• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.10a
• /
• pp.336-340
• /
• 1997

For optimal design of micro stage, we were measured to displacement of piezo-electric transducer that was based on voltage value. And then researchers were analyzed to microstage through FEM with displacement data including voltage value of piezo-electric transducer. For verification of analyzing results, we were gauged on displacement by using Laser-interferometer. And researchers were confirmed to propriety of micro stage design with FEM, were obtained error rate that are 3.5% between measurement results and analyzing results.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2007.04a
• /
• pp.45-48
• /
• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.05a
• /
• pp.124-124
• /
• 2004

최근 MEMS공학의 발전으로 미소 가공물과 그 미소 가공물을 가공하는 공작기계의 발전이 두드러지고 있다. 마이크로 성형기는 이러한 미소 가공물을 만드는 공작기계들 중의 하나이다. 마이크로 성형기(micro former)는 마이크로 홀(micro holl)을 만드는 성형기로써 크랭크 축의 회전에 의한 펀치의 직선 운동으로 마이크로 홀을 뚫는 성형기이다. 마이크로 홀을 성형할 때에는 상하, 좌우의 미세한 변위가 생길 수 있다.(중략)

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.10
• /
• pp.60-65
• /
• 2002

For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 1995.03a
• /
• pp.40-62
• /
• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2001.10a
• /
• pp.255-259
• /
• 2001

The spring constant of a micro coil spring was measured by uniaxial tensile test. The inner diameter of it is $35{\mu}m$ and the pitch size is about $23{\mu}m$. A suing constant measurement system was developed. It consists of control units, load cell units, linear stages and several specially designed jigs and fixtures. Load and displacement are measured using a commercial load cell of 1000g capacity and a magnetic scale of $0.5{\mu}m$ resolution. In this study, a method to measure the spring constant of micro coil spring is presented and the relationship between misalignment of specimen and measurement error is discussed.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.12
• /
• pp.2687-2694
• /
• 2002

A precision displacement measuring system is proposed, which can detect the 3-DOF translational motions of precision positioning devices. The optical system, which is composed of two diode-laser sources and two quadratic PSDs, is adapted to detect the position of the spherical reflector usually mounted on the platform of positioning devices. Each of the laser beams from diode-laser sources is reflected at the highly reflective surface of the sphere; hence, the 3-dimensional position of the sphere causes the directional change of the reflected beams, which is detected by the PSDs. In this paper, we define the relationships between the output values of the two PSDs and the 3-DOF translational motions of the sphere. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, measuring range, and measurement error. The results show that the proposed measuring method is very useful for the measurement of the precision displacement of 3-DOF micro motions.

• 한국지구물리탐사학회:학술대회논문집
• /
• 2007.06a
• /
• pp.291-296
• /
• 2007

We measured potential waveform of load, displacement, micro electric signal generated by rock and mortar fracture using PXI A/D Converter. The rock type used for measurement was used granite, limestone and sandstone, and mortar specimen. we made measuring equipment of physical properties to confirm basic information of physical properties, measured physical properties of rock engineering, electric resistivity and seismic velocity. Potential waveform system was built using PXI A/D Converter and measured potential waveform of load, displacement, micro-electric signal generated using this during uniaxial compressive test by the specimen finished such test of physical properties. Using the saturated rock and mortar specimen, micro electric signal increased, and It didn't increase a signal in dried rock and mortar specimen according as load and strain rate increases. But signal also increased in saturated or dried specimen in case of sandstone. It was possible to check the close correlation relationship the signal and fracture behavior by a compressive load as the signal of fracture position was increased bigger than the other position. It was also possible to check the correlation relationship between physical properties and micro geo-electric signal.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.49 no.2
• /
• pp.140-148
• /
• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• Journal of the Korean Society for Precision Engineering
• /
• v.12 no.2
• /
• pp.48-58
• /
• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.