. The supersonic microjet physics with these low Reynolds numbers are not yet understood to date. Computational modeling and simulation can provide an effective predictive capability for the major features of the supersonic microjets. In the present study, computations using the axisymmetic, compressible, Navier-Stokes equations are applied to understand the supersonic microjet flow physics. The pressure ratio of the microjets is changed to obtain both the under- and over-expanded flows at the exit of the micronozzle. Sonic and supersonic microjets are simulated and compared with some experimental results available. Based on computational results, two microjets are discussed in terms of total pressure, jet decay and supersonic core length.

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Design of a MIMO Antenna Using a RF MEMS Element (RF MEMS 소자를 이용한 MIMO 안테나 설계)

  • Lee, Won-Woo;Rhee, Byung-Ho
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.24 no.12
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    • pp.1113-1119
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    • 2013
  • In this letter, a new approach is proposed for the design of a multi antenna for MIMO wireless devices. The proposed antenna covers various LTE(Long Term Evolution) service bands: band 17(704~746 MHz), band 13(746~787 MHz), band 5(824~894 MHz), and band 8(880~960 MHz). The proposed main antenna consists of a conventional monopole antenna with an inverted L-shaped slit for wideband operation. The proposed the LTE sub antenna is based on a switch loaded loop antenna structure, with a resonance frequency that can be controlled by capacitance of a logic circuit. The tuning technique for the LTE Rx antenna uses a RF MEMS(Micro-Electro mechanical system) to match the impedances to realize the bands of interest. Because the two proposed antennas are polarized orthogonally to each other, the ECC(Envelope Correlation Coefficient) characteristic between two antennas was measured to be very low (below 0.06) with an isolation characteristic below -20 dB between the two antennas in the operating overall LTE bands. The proposed antenna is particularly attractive for mobile devices that integrate LTE multiple systems.

Dual-Stage Servo System using Electrostatic Microactuator for Super-High Density HDD (정전형 마이크로 액추에이터를 이용한 초고밀도 HDD용 Dual-Stage 서보 시스템)

  • Kim, Seung-Han;Seong, U-Gyeong;Lee, Hyo-Jeong;Lee, Jong-Won;Choe, Jeong-Hun;An, Yeong-Jae;Jeon, Guk-Jin;Kim, Bong-Hwan
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.2
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    • pp.153-160
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    • 1999
  • Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

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