• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.569-572
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• 2000

This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10$\mu\textrm{m}$ thick silicon membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD(Resistance Thermometer Device)on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280$^{\circ}C$ at input Power 0.9 W; for the SOI membrane with 10 trenches, it is 580$^{\circ}C$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro thermal sensors and actuators.

• Advances in Computational Design
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• v.2 no.2
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• pp.107-119
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• 2017

The Micro circular diaphragm (MCD) is the mechanical actuator part used in the micro electro-mechanical sensors (MEMS) that combine electrical and mechanical components. These actuators are working under harsh mechanical and thermal conditions, so it is very important to study the mechanical and thermal behaviors of these actuators, in order to do with its function successfully. The objective of this paper is to determine the thermo-mechanical behavior of MCD by developing the traditional bulge test technique to achieve the aims of this work. The specimen is first pre-stressed to ensure that is no initial deflection before applied the loads on diaphragm and then clamped between two plates, a differential pressure (P) and temperature ($T_b$) is leading to a deformation of the MCD. Analytical formulation of developed bulge test technique for MCD thermo-mechanical characterization was established with taking in-to account effect of the residual strength from pre-stressed loading. These makes the plane-strain bulge test ideal for studying the mechanical and thermal behavior of diaphragm in both the elastic and plastic regimes. The differential specimen thickness due to bulge effect to describe the mechanical behavior, and the temperature effect on the MCD material properties to study the thermal behavior under deformation were discussed. A finite element model (FEM) can be extended to apply for investigating the reliability of the proposed bulge test of MCD and compare between the FEM results and another one from analytical calculus. The results show that, the good convergence between the finite element model and analytical model.

• Journal of Sensor Science and Technology
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• v.27 no.2
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• pp.99-104
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• 2018

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• Proceedings of the KOSOMBE Conference
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• v.1995 no.11
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• pp.52-56
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• 1995

At present many kinds of micro actuators and micro mechanical components have been studied, but force transmission to arbitary direction is difficult using the current method. To solve this problem, a micro hydraulic system is expected to be useful. Force transmission to arbitary direction is necessary to development of medical use micromachine. In this paper, we studied about micro hydraulic system and magnetic fluid micro actuator and micro rapid prototyping system. The result of this studies indicated that possibility of the power transmission that using the micro cylinder system.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.258-262
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• 2010

Since MEMS based micro actuators or generating devices showed high efficiency per volume, plenty of research are ongoing. Among them, MEMS based millimeter-scale micro gas turbine is one of the most powerful item for replacing chemical batteries. However, due to MEMS manufacturing technique, it is very difficult that makes wide turbine bearing area. It causes low DN number, so sufficient bearing force is hard to achieve. Thus, the most important issue on micro gas turbine is to design the proper bearing which can keep rotor stable during operation. In order to that, micro-scale gas-lubricated bearing is generally used. In this paper, basic feasibility study of thrust bearing of 10mm diameter turbine is described. Thrust bearing is hydrostatic gas-lubricated type. Numerical simulation is performed with ANSYS CFX 11.0 which is commercial numerical tool. Relationship between bearing inlet pressure and mass flow rate and bearing force is figured while changing bearing gap and number of capillaries. The simulation results will be used for further design of micro gas turbine.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• Journal of Institute of Control, Robotics and Systems
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• v.8 no.9
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• pp.736-746
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• 2002

There has been a great demand for smart actuators in the field of micro-machines. However, the control accuracy of smart actuators, e.g., a shape memory alloy(SMA) and a piezoceramic actuator, is limited due to the inherent hysteresis nonlinearity. The Preisach hysteresis model has emerged as an appropriate model f3r the behavior of those smart actuators. Yet it is still not easy to construct a practical model of hysteresis using the classical Preisach model. Accordingly, in this paper, we propose a new simple method for modeling of the hysteresis nonlinearity of SMA. Using only the proportional relation of the major loop of hysteresis, the proposed method makes the computation of the Preisach model easy. We prove the efficacy of the proposed model through the comparative the experimentation with the classical Preisach model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.873-876
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• 2001

Micro-robots using microprocessor are mainly classified as line-tracer, micro-mouse, and war-robot. This paper presents the development of the war-robot mechanism with vehicle-style using RC-servo motors and actuators using 4-bar linkage and infrared sensors. Especially the algorithm of conquering other war-robots is proposed based on the skill of belly-throw of Korean wrestling.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.2 s.95
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• pp.15-22
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• 1999

This paper demonstrates the feasibility of Shape Memory Alloy (SMA) actuators in controlling the motion of micro active catheter. The dynamic behavior of SMA is obtained by several experiments for the design of the controller. With the control parameters obtained in experiments, temperature feedback control algorithm is proposed and realized. The prototype of micro active catheter is fabricated, and its control performance which uses the designed controller is investigated. The results obtained show the potential of the SMA as viable means for actuating the micro active catheter.