• Title/Summary/Keyword: Metal substrate

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High Speed Cu Filling Into TSV by Pulsed Current for 3 Dimensional Chip Stacking (3차원 실장용 TSV의 펄스전류 파형을 이용한 고속 Cu도금 충전)

  • Kim, In Rak;Park, Jun Kyu;Chu, Yong Cheol;Jung, Jae Pil
    • Korean Journal of Metals and Materials
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    • v.48 no.7
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    • pp.667-673
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    • 2010
  • Copper filling into TSV (through-silicon-via) and reduction of the filling time for the three dimensional chip stacking were investigated in this study. A Si wafer with straight vias - $30\;{\mu}m$ in diameter and $60\;{\mu}m$ in depth with $200\;{\mu}m$ pitch - where the vias were drilled by DRIE (Deep Reactive Ion Etching) process, was prepared as a substrate. $SiO_2$, Ti and Au layers were coated as functional layers on the via wall. In order to reduce the time required complete the Cu filling into the TSV, the PPR (periodic pulse reverse) wave current was applied to the cathode of a Si chip during electroplating, and the PR (pulse-reverse) wave current was also applied for a comparison. The experimental results showed 100% filling rate into the TSV in one hour was achieved by the PPR electroplating process. At the interface between the Cu filling and Ti/ Au functional layers, no defect, such as a void, was found. Meanwhile, the electroplating by the PR current showed maximum 43% filling ratio into the TSV in an hour. The applied PPR wave form was confirmed to be effective to fill the TSV in a short time.

Preparation and Properties of EPDM/Zinc Methacrylate Hybrid Composites (에틸렌 프로필렌 디엔 고무/메타크릴산아연 하이브리드 복합체의 제조와 물성에 관한 연구)

  • Chang, Young-Wook;Won, Jong-Hoon;Joo, Hyun-Seok
    • Elastomers and Composites
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    • v.40 no.1
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    • pp.59-65
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    • 2005
  • Zinc methacrylate(ZMA) was incorporated into ethylene-propylene diene rubber(EPDM) by direct mixing of the metal salt with the rubber or was in-situ prepared in the rubber matrix through neutralization reaction of zinc oxide(ZnO) and methacrylic acid(MAA). Tensile and tear tests showed that ZMA had a great reinforcing effect for the EPDM. It was also found that ZMA reinforced EPDM vulcanizates can retain their mechanical properties under thermo-oxidative aging. Moreover the incorporation of ZMA induces a substantial improvement in the adhesive strength of the EPDM onto aluminum substrate. The reinforcing effect and an enhancement in adhesion was greatly manifested when the ZMA is in-situ formed with an excess amount of ZnO. The extraordinary improvement in the properties is supposed to be related with the formation of ionic crosslink as well as the degree of dispersion or ZMA domain in the rubber matrix.

Characterization of a GH8 β-1,4-Glucanase from Bacillus subtilis B111 and Its Saccharification Potential for Agricultural Straws

  • Huang, Zhen;Ni, Guorong;Zhao, Xiaoyan;Wang, Fei;Qu, Mingren
    • Journal of Microbiology and Biotechnology
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    • v.31 no.10
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    • pp.1446-1454
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    • 2021
  • Herein, we cloned and expressed an endo-β-1,4-glucanase gene (celA1805) from Bacillus subtilis B111 in Escherichia coli. The recombinant celA1805 contains a glycosyl hydrolase (GH) family 8 domain and shared 76.8% identity with endo-1,4-β-glucanase from Bacillus sp. KSM-330. Results showed that the optimal pH and temperature of celA1805 were 6.0 and 50℃, respectively, and it was stable at pH 3-9 and temperature ≤50℃. Metal ions slightly affected enzyme activity, but chemical agents generally inhibited enzyme activity. Moreover, celA1805 showed a wide substrate specificity to CMC, barley β-glucan, lichenin, chitosan, PASC and avicel. The Km and Vmax values of celA1805 were 1.78 mg/ml and 50.09 µmol/min/mg. When incubated with cellooligosaccharides ranging from cellotriose to cellopentose, celA1805 mainly hydrolyzed cellotetrose (G4) and cellopentose (G5) to cellose (G2) and cellotriose (G3), but hardly hydrolyzed cellotriose. The concentrations of reducing sugars saccharified by celA1805 from wheat straw, rape straw, rice straw, peanut straw, and corn straw were increased by 0.21, 0.51, 0.26, 0.36, and 0.66 mg/ml, respectively. The results obtained in this study suggest potential applications of celA1805 in biomass saccharification.

Design and Manufacture of Traveling-wave Electro-optic Modulator for X-band LFM Signal Generation (X-대역 LFM 신호생성을 위한 진행파형 전광변조기의 설계 및 제작)

  • Yi, Minwoo;Yoo, Sungjun;Bae, Youngseok;Jang, Sunghoon;Ryoo, Joonhyung;Shin, Jinwoo
    • Journal of the Korea Institute of Military Science and Technology
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    • v.24 no.6
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    • pp.610-618
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    • 2021
  • In this paper, a photonic-based microwave system technology is described, and a traveling-wave electro-optic modulator is designed and manufactured as a key component. The fabricated modulator is composed of a metal diffusion waveguide for optical transmission and a planar waveguide electrode on lithium niobate substrate for microwave transmission. The electro-optic response bandwidth of I and Q channels in a fabricated dual parallel Mach-Zehnder modulator were measured for 27.67 and 28.11 GHz, respectively. Photonic four times up-converted X-band frequency and linear frequency modulated signal were confirmed using the fabricated electro-optic modulator by S-band input signal. The confirmed broadband signal can be applied to a microwave system for surveillance and high-resolution ISAR imaging.

Parallel pattern fabrication on metal oxide film using transferring process for liquid crystal alignment (전사 공정을 이용한 산화막 정렬 패턴 제작과 액정 배향 특성 연구)

  • Oh, Byeong-Yun
    • Journal of IKEEE
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    • v.23 no.2
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    • pp.594-598
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    • 2019
  • We demonstrate an alternative alignment process using transferring process on solution driven HfZnO film. Parallel pattern is firstly fabricated on a silicon wafer by laser interference lithography. Prepared HfZnO solution fabricated by sol-gel process is spin-coated on a glass substrate. The silicon wafer with parallel pattern is placed on the HfZnO film and annealed at $100^{\circ}C$ for 30 min. After transferring process, parallel grooves on the HfZnO film is obtained which is confirmed by atomic force microscopy and scanning electron microscopy. Uniform liquid crystal alignment is achieved which is attributed to an anisotropic characteristic of HfZnO film by parallel grooves. The liquid crystal cell exhibited a pretilt angle of $0.25^{\circ}$ which showed a homogeneous alignment property.

Purification and Characterization of Metalloprotease from Serratia marcescens PPB-26 and Its Application for Detergent Additive

  • Thakur, Shikha;Sharma, Nirmal Kant;Thakur, Neerja;Bhalla, Tek Chand
    • Microbiology and Biotechnology Letters
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    • v.47 no.2
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    • pp.259-268
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    • 2019
  • In this study, the extracellular metalloprotease from Serratia marcescens PPB-26 was purified to homogeneity via ethanol fractionation and DEAE-cellulose column chromatography. Thus, a 3.8-fold purification was achieved with a 20% yield and specific activity of 76.2 U/mg. The purified protease was a 50-kDa monomer whose optimum pH and temperature for activity were 7.5 and $30^{\circ}C$ respectively; however, it was found to remain active in the 5-9 pH range and up to $40^{\circ}C$ for 6 h. The protease had a half-life of 15 days at $4^{\circ}C$, an optimum reaction time of 10 min, and an optimum substrate (casein) concentration of 0.25%. Furthermore, the Michaelis constant ($K_m$) and reaction velocity ($V_{max}$) of the protease were calculated to be 0.28% and $111.11{\mu}moles/(min{\cdot}mg)^{-1}$, respectively. The protease was stable when subjected to metal ions (2 mM), showing increased activity with most (especially $CoCl_2$ and $MgSO_4$ (30.54% increase)). It was also stable when exposed to oxidizing agents, bleaching agents, and detergents (5% v/v for 60 min). It retained 93% of its activity in non-ionic detergents (Tween-20, Tween-80, and Triton X-100). Moreover, wash performance analysis in commercial detergents (Ariel and Tide) showed that not only was the protease capable of protein stain removal, but also reduced cleaning time by 80% when added to detergents. Thus, the Serratia marcescens PPB-26 metalloprotease appears to be a promising new candidate as a laundry additive in the detergent industry.

Wear of 3D printed and CAD/CAM milled interim resin materials after chewing simulation

  • Myagmar, Gerelmaa;Lee, Jae-Hyun;Ahn, Jin-Soo;Yeo, In-Sung Luke;Yoon, Hyung-In;Han, Jung-Suk
    • The Journal of Advanced Prosthodontics
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    • v.13 no.3
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    • pp.144-151
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    • 2021
  • PURPOSE. The purpose of this in vitro study was to investigate the wear resistance and surface roughness of three interim resin materials, which were subjected to chewing simulation. MATERIALS AND METHODS. Three interim resin materials were evaluated: (1) three-dimensional (3D) printed (digital light processing type), (2) computer-aided design and computer-aided manufacturing (CAD/CAM) milled, and (3) conventional polymethyl methacrylate interim resin materials. A total of 48 substrate specimens were prepared. The specimens were divided into two subgroups and subjected to 30,000 or 60,000 cycles of chewing simulation (n = 8). The wear volume loss and surface roughness of the materials were compared. Statistical analysis was performed using one-way analysis of variance and Tukey's post-hoc test (α=.05). RESULTS. The mean ± standard deviation values of wear volume loss (in mm3) against the metal abrader after 60,000 cycles were 0.10 ± 0.01 for the 3D printed resin, 0.21 ± 0.02 for the milled resin, and 0.44 ± 0.01 for the conventional resin. Statistically significant differences among volume losses were found in the order of 3D printed, milled, and conventional interim materials (P<.001). After 60,000 cycles of simulated chewing, the mean surface roughness (Ra; ㎛) values for 3D printed, milled, and conventional materials were 0.59 ± 0.06, 1.27 ± 0.49, and 1.64 ± 0.44, respectively. A significant difference was found in the Ra value between 3D printed and conventional materials (P=.01). CONCLUSION. The interim restorative materials for additive and subtractive manufacturing digital technologies exhibited less wear volume loss than the conventional interim resin. The 3D printed interim restorative material showed a smoother surface than the conventional interim material after simulated chewing.

A study on the high transparent and antistatic thin films on sodalime glass by reactive pulsed DC magnetron sputtering (Pulsed DC 마그네트론 스퍼터링으로 제조한 소다라임 유리의 고투과 및 대전방지 박막특성 연구)

  • Jung, Jong-Gook;Lim, Sil-Mook
    • Journal of Surface Science and Engineering
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    • v.55 no.6
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    • pp.353-362
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    • 2022
  • Recently, transmittance of photomasks for ultra-violet (UV) region is getting more important, as the light source wavelength of an exposure process is shortened due to the demand for technologies about high integration and miniaturization of devices. Meanwhile, such problems can occur as damages or the reduction of yield of photomask as electrostatic damage (ESD) occurs in the weak parts due to the accumulation of static electricity and the electric charge on chromium metal layers which are light shielding layers, caused by the repeated contacts and the peeling off between the photomask and the substrate during the exposure process. Accordingly, there have been studies to improve transmittance and antistatic performance through various functional coatings on the photomask surface. In the present study, we manufactured antireflection films of Nb2O5, | SiO2 structure and antistatic films of ITO designed on 100 × 100 × 3 mmt sodalime glass by DC magnetron sputtering system so that photomask can maintain high transmittance at I-line (365 nm). ITO thin film deposited using In/Sn (10 wt.%) on sodalime glass was optimized to be 10 nm-thick, 3.0 × 103 𝛺/☐ sheet resistance, and about 80% transmittance, which was relatively low transmittance because of the absorption properties of ITO thin film. High average transmittance of 91.45% was obtained from a double side antireflection and antistatic thin films structure of Nb2O5 64 nm | SiO2 41 nm | sodalime glass | ITO 10 nm | Nb2O5 64 nm | SiO2 41 nm.

Effect of Hydrothermal Reaction Conditions on Piezoelectric Output Performance of One Dimensional BaTiO3 Nanotube Arrays (1차원 BaTiO3 나노튜브 어레이의 압전발전성능에 수열합성 반응조건이 미치는 영향)

  • Lee, Jae Hoon;Hyeon, Dong Yeol;Heo, Dong Hun;Park, Kwi-Il
    • Journal of Powder Materials
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    • v.28 no.2
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    • pp.127-133
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    • 2021
  • One-dimensional (1D) piezoelectric nanostructures are attractive candidates for energy generation because of their excellent piezoelectric properties attributed to their high aspect ratios and large surface areas. Vertically grown BaTiO3 nanotube (NT) arrays on conducting substrates are intensively studied because they can be easily synthesized with excellent uniformity and anisotropic orientation. In this study, we demonstrate the synthesis of 1D BaTiO3 NT arrays on a conductive Ti substrate by electrochemical anodization and sequential hydrothermal reactions. Subsequently, we explore the effect of hydrothermal reaction conditions on the piezoelectric energy conversion efficiency of the BaTiO3 NT arrays. Vertically aligned TiO2 NT arrays, which act as the initial template, are converted into BaTiO3 NT arrays using hydrothermal reaction with various concentrations of the Ba source and reaction times. To validate the electrical output performance of the BaTiO3 NT arrays, we measure the electricity generated from each NT array packaged with a conductive metal foil and epoxy under mechanical pushings. The generated output voltage signals from the BaTiO3 NT arrays increase with increasing concentration of the Ba source and reaction time. These results provide a new strategy for fabricating advanced 1D piezoelectric nanostructures by demonstrating the correlation between hydrothermal reaction conditions and piezoelectric output performance.

Enzymatic Hydrolysis of Ovotransferrin and the Functional Properties of Its Hydrolysates

  • Rathnapala, Ethige Chathura Nishshanka;Ahn, Dong Uk;Abeyrathne, Edirisingha Dewage Nalaka Sandun
    • Food Science of Animal Resources
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    • v.41 no.4
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    • pp.608-622
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    • 2021
  • Bioactive peptides have great potentials as nutraceutical and pharmaceutical agents that can improve human health. The objectives of this research were to produce functional peptides from ovotransferrin, a major egg white protein, using single enzyme treatments, and to analyze the properties of the hydrolysates produced. Lyophilized ovotransferrin was dissolved in distilled water at 20 mg/mL, treated with protease, elastase, papain, trypsin, or α-chymotrypsin at 1% (w/v) level of substrate, and incubated for 0-24 h at the optimal temperature of each enzyme (protease 55℃, papain 37℃, elastase 25℃, trypsin 37℃, α-chymotrypsin 37℃). The hydrolysates were tested for antioxidant, metal-chelating, and antimicrobial activities. Protease, papain, trypsin, and α-chymotrypsin hydrolyzed ovotransferrin relatively well after 3 h of incubation, but it took 24 h with elastase to reach a similar degree of hydrolysis. The hydrolysates obtained after 3 h of incubation with protease, papain, trypsin, α-chymotrypsin, and after 24 h with elastase were selected as the best products to analyze their functional properties. None of the hydrolysates exhibited antioxidant properties in the oil emulsion nor antimicrobial property at 20 mg/mL concentration. However, ovotransferrin with α-chymotrypsin and with elastase had higher Fe3+-chelating activities (1.06±0.88%, 1.25±0.24%) than the native ovotransferrin (0.46±0.60%). Overall, the results indicated that the single-enzyme treatments of ovotransferrin were not effective to produce peptides with antioxidant, antimicrobial, or Fe3+-chelating activity. Further research on the effects of enzyme combinations may be needed.