• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.653-654
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

• 대한기계학회논문집A
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• 제26권10호
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• pp.2159-2164
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• 2002

This paper reports on the effects of additional factors on the engine friction characteristics. The total friction loss of engine is composed of pumping and mechanical friction loss. The pumping loss was calculated from the cylinder pressure, and the mechanical friction loss was measured by strip-down method under the motoring condition. The various parameters were tested. The engine friction loss was much affected by oil and coolant temperature. The low viscosity oil was very effective to reduce the friction loss, and friction modifier was very useful to reduce the friction loss at lower engine speed. The engine friction loss was varied with engine running time because of surface roughness decreasing and oil degradation. To prevent oil-churning effect, it was very important to maintain the proper oil level. The presented results will be very useful to understand friction characteristics of engine.

• International Journal of Automotive Technology
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• 제3권4호
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• pp.171-176
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• 2002

A bench test set-up is employed to simulate the friction characteristics of a paper-based friction material operating against a steel plate. Dry friction tests are run as well as tests with transmission fluids. Glazed friction material produces a negative coefficient of friction versus sliding velocity (f-v) curve for both dry friction and lubrication with transmission fluids. At low sliding speeds, the coefficient of friction when operating in transmission fluids for glazed friction materials is greater than that under dry friction. An appreciable negative f-v slope occurs at low sliding speeds for glazed friction materials when running with the transmission fluid. The friction material after running in produces a constant f-v curve under dry friction and a negative slope when lubricated with transmission fluid. At low sliding speeds, the coefficient of friction of the run-in friction material is lower than that of the glazed wet material. On the other hand, the run-in friction material has a larger friction coefficient than does the glazed friction material at higher sliding speeds.

• 대한기계학회논문집A
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• 제29권7호
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• pp.983-989
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• 2005

The effects of mechanical parameters on the characteristics of chemical mechanical polishing(CMP) can be directly evaluated by friction force. The piezoelectric quartz sensor for friction force measurement was installed, and friction force could be detected during CMP process. Furthermore, friction energy can be calculated by multiplying relative velocity by integration of the friction force throughout the polishing time. $SiO_2$ slurry for interlayer dielectric(ILD) CMP was used in this experiment to consider the relation of frictional characteristics and polishing results. From this experiment, it is proven that the friction energy is an essential factor of removal rate. Also, the friction force is related to removal amount per unit length(dH/ds) and friction energy has corelation to the removal rate(dH/dt) and process temporature. Moreover, within wafer non-unifornity(WIWNU) is related to coefficient of friction because of the mechanical moment equilibrium. Therefore, the prediction of polishing result would be possible by measuring friction force.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.231-234
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• 2004

Chemical mechanical polishing(CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with the slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various coefficient of friction was attained and analyzed with the kind of pad, abrasive and the abrasive concentration. The lubrication regime is also classified with ${\eta}v/p(\eta,\;v\;and\;p;$ the viscosity, relative velocity and pressure). Especially, the co-relation not only between the friction force and the removal per unit distance but also between the coefficient of friction and within-wafer-nonuniformity was estimated.

• 대한기계학회논문집A
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• 제40권5호
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• pp.449-455
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• 2016

본 연구는 마찰 특성이 다른 재질 별로 마찰에 의한 소음을 해석하는 스퀼 유한요소 해석 방법론을 제안하고 이를 실험 검증하고자 하였다. 회전운동 실험 장치를 통하여 각 재질 별 마찰곡선을 확인하였으며, 왕복운동 시험 장치에서 재질 별 마찰 소음을 계측하였다. 계측 된 마찰곡선을 특정 속도에서 선형화하여 마찰곡선 기울기 데이터를 FE Model에 적용하였다. 제안 된 해석 모델에서 발현 된 불안정 모드가 시험에서 발생한 스퀼 주파수와 유사함을 보였다.

• Journal of Mechanical Science and Technology
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• 제18권10호
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• pp.1755-1762
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• 2004

Friction phenomenon can be described as two parts, which are the pre-sliding and sliding regions. In the motion of the sliding region, the friction force depends on the velocity of the system and consists of the Coulomb, stick-slip, Streibeck effect and viscous frictions. The friction force in the pre-sliding region, which occurs before the breakaway, depends on the position of the system. In the case of the motion of the friction in the sliding region, the LuGre model describes well the friction phenomenon and is used widely to identify the friction model, but the motion of the friction in the pre-sliding such as hysteresis phenomenon cannot be expressed well. In this paper, a modified friction model for the motion of the friction in the pre-sliding region is suggested which can consider the hysteresis phenomenon as the Preisach model. In order to show the effectiveness of the proposed friction model, the sliding mode controller (SMC) with hysteresis friction compensator is synthesized for a ball-screw servo system.

• Journal of Mechanical Science and Technology
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• 제18권10호
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• pp.1849-1858
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• 2004

For examining friction-factor characteristics of round-hole pattern surfaces which are usually applied on damper seals, flat plate test apparatus is designed and fabricated. The measurement method of leakage and pressure distribution along round-hole pattern specimen with different hole area is described and a method for determining the Fanning friction factor is discussed. Results show that the round-hole pattern surfaces provide a much larger friction factor than smooth surface, and the friction factor vs. clearance behavior yields that the friction factor generally decreases as the clearance increases unlike the results of Nava's flat plate test. As the hole depth is decreased, the friction factor is increased, and maximum friction factor is obtained for 50% of hole area. Since the present experimental friction factor results show coincident characteristics with Moody's friction factor model, empirical friction factors for round-hole pattern surfaces are obtained by using the Moody's formula based on curve-fit of the experimental data. Results of Villasmil's 2D CFD simulation support the present experimental test result.

• Journal of Mechanical Science and Technology
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• 제20권4호
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• pp.513-521
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• 2006

The performances of porous bearings under different operating conditions were experimentally investigated in this study. Material groups studied are 90%Cu + 10%Sn bronze and 1%C + % balance Fe iron-based self-lubricating P/M bearings at constant (85%) density. In the experiments, the variation of the coefficient of friction and wear ratio of those two different group materials for different sliding speeds, loads, and temperatures were investigated. As a result, the variation of the friction coefficient-temperature for both constant load, and constant sliding speed, friction coefficient-average bearing pressure, PV-wear loss and temperature-wear loss curves were plotted and compared with each other for two materials, separately. The test results showed that Cu-based bearings have better friction and wear properties than Fe-based bearings.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 19-21 Oct. 1992
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• pp.158-163
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• 1992

This paper describes the estimation of the solid friction in mechanical systems by using the extended Kalman filtering techniques. We proposed two stochastic model for the estimation. The one is the 'parametric model' which represents the friction characteristics by an exponential function with unknown parameters. The other is the 'blind model' which does not assume an explicit model but regard the effect of the friction as an unknown input to a known dynamic system. For both models, we give estimation algorithms to generate the filtered estimate and the smoothed estimate with a fixed lag. The filtered estimate can be generated on-line for compensating the solid friction in mechanical systems. Although on-line applications are impossible, the smoothed estimate is more accurate and can be used to grasp precise friction characteristics. Simulation and experimental results arc presented to show the effectiveness of the proposed techniques.