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http://dx.doi.org/10.3795/KSME-A.2002.26.12.2687

A Measuring Method for 3-DOF Displacement by Using Spherical Reflector  

Kwon, Ki-Hwan (한양대학교 대학원 정밀기계공학과)
Moon, Hong-Kie (한양대학교 대학원 정밀기계공학과)
Cho, Nahm-Gyoo (한양대학교 기계정보경영공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.26, no.12, 2002 , pp. 2687-2694 More about this Journal
Abstract
A precision displacement measuring system is proposed, which can detect the 3-DOF translational motions of precision positioning devices. The optical system, which is composed of two diode-laser sources and two quadratic PSDs, is adapted to detect the position of the spherical reflector usually mounted on the platform of positioning devices. Each of the laser beams from diode-laser sources is reflected at the highly reflective surface of the sphere; hence, the 3-dimensional position of the sphere causes the directional change of the reflected beams, which is detected by the PSDs. In this paper, we define the relationships between the output values of the two PSDs and the 3-DOF translational motions of the sphere. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, measuring range, and measurement error. The results show that the proposed measuring method is very useful for the measurement of the precision displacement of 3-DOF micro motions.
Keywords
Displacement Measurement; 3-DOF; Position Sensitive Detector; Spherical Reflector; Degree Of Freedom Motions; PSD;
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Times Cited By KSCI : 1  (Citation Analysis)
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