JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Characterization of Stiffness Coefficients of Silicon Versus Temperature using "Poisson's Rati" Measurements

  • Cho, Chun-Hyung (Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University) ;
  • Cha, Ho-Young (School of Electronic & Electrical Engineering, College of Engineering, Hongik Unversity) ;
  • Sung, Hyuk-Kee (School of Electronic & Electrical Engineering, College of Engineering, Hongik Unversity)
  • Received : 2015.07.23
  • Accepted : 2015.10.14
  • Published : 2016.04.30
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Abstract

The elastic material constants, stiffness constants ($c_{11}$, $c_{12}$, and $c_{44}$), are three unique coefficients that establish the relation between stress and strain. Accurate knowledge of mechanical properties and the stiffness coefficients for silicon is required for design of Micro-Electro-Mechanical Systems (MEMS) devices for proper modeling of stress and strain in electronic packaging. In this work, the stiffness coefficients for silicon as a function of temperature from $-150^{\circ}C$ to $+25^{\circ}C$ have been extracted by using the experimental measurements of Poisson's ratio (${\nu}$) of silicon in several directions.

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References

  1. W. G. Pfann and R. N. Thurston, J. Appl. Phys. 32, 2008 (1961). https://doi.org/10.1063/1.1728280
  2. R. C. Jaeger, Introduction to Microelectronic Fabrication (Addison-Wesley Longman, Boston, MA, U.S.A., 1993) p. 269-270.
  3. J. J. Wortman and R. A. Evans, J. Appl. Phys. 36, 153 (1964).
  4. Y. Kang, Ph. D. Dissertation, Auburn University, Auburn, AL, U.S.A., 1997, p. 144-158.
  5. J. M. Gere, S. P. Timoshenko and S. Thornes, Mechanics of Materials, 4th ed. (Nelson Thornes, 2002).
  6. H. J. McSkimin, W. L. Bond, E. Buehler, and G. K. Teal, Phys. Rev. 83, 1080 (1951). https://doi.org/10.1103/PhysRev.83.1080
  7. J. J. Hall, Phys. Rev. 161, 756 (1967). https://doi.org/10.1103/PhysRev.161.756
  8. A. B. Chen, Arden Sher, and W. T. Yost, The Mechanical Properties of Semiconductors and Semimetals (Academic Press, 1992), p. 37.