• Proceedings of the KSME Conference
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• 2007.05a
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• pp.741-745
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• 2007

Supplying power to microsystems that have no physical connection to the outside is difficult, and using batteries is not always appropriate. This paper discusses how to generate electricity from mechanical energy when vibrated in a cantilever beam. A model for the system predicts that the output power of the system is maximized when the mechanical damping in the system is minimized. Furthermore, to cover a wide frequency range and to be useful in a number of applications, a system of beams with different resonant frequencies has been designed and optimized. This information makes it possible to determine what design alternatives are feasible for the creation of a micro power supply for any specific application of MEMS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.251-251
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• 2008

In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on polycrystalline 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same - size flat rectangular. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size only corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$, the corrugated cantilever reaches the resonant frequency at 1.252 MHz, and is 68% larger than that of flat type.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1115-1119
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• 2005

The paper proposes the elastic modulus evaluation technique of a cantilever beam by vibration analysis based on time-average electronic speckle pattern interferometry (TA-ESPI) with non-contact and nondestructive and Euler-Bernoulli equation. General approaches for the measurement of elastic modulus of thin film are Nano indentation test, Bulge test and Micro-tensile test and so on. They each have strength and weakness in the preparation of test specimen and the analysis of experimental result. ESPI has been developed as a common measurement method for vibration mode visualization and surface displacement. Whole-field vibration mode shape (surface displacement distribution) at a resonance frequency can be visualized by ESPI. And the maximum surface displacement distribution from ESPI is a clue to find the resonance frequency at each vibration mode shape. And the elastic modules of test material can be easily estimated from the measured resonance frequency and Euler-Bernoulli equation. The TA-ESPI vibration analysis technique is able to give the elastic modulus of materials through the simple processing of preparation and analysis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.731-734
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• 2005

Generally, characteristics of electromechanical actuators are coupled with the mechanical and the electrical properties. Important mechanical parameters of these actuators are the achievable force and displacement in the presence of electric field. These mechanical parameters are related to the stress and strain of the materials and the actuator geometry. This paper presents how to measure the blocked force by using the micro-balance. The blocked force is defined as the force produced by the transducer under an applied voltage when the tip is constrained to zero motion. Also, a theoretical force by using the cantilever beam model is calculated under elastic domain. From the sample of 4 cm $\times$ 1 cm $\times$ 20 $\mu$m, the blocked farce measured from the equipment is 20.3 $\mu$N at 8 V$_{DC}$. By comparing it with the theoretical value, 24.9 $\mu$N, the blocked force measurement is acceptable. The furce measurement is also investigated with different AC electric fields and the frequency.

• Current Optics and Photonics
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• v.4 no.4
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• pp.293-301
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• 2020

In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively.

• Advances in nano research
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• v.12 no.2
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• pp.167-183
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• 2022

In this paper, the free and forced vibration analysis of rotating cantilever nanoscale cylindrical beams and tubes is investigated under the external dynamic load to examine the nonlocal effect. A couple of nonlocal strain gradient theories with different beams and tubes theories, involving the Euler-Bernoulli, Timoshenko, Reddy beam theory along with the higher-order tube theory, are assumed to the mathematic model of governing equations employing the Hamilton principle in order to derive the nonlocal governing equations related to the local and accurate nonlocal boundary conditions. The two-dimensional functional graded material (2D-FGM), made by the axially functionally graded (AFG) in conjunction with the porosity distribution in the radial direction, is considered material modeling. Finally, the derived Partial Differential Equations (PDE) are solved via a couple of the generalized differential quadrature element methods (GDQEM) with the Newmark-beta techniques for the time-dependent results. It is indicated that the boundary conditions equations play a crucial task in responding to nonlocal effects for the cantilever structures.

• Smart Structures and Systems
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• v.20 no.6
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• pp.657-668
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• 2017

In this research, an active vibration suppression of a smart beam having piezoelectric sensor and actuators is investigated by designing separate controllers comprising a linear quadratic regulator and a neural network. Firstly, design of a smart beam which consists of a cantilever aluminum beam with surface bonded piezoelectric patches and a designed mechanism having a micro servomotor with a mass attached arm for obtaining variations in the frequency response function are presented. Secondly, the frequency response functions of the smart beam are investigated experimentally by using different piezoelectric patch combinations and the analytical models of the smart beam around its first resonance frequency region for various servomotor arm angle configurations are obtained. Then, a linear quadratic regulator controller is designed and used to simulate the suppression of free and forced vibrations which are performed both in time and frequency domain. In parallel to simulations, experiments are conducted to observe the closed loop behavior of the smart beam and the results are compared as well. Finally, active vibration suppression of the smart beam is investigated by using a linear controller with a neural network based adaptive element which is designed for the purpose of overcoming the undesired consequences due to variations in the real system.

• Structural Engineering and Mechanics
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• v.46 no.3
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• pp.417-431
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• 2013

This paper presents responses of the free end of a cantilever micro beam under the effect of an impact force based on the modified couple stress theory. The beam is excited by a transverse triangular force impulse modulated by a harmonic motion. The Kelvin-Voigt model for the material of the beam is used. The considered problem is investigated within the Bernoulli-Euler beam theory by using energy based finite element method. The system of equations of motion is derived by using Lagrange's equations. The obtained system of linear differential equations is reduced to a linear algebraic equation system and solved in the time domain by using Newmark average acceleration method. In the study, the difference of the modified couple stress theory and the classical beam theory is investigated for the wave propagation. A few of the obtained results are compared with the previously published results. The influences of the material length scale parameter on the wave propagation are investigated in detail. It is clearly seen from the results that the classical beam theory based on the modified couple stress theory must be used instead of the classical theory for small values of beam height.

• Tribology and Lubricants
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• v.33 no.3
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• pp.92-97
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• 2017

The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle ($45^{\circ}$ and $135^{\circ}$) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a $10{\pm}1-{\mu}m$-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to $12{\mu}m/s$. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.

• Journal of the Korean Ceramic Society
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• v.40 no.7
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• pp.657-661
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• 2003

The elastic moduli or fracture strengths of multi-layered film (SiO$_2$/po1y-Si/SiN/SiO$_2$, 2.77 $\mu\textrm{m}$ thick), CVD diamond film (1.6 $\mu\textrm{m}$ thick), SiO$_2$ film (1.0 $\mu\textrm{m}$ thick) and SiN film (0.43 $\mu\textrm{m}$ thick) made for the membrane of ink-jet printer head were measured with cantilever beam bending method using nanoindenter after fabricating in the form of micro cantilever beam (${\mu}$-CLB). And the elastic moduli of ${\mu}$-CLB of SiO$_2$ film and SiN film were compared with the value of each film on silicon substrate determined with nanoindentation method. The results showed that the modulus and strength of multi-layered film decrease from 68.08 ㎬ and 2.495 ㎬ to 56.53 ㎬ and 1.834 ㎬, respectively as the width of CLB increases from 18.5 $\mu\textrm{m}$ to 58.5 $\mu\textrm{m}$. And the elastic moduli of SiO$_2$ and SiN films measured with ${\mu}$-CLB bending method are 68.16 ㎬ and 215.45 ㎬, respectively and the elastic moduli of these films on silicon substrate measured with nanoindentation method are 98.78 ㎬ and 219.38 ㎬, respectively. These results show that with ${\mu}$-CLB bending technique, moduli can be measured to within 2%.