• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.103-108
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• 2021

The TCD is used as one of the indicators for determining whether TSV Hole is defective. If the TCD is not normal size, it can lead to contamination of the CMP equipment or failure to connect the upper and lower chips. We propose a deep learning model for measuring the TCD. To verify the performance of the proposed model, we compared the prediction results of the proposed model for 2461 via holes with the CD-SEM measurement data and the prediction results of the existing model. Although the number of trainable parameters in the proposed model was about one two-thousandth of the existing model, the results were comparable. The experiment showed that the correlation between CD-SEM and the prediction results of the proposed model measured 98%, the mean absolute difference was 0.051um, the standard deviation of the absolute difference was 0.045um, and the maximum absolute difference was 0.299um on average.

• 동력기계공학회지
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• 제14권5호
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• pp.71-75
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• 2010

Leak detection technology is a challenging research until nowadays, because it has wide and various applications in industry. Furthermore pneumatic component reliability test based on ISO requires air leakage measurement. The conventional measurement methods need a complex operation and the calibration of leak detector. Tracing the history of our study, we proposed a new method for measurement of leak flow rate using isothermal chamber. In this study, propose a simulation model of isothermal chamber by infinitesimal flow -rate, such as a leak flow-rate. The effectiveness of the proposed simulation model is proved by simulation and experimental results. Base on the comparison results, proposed simulation model is good agreement with experimental results.

• 한국안전학회지
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• 제29권5호
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• pp.22-28
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• 2014

This study is compare to model-based analysis and experimental data of the response characteristic of interior impulse noise. Interior impulse noise and the pressure response characteristics of the building structure on its analysis are presented the impulse pressure acting on the rear wall 90 N-sec. The force acting on the wall $CFD^{{+}{+}}$ which are compared measurement and simulation analysis. Results of simulation and measurement data were shown. In this study, a high dimension of the degree of virtual space in the numerical space of the lesser degree in order to calculate folding method was applied. The results of this study contribute safety evaluation and model development for the interior impulse noise that affects the basic data for the interior impulse noise model validate for the physical quantity prediction.

• 전기전자학회논문지
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• 제6권1호
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• pp.102-110
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• 2002

측정잡음이 시간에 순차적으로 상관된 경우의 동적 시스템에서의 다중 고장들을 검출하고 진단하는 효과적인 방법을 제시하였다. 제안된 고장검출 및 진단기법은 수정된 상호간섭다중모델 추정 알고리즘을 기반으로 하며 이것은 유색잡음에 대해 자기회귀 모델을 사용하고 측정 차분법을 적용함으로써 일반 비상관 프로세스를 설계하여 상호간섭다중모델 추정 알고리즘에 적용한 것이다.

• 한국정밀공학회지
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• 제20권12호
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• pp.34-41
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• 2003

This paper suggests a methodology fur improving the machining accuracy by compensating for the machining errors based on on-machine measurement process. Probing errors and machine tool errors included in the measurement data were calibrated or compensated to obtain the actual machining errors. Machine tool errors were modeled in forward and backward directions according to the axis movement direction to consider the effects of backlash errors on the measurement data, and model parameters were determined by measuring a cube array artifact. A rectangular workpiece was machined and then measured with a touch probe as a verification experiment. Machining experiments showed that the machining errors were reduced to within the designated tolerance after compensating for the actual machining errors by modifying the original footpath for the next-step machining.

• Journal of Electrical Engineering and Technology
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• 제13권2호
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• pp.1030-1041
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• 2018

The aim of this paper is to design a centrifugal deformation error compensation method with guaranteed performance that allows angular velocity measurement of the magnetically suspended sensitive gyroscopes (MSSGs). The angular velocity measurement principle and the structure of the MSSG are described, and the analytical model of errors caused by MSSG rotor centrifugal deformation is established. Then, an on-line rotor centrifugal deformation error compensation method based on measurement of rotor spinning speed in real-time has been designed. The common issues caused by centrifugal deformation of spinning rotors can be effectively resolved by the proposed method. Comparative experimental results before and after compensation demonstrate the validity and superiority of the error compensation method.

• 제어로봇시스템학회논문지
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• 제21권7호
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• pp.684-690
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• 2015

This paper presents a modified residual-based EKF (Extended Kalman Filter) for performance improvement of indoor positioning using WiFi RSSI (Received Signal Strength Indicator) measurement. Radio signal strength in indoor environments may have irregular attenuation characteristics due to obstacles such as walls, furniture, etc. Therefore, the performance of the RSSI-based positioning with the conventional trilateration method or Kalman filter is insufficient to provide location-based accurate information services. In order to enhance the performance of indoor positioning, in this paper, error analysis of the distance calculated by using the WiFi RSSI measurement is performed based on the radio propagation model. Then, an IARM (Irregularly Attenuated RSSI Measurement) error is defined. Also, it shows that the IARM error is included in the residual of the positioning filter. The IARM error is always positive. So, it is presented that the IARM error can be estimated by taking the absolute value of the residual. Consequently, accurate positioning can be achieved based on the IEM (IARM Error Mitigated) EKF with the residual modified by using the estimated IARM error. The performance of the presented IEM EKF is verified experimentally.

• 한국전자파학회논문지
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• 제29권1호
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• pp.10-19
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• 2018

본 논문에서는 고주파 Radio-Frequency Interference (RFI) 측정용 프로브로 널리 쓰이는 Printed Spiral Coil(PSC)의 고주파 등가회로 모델이 제안되었다. 제안된 모델은 고주파 정합성을 확보하기 위하여 PSC의 설계변수에 기반한 분포 모델로 설계되었으며, 제안된 분포 등가회로 모델을 바탕으로 T-Pi 등가변환을 이용한 PSC의 고주파 해석적 모델 역시 새로이 제안되었다. 제안된 모델의 실제 고주파 RFI 측정 시 효용성을 확인하기 위하여, 임의의 RFI 노이즈 원으로 설계된 마이크로스트립 라인과 PSC 사이의 전달함수를 제안된 모델과 상호 인덕턴스를 결합하여 추출하였다. 제안된 PSC 모델의 자기 임피던스(self-impedance)와 전달함수는 3-dimensional field solver를 이용한 시뮬레이션 및 실 측정으로 검증되었으며, 6 GHz까지 높은 정합성을 보이는 것이 확인되었다. 제안된 PSC의 자기 임피던스 및 전달함수 모델은 GHz 영역의 고주파 통신대역에서의 RFI 측정용 프로브 설계 및 노이즈 간섭 예측에 활용될 수 있다.

• 전력전자학회논문지
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• 제4권1호
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• pp.1-12
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• 1999

파라미터 변동이나 외란에 강인한 영구자석 동기전동기의 궤환선형화 속도제어기를 설계하고 DSP를 이용하여 실험 시스템을 구현하였다. 시스템의 상태변수에 비하여 매우 느리게 변화하는 파라미터의 추정을 위하여 MRAS를 이용한 추정방법이 MIT rule을 이용하여 유도되었다. 외란이나 시스템의 상태변수 정도의 변화를 보이는 피라미터에 대하여는 그영향이 고려된 준-선형화 비간섭 모델이 유도되었다. 이 모델을 이용하여 제어시스템의 강인성을 얻고자 경계층을 가지는 Sliding mode 제어기를 설계하고 PD 제어기를 적용한 기존의 제어기와 비교하였다. 제안된 제어 방법의 유용성은 Simulation과 DSP에 기반한 실험 시스템을 통하여 검증하였다.

• 한국환경교육학회지:환경교육
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• 제19권3호
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• pp.138-149
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• 2006

The purpose of this study was to develop the environmental sensitivity(ES) measurement instrument and to apply for middle school students. The questionnaire was developed to evaluate ES. The developed questionnaire consists of 15 items in 5 categories. Each item of the instrument was developed through the conceptional analysis of the definition of ES. The 5 categories included natural environment, activity at natural environment, artificial environment, environmental pollution, environmental destruction. Data for this study were collected from 397 middle school students including 46 environmental class and 351 non-environmental class students. It was found that the developed instrument to measure ES was valid and reliable. Reliability coefficient, Cronbach $\alpha$ was 0.75. Using the developed instrument of ES, the ES was measured for the students of experimental group to which a inqury-based EE model was applied. The result was that the effect of ES of the students of the experimental group was not statistically significant. Futher research is needed related to the EE model based on the inquiry learning model and measurement of environmental sensitivity.