• 제목/요약/키워드: Mg-Si-O

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Cu(Mg) alloy의 표면과 계면에서 형성된 MgO의 확산방지능력 및 표면에 형성된 MgO의 전기적 특성 연구 (A study on Electrical and Diffusion Barrier Properties of MgO Formed on Surface as well as at the Interface Between Cu(Mg) Alloy and $SiO_2$)

  • 조흥렬;조범석;이재갑
    • 한국재료학회지
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    • 제10권2호
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    • pp.160-165
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    • 2000
  • Sputter Cu(1-4.5at.%Mg) alloy를 100mTorr이하의 산소압력에서 온도를 증가시키며 열처리하였을 때 표연과 계면에서 형성된 MgO의 확산방지막 특성을 살펴보았다 먼저, $Cu(Mg)/SiO_2/Si$ 구조의 샘플을 열처리했을 때 계면에서는 $2Mg+SiO_2{\rightarrow}2MgO+Si$의 화학반응에 의해 MgO가 형성되는데 이 MgO충에 의해 Cu가 $SiO_2$로 확산되는 것이 현저하게 감소하였다. TiN/Si 기판 위에서도 Cu(Mg)과 TiN 계면에 MgO가 형성되어 Cu(4.5at.%Mg)의 경우 $800^{\circ}C$까지 Cu와 Si의 확산을 방지할 수 있었다. 표면에 형성된 MgO위에 Si을 증착하여 $Si/MgO(150\;{\AA})/Cu(Mg)/SiO_2/Si$구조로 만든 후 열처리했을 때 $150\;{\AA}$의 MgO는 $700^{\circ}C$까지 Si과 Cu의 확산을 방지할 수 있었다. 표면에 형성된 MgO($150\;{\AA}$)의 누설전류특성은 break down 5V, 누설전류 $10^{-7}A/\textrm{cm}^2$의 값을 나타냈다. 또한 $Si_3N_4/MgO$ 이중구조에서는 매우 낮은 누설전류밀도를 나타냈으며 MgO에 의해 $Si_3N_4$ 증착시 안정적인 계면이 형성됨을 확인하였다.

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초전형 적외선 센서를 위한 MgO(100)/$Si_3N_4/SiO_2/Si_3N_4$/Si 기판 제작 (Fabrication of MgO(100)/$Si_3N_4/SiO_2/Si_3N_4$/Si Substrate for Pyroelectric IR Sensor)

  • 김성우;성세경;류지열;최우창;최혁환;이명교;권태하
    • 센서학회지
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    • 제9권2호
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    • pp.90-95
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    • 2000
  • $Si_3N_4/SiO_2/Si_3N_4$/Si 판위에 MgO 박막을 성장하여 MgO 단결정과 결정배향성이 유사한 초전형 적외선 센서용 기판을 제작하였다. RF 마그네트론 스퍼터링법으로 MgO 박막을 성장하였고, 그 위에 Pt 하부전극과 PLT 박막을 성장시킨 후 c축 배향성을 조사하였다. $500^{\circ}C$의 기판온도와 30 mTorr의 분위기 압력 및 160 W의 RF power에서 성장된 MgO 박막이 단결정 MgO가 가지는 배향성 정도의 우수한 a축 배향성을 보였고, 그 위에 성장된 PLT 박막은 MgO 단결정 기판위에 성장된 것과 거의 회절강도 변화가 유사한 c축 배향성을 보였다.

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(Zn1-xMgx)2SiO4:mn 형광체의 제조와 발광특성 (Preparation and Luminescent Properties of (Zn1-xMgx)2SiO4:mn Phosphors)

  • 이지영;유일
    • 한국전기전자재료학회논문지
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    • 제22권5호
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    • pp.415-418
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    • 2009
  • $Zn_{2}SiO_{4}$:Mn green phosphors doped with Mg for PDP were synthesized by solid state reaction method. $Zn_{2}SiO_{4}$:Mn, Mg phosphors with increasing Mg concentration were changed from Rhombohedral to Orthorhombic structure. Photoluminescence intensity of $Zn_{2}SiO_{4}$:Mn phosphors doped with Mg 0.5 mol was definitely higher than that of Mg non-doped sample. The enhanced luminescence with doping Mg in the $Zn_{2}SiO_{4}$:Mn phosphors was interpreted by the increase of energy transfer from host to Mn ions with substitution Mg for Zn in the $Zn_{2}SiO_{4}$:Mn host.

$Mg_2SiO_4$ : Tb 소자의 기본 특성에 관한 연구 (A Study of Fundamental Characteristics for $Mg_2SiO_4$ : Tb Phosphor)

  • 박명환;박종삼;권덕문;이준일
    • 대한방사선기술학회지:방사선기술과학
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    • 제19권2호
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    • pp.79-83
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    • 1996
  • The thermoluminescence(TL) response in changing annealing condition, triboluminescence, and darkroom temperature for $Mg_2SiO_4$:Tb phosphor are examined. The experimental results are summerized as follows : 1. The uniformity of TL intensity is better In the disinfected $Mg_2SiO_4$ : Tb than in contaminated one. 2. The triboluminescence of $Mg_2SiO_4$ : Tb is almost not detected even if numbers of $Mg_2SiO_4$ : Tb falling are increased. 3. The fading effect of $Mg_2SiO_4$ : Tb is scarcely affected by freezing room. The followings are resulted from the study. The disinfected $Mg_2SiO_4$ : Tb phosphor should be used in the dose measurement and the immediate reading for $Mg_2SiO_4$ : Tb after exposure is better. And if the reading is not immediately taken, a law darkroom temperature for $Mg_2SiO_4$ : Tb storage is recommended.

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MgO 완충층을 이용한 Si 기판상 강유전체 $BaTiO_3$ 박막의 제조 (Preparation of Ferroelectric $BaTiO_3$ Thin Films on MgO-Buffered Si Substrates)

  • 김상섭
    • 한국세라믹학회지
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    • 제34권4호
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    • pp.373-379
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    • 1997
  • A study on the deposition and characterization of BaTiO3 thin films on MgO-buffered Si(100) substrates by sputtering was conducted. The MgO buffer layers were investigated as a function of deposition temperature. At lower substrate temperature, the MgO layers were not fully crystalline, but a crystallized MgO layer with (001) preferred orientation was obtained at the substrate temperature of $700^{\circ}C$. Partially (00ι) or (h00) textured BaTiO3 films were obtained on Si(100) with the MgO buffer layer grown at 700ι. While, randomly oriented BaTiO3 films with large-scale cracks on the surface were made without the MgO layer. The crystallographic orientation, morphology and electrical properties between the BaTiO3 films on Si with and without the MgO layer were compared using the BaTiO3 film on MgO(100) single crystal substrate as a reference system. Also the favorable role of the MgO layer as a buffer for growing of oriented BaTiO3 films on Si substrates was confirmed.

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Al$_2$O$_3$-SiC-C 내화물의 특성에 미치는 MgO의 첨가효과 (Effects of MgO Addition on the Properties of $Al_2$O$_3$-SiC-C Refractory)

  • 조문규;정두화;이석근
    • 한국세라믹학회지
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    • 제35권2호
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    • pp.129-136
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    • 1998
  • The effects of MgO on the resistance to corrosion and oxidation of Al2O3-SiC-C refractory have been in-vestigated. The resistance to oxidation was improved as the amount of MgO increased. The resistance to corrosion was enhanced until 2 wt% MgO content but degraded over that content. From the dependence of temperatuer on the oxidation resistance oxidation was suppressed by the microstructural densification caused by spinel formation over 1200~130$0^{\circ}C$and the formation MgO-Al2O3-SiO2 liguid-phase over 130$0^{\circ}C$ The weight loss of specimens containing MgO with various purity at range of 95 to 99% and par-ticle size of -0.045 mm to -0.074 mm was examined. The oxidation resistance was not changed signficantly with the particle size and purity of MgO powders.

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$BaWO_4$-$Mg_2$$SiO_4$세라믹스의 $CaTiO_3$첨가에 따른 고주파 유전특성 (Effect of $CaTiO_3$Additions on Microwave Dielectric Properties in $BaWO_4$-$Mg_2$$SiO_4$Ceramics)

  • 박일환;김경용;김병호
    • 한국세라믹학회지
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    • 제38권3호
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    • pp.280-286
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    • 2001
  • 10 이하의 저유전율을 갖는 (1-x)BaWO$_4$-xMg$_2$SiO$_4$(x=0.1~0.9) 세라믹스의 미세구조와 고주파 유전특성을 조사하였다. (1-x)BaWO$_4$-xMg$_2$SiO$_4$(x=0.1~0.9) 세라믹스는 정방정(tetragonal) 구조를 가진다. 0.1BaWO$_4$-0.9Mg$_2$SiO$_4$세라믹스는 BaWO$_4$$Mg_2$SiO$_4$의 상들이 공존하는 혼합상을 보였으며, $Mg_2$SiO$_4$가 이차사으로 형성된 것이 관찰되었다. 120$0^{\circ}C$~140$0^{\circ}C$에서 2시간 동안 소결된 (1-x)BaWO$_4$-xMg$_2$SiO$_4$(x=0.1~0.9) 세라믹스는 $\varepsilon$$_{r}$=6.37~8.21, Q.f=15000~99422 그리고 $ au$$_{f}$=73.9~48.9 ppm/$^{\circ}C$의 고주파 유전특성을 가졌다. $\tau$$_{f}$를 보정하기 위해, CaTiO$_3$(1,5 wt%)가 (1-x)BaWO$_4$-xMg$_2$SiO$_4$(x$\geq$0.9) 세라믹스에 첨가되었다. 135$0^{\circ}C$에서 2시간 동안 소결된 0.1BaWO$_4$-0.9Mg$_2$SiO$_4$+CaTiO$_3$(5 wt%) 세라믹스는 $\varepsilon$$_{r}$=7.3, Q.f=30532 그리고 $\tau$$_{f}$=-30 ppm/$^{\circ}C$의 고주파 유전특성을 얻었다. 얻었다.

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불소운모 합성에 따른 $K_2O-MgO-Al_2O_3-SiO_2-MgF_2$계의 연구 (The Study of $K_2O-MgO-Al_2O_3-SiO_2-MgF_2$ System in Fluro-phlogopite Synthesis.)

  • 송경근;오근호;김대웅
    • 한국세라믹학회지
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    • 제20권1호
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    • pp.37-42
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    • 1983
  • An attempt was made to derive a possible synthetic mechanism of Fluoro-phlogopite (Mica, 4Mg.$Al_2O_3$.$6SiO_2$.$K_2O$.$2MgF_2$) The pevention of fluorine vaporization turned out to be the key in the synthesis of Mica in question.l Consequently the quinary system of Mica was seperately synthesized ; frist 4MgO.$Al_2O_3-6SiO_2$(ternary system) was sintered at 135$0^{\circ}C$ and $K_2O$ and $MgF_2$ were added and second 4MgO.$Al_2O_3-6SiO_2$.$K_2O$ (quarternary system) was heat-treated at 135$0^{\circ}C$ and $MgF_2$ was added. The ternary system resulted in Proto-enstatite Cordierite and Spinel phases while Forsterite and Leucite were shown in the quarternay system . In both methods Fluoro-phlogopite was systhesized but the solid state reactions to form Mica from the ternary system and the quarternary system were different. High temperature reactions in the formation of Mica were investigated employing XRD, DTA and SEM The study of the synthesis of Mica indirectly suggested a method of phase analysis of quinary system(MgO-$Al_2O_3-SiO_2-K_2O-MgF_2$) and quarternary system(MgO-$Al_2O_3-SiO_2-K_2O-MgF_2$) at various temperatures.

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반응용탕단조법에 의한 (${Al_2}{O_3}$+Si)/Mg 하이브리드 금속복합재료의 제조 (Fabrication of Reaction Squeeze Cast (${Al_2}{O_3}$+Si)/Mg Hybrid Metal Matrix Composites)

  • 전상혁;오동현;박익민;조경목;최일동
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2000년도 춘계학술발표대회 논문집
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    • pp.109-115
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    • 2000
  • In the present study, (10%$Al_2O_3$+5%Si)/AZ91 Mg hybrid composite was fabricated using the squeeze casting method. During squeeze casting, molten Mg was infiltrated into the preform of 10%$Al_2O_3$+5%Si and reaction product of $Mg_2Si$ intermetallic compound was formed by the reaction between molten Mg and Si powder. Microstructure has been observed and mechanical properties were evaluated for the reaction squeeze cast (RSC) hybrid composite. It was found that Si powder totally reacted with molten Mg to form $Mg_2Si$. Reinforcement ($Al_2O_3$) and the reaction product ($Mg_2Si$) are fairly uniformly distributed in Mg matrix for the squeeze cast hybrid composite. Mechanical properties were improved with hybridization of reinforcements, namely higher hardness and enhanced wear resistance comparing squeeze cast (15%$Al_2O_3$)/AZ91 Mg composite.

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Si가 첨가된 MgO의 기초 물성 및 응용 연구 (A Study on the Material Property and Application of the Si-doped MgO Layer)

  • 조성용;박정후;유윤식;이돈규
    • 전기학회논문지
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    • 제58권12호
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    • pp.2441-2445
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    • 2009
  • The effects of Si -doped MgO have been investigated in order to improve the material properties of the MgO protective layer in plasma display panels. A small amount of Si is added to the MgO pellet while the MgO layer is being deposited by using an electron-beam evaporation method. Both the surface characteristics of the protecting layer and the electro-optical properties of 4 in. test panels are investigated, such as XRD patterns, SEM images, firing and sustain voltages, secondary electron emission coefficient($\gamma$), luminance, luminous efficacy and lifetime. The firing and sustain voltage are minimized when Si concentration is 0.038%, where the luminance and luminous efficacy increase up to 17% and 26% compared with that of the pure MgO film, separately, and lifetime also shows good characteristics.