• Transactions on Electrical and Electronic Materials
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• 제3권1호
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• pp.30-37
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• 2002

A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control'writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 $\times$ 0.5 mm$^2$area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

• Nuclear Engineering and Technology
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• 제39권3호
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• pp.193-206
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• 2007

The Korea Atomic Energy Research Institute has developed an advanced fast reactor concept, KALIMER-600, which satisfies the Generation IV reactor design goals of sustainability, economics, safety, and proliferation resistance. The concept enables an efficient utilization of uranium resources and a reduction of the radioactive waste. The core design has been developed with a strong emphasis on proliferation resistance by adopting a single enrichment fuel without blanket assemblies. In addition, a passive residual heat removal system, shortened intermediate heat-transport system piping and seismic isolation have been realized in the reactor system design as enhancements to its safety and economics. The inherent safety characteristics of the KALIMER-600 design have been confirmed by a safety analysis of its bounding events. Research on important thermal-hydraulic phenomena and sensing technologies were performed to support the design study. The integrity of the reactor head against creep fatigue was confirmed using a CFD method, and a model for density-wave instability in a helical-coiled steam generator was developed. Gas entrainment on an agitating pool surface was investigated and an experimental correlation on a critical entrainment condition was obtained. An experimental study on sodium-water reactions was also performed to validate the developed SELPSTA code, which predicts the data accurately. An acoustic leak detection method utilizing a neural network and signal processing units were developed and applied successfully for the detection of a signal up to a noise level of -20 dB. Waveguide sensor visualization technology is being developed to inspect the reactor internals and fuel subassemblies. These research and developmental efforts contribute significantly to enhance the safety, economics, and efficiency of the KALIMER-600 design concept.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.391-392
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• 2012

In these days, the desire for the precise and tiny displays in mobile application has been increased strongly. Currently, laser displays ranging from large-size laser TV to mobile projectors, are commercially available or due to appear on the market [1]. In order to achieve a mobile projectors, the semiconductor laser diodes should be used as a laser source due to their size and weight. In this presentation, the continuous etch characteristics of Pd and AlGaN/GaN superlattice for the fabrication of blue laser diodes were investigated by using inductively coupled $CHF_3$ and $Cl_2$ -based plasma. The GaN laser diode samples were grown on the sapphire (0001) substrate using a metal organic chemical vapor deposition system. A Si-doped GaN layer was grown on the substrate, followed by growth of LD structures, including the active layers of InGaN/GaN quantum well and barriers layer, as shown in other literature [2], and the palladium was used as a p-type ohmic contact metal. The etch rate of AlGaN/GaN superlattice (2.5/2.5 nm for 100 periods) and n-GaN by using $Cl_2$ (90%)/Ar (10%) and $Cl_2$ (50%)/$CHF_3$ (50%) plasma chemistry, respectively. While when the $Cl_2$/Ar plasma were used, the etch rate of AlGaN/GaN superlattice shows a similar etch rate as that of n-GaN, the $Cl_2/CHF_3$ plasma shows decreased etch rate, compared with that of $Cl_2$/Ar plasma, especially for AlGaN/GaN superlattice. Furthermore, it was also found that the Pd which is deposited on top of the superlattice couldn't be etched with $Cl_2$/Ar plasma. It was indicating that the etching step should be separated into 2 steps for the Pd etching and the superlattice etching, respectively. The etched surface of stacked Pd/superlattice as a result of 2-step etching process including Pd etching ($Cl_2/CHF_3$) and SLs ($Cl_2$/Ar) etching, respectively. EDX results shows that the etched surface is a GaN waveguide free from the Al, indicating the SLs were fully removed by etching. Furthermore, the optical and electrical properties will be also investigated in this presentation. In summary, Pd/AlGaN/GaN SLs were successfully etched exploiting noble 2-step etching processes.

• 한국전자파학회논문지
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• 제10권4호
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• pp.582-593
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• 1999

본 논문에서는 무궁화 III호 위성체용 Ka-밴드 다이플렉서의 설계를 위해 모드매칭법에 의해 산란행렬을 계산하여 설계한 필터의 전달특성을 분석하고, 대칭적 유도성 아이리스 구조와 전계면 금속삽입 구조로 설계된 2개의 대역통과 필터를 자계면 T-접합에 의한 합성방법으로 Ka 밴드 위성체용 다이플렉서를 설계, 제작 하여 그 설계 방법에 대한 타당성 여부를 검증하였다 제작된 다이플렉서는 위성체에서 송.수선 펼터의 개별 사용에 따른 크기 및 무게의 증가를 효과적으로 감소시킬 수 있으며, 송선필터의 경우 아이리스를 도파관 자계변 외벽으로 돌출시키는 구조로 설계함으로써 펼터 자체가 방열판 구실을 하여 고전력 전송에 따른 펼터 의 특성 변화를 최소화하였다. 또한 대부분의 도파관 펼터에서 동작특성을 보정하기 위해 사용되는 미세 보정 나사의 사용을 배제함으로써 제작의 단순화와 위성체용으로서의 내구성과 선뢰도를 향상시켰다. 제작된 Ka-밴드 위성체용 다이플렉서는 2개의 펼터(Rx : $30.485\pm0.4 GHz$, Tx : $20.755\pm0.4 GHz$) 모두 통과대역에 서 1.2 dB 미만의 삽입손실(insertion loss)과 15dB 보다 좋은 반사손실(return loss) 특성을 얻었고, 송.수신 필터간 65dB 이상의 분리도(isolation)를 나타내었다.

• 전자공학회논문지D
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• 제36D권8호
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• pp.36-44
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• 1999

본 논문에서는 Ka-밴드 위성중계기용 듀플렉서의 설계를 위해 모드정합법에 의해 산란행렬을 계산하여 설계한 필터의 전달특성을 분석하고, 설계 방법의 타당성 여부 검증을 위해 대칭적 유도성 아이리스 구조와 전계면 금속삽입 구조로 설계된 2개의 대역통과 필터를 자계면 T-접합에 의한 합성방법으로 Ka-밴드 위성 중계기용 듀플렉서를 설계, 제작하였다. 제작된 듀플렉서는 위성체에서 송${\cdot}$수신 필터의 개별 사용에 따른 크기 및 두께의 증가를 효과적으로 감소시킬 수 있으며, 송신필터의 경우 아이리스를 도파관 자계면 외벽으로 돌출시키는 구조로 설계함으로써 필터 자체가 방열판 구실을 하여 고전력 전송에 따른 필터의 특성 변화를 최소화하였다. 또한 대부분의 도파관 필터에서 동작특성을 보정하기 위해 사용되는 미세 보정 나사의 사용을 배제함으로써 제작의 단순화와 위성중계기용으로서의 내구성과 신뢰도를 향상시켰다. 제작된 ,Ka-밴드 위성중계기용 듀플렉서는 2개의 필터(Rx : 30.485 ${\pm}$ 0.4 GHz, Tx : 20.755 ${\pm}$ 0.4 GHz) 모두 통과대역에서 1.2dB 미만의 삽입손실(insertion loss)과 15 dB 보다 좋은 반사손실(return loss) 특성을 얻었고, 송${\cdot}$수신 필터간 65 dB 이상의 분리도(isolation)를 나타내었다.