• 제목/요약/키워드: Measurement

검색결과 46,816건 처리시간 0.055초

반도체 제조공정에서 품질과 생산성을 고려한 자동 계측 샘플링 방법 (An Auto Metrology Sampling Method Considering Quality and Productivity for Semiconductor Manufacturing Process)

  • 신명구;이지형
    • 전기학회논문지
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    • 제61권9호
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    • pp.1330-1335
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    • 2012
  • This paper proposes an automatic measurement sampling method for the semiconductor manufacturing process. The method recommends sampling rates using information of process capability indexes and production scheduling plan within the restricted metrology capacity. In addition, it automatically controls the measurement WIP (Work In Process) using measurement priority values to minimize the measurement risks and optimize the measurement capacity. The proposed sampling method minimizes measurement controls in the semiconductor manufacturing process and improves the fabrication productivity via reducing measurement TAT (Turn Around Time), while guaranteeing the level of process quality.

잡음평형도와 측정회로에 관한 연구 (A Study on the Degree of Line Balance to Noise and its Measurement Circuits)

  • 여상근;김정태
    • 정보통신설비학회논문지
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    • 제9권2호
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    • pp.35-41
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    • 2010
  • The balance coefficients between telecommunication lines are specified in the technical standard and the power induction computation method varies in the order of 100 times in magnitude according to the amount of impedance. The results of actual balance measurements, differing from time to time with the measurement circuit or increasing proportionally as the induction voltage increases, appeared as a measurement error because of not using the standard measurement circuit. This article investigates such errors and proposes the use of a standard balance measurement circuit and a measurement device impedance under the domestic notification standard and the ITU-T international standard.

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압력 측정 시스템의 불확도 평가 (An Evaluation of the Uncertainty of Pressure Measurement Systems)

  • 최주호;홍성수
    • 한국군사과학기술학회지
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    • 제5권1호
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    • pp.15-23
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    • 2002
  • Uncertainty components and evaluation of the system of pressure measurement are presented in this paper. Since early in 1980s, measurement uncertainty is getting more important due to ISO/IEC 17025, which is established for international test and calibration laboratories. Up to now it is true that accuracy, precision, error and etc. have been commonly used in industry to define the amount of error to the products and equipment, but these terms ought to be united into uncertainity in the future. This paper describes how to indicate measurement uncertainty and types of measurement errors, and then shows the evaluation result of measurement system using piezoelectric pressure transducers.

기계적 필터를 이용한 포신형상 구조물의 진동신호 측정 (Measurement of Vibration Signals of a Gun Barrel Type Structure using Mechanical Filter)

  • 류봉조;구경완
    • 전기학회논문지P
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    • 제59권4호
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    • pp.440-443
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    • 2010
  • This paper deals with the method of vibration measurement of a gun barrel structure using mechanical filter. When a bullet with high speed is moving within a gun barrel type structure with low bending vibration frequencies, it is difficult to measure the bending vibration signals of the structure. For example, noncontact type sensors such as displacement or velocity sensor are not appropriate for the measurement of vibrational signals because of the movement effect of the equipment frame through the moving structures or effect of the ground vibration. One of contact type sensors such as accelerometer is profitable for measurement of vibrational signals because of its wide measurement ranges. In the case of a gun barrel structure including high vibrational signals like shock waves, however, it is necessary to propose vibration measurement method filtering high frequencies. The purpose of the paper is to propose the proper vibrational measurement technique filtering high frequencies of a gun barrel type structure.

PIV를 이용한 3차원 속도계측에 의한 유동장의 공간 및 벽면압력 분포 추정에 관한연구 (A Study on Estimation of inner and Wall Pressure Distribution by 3-Dimensional velocity Measurement using PIV)

  • 이영호
    • Journal of Advanced Marine Engineering and Technology
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    • 제22권4호
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    • pp.468-480
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    • 1998
  • A flow measurement system which is able to measure the instantaneous three-dimensional velocity components and the pressure distribution of fluid flows is developed using a digital image processing system and the stereoscopic photogrammetry. This system consists of two TV cameras a digital image processor and a 32-bit microcomputer. The capability of the developed system is verified by a preliminary test in which three-dimensional displancements of moving particles arranged on a rotating plate are tracked automatically. The constructed system is through the measurement and spatial pressure distribution is also obtained. The measurement uncertainty of this system is evaluated quantitatively. The present technique is applicable to the measurement of an unsteady fluid phenomenon especially to the measurement of three-dimensional velocity field of a complex flow.

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반전법을 이용한 축 직각도 측정방법 (Measurement of Axis Squireness by using Reversal Method)

  • 이창우;송준엽;하태호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.436-439
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    • 2005
  • In general a square master and a dial gauge are used to measure the axis squareness on the spot. This method is a comparison measurement and its accuracy depends on the square accuracy wholly. Therefore the accuracy of a square master is very important and it is impossible that the accuracy of a square measurement is superior to the accuracy of a square master. In this paper, the new method of square measurement is proposed for measuring square without a square master and easily. This method is an absolute measurement by using a reversal method and can be used to measurement the accuracy of a square master.

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Complete Modeling of an Ultrasonic NDE Measurement System - An Electroacoustic Measurement Model

  • Dang, Changjiu;Lester W. Schmerr, Jr.
    • 비파괴검사학회지
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    • 제21권1호
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    • pp.1-21
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    • 2001
  • It will be shown how models can simulate all the elements of an ultrasonic NDE measurement system, including the pulser/receiver, cabling, transducer(s), and the acoustic/elastic waves fields. When combined, these models form what is called the electroacoustic measurement model. It will be demonstrated how this electroacoustic measurement model can be used to conduct parametric transducer and system studies and how the model can form the basis for experimentally characterizing all the elements of the ultrasonic measurement system, using purely electrical measurements.

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A fast high-resolution vibration measurement method based on vision technology for structures

  • Son, Ki-Sung;Jeon, Hyeong-Seop;Chae, Gyung-Sun;Park, Jae-Seok;Kim, Se-Oh
    • Nuclear Engineering and Technology
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    • 제53권1호
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    • pp.294-303
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    • 2021
  • Various types of sensors are used at industrial sites to measure vibration. With the increase in the diversity of vibration measurement methods, vibration monitoring methods using camera equipment have recently been introduced. However, owing to the physical limitations of the hardware, the measurement resolution is lower than that of conventional sensors, and real-time processing is difficult because of extensive image processing. As a result, most such methods in practice only monitor status trends. To address these disadvantages, a high-resolution vibration measurement method using image analysis of the edge region of the structure has been reported. While this method exhibits higher resolution than the existing vibration measurement technique using a camera, it requires significant amount of computation. In this study, a method is proposed for rapidly processing considerable amount of image data acquired from vision equipment, and measuring the vibration of structures with high resolution. The method is then verified through experiments. It was shown that the proposed method can fast measure vibrations of structures remotely.

일렉트론홀로그래피와 주사정전용량현미경 기술을 이용한 2차원 도펀트 프로파일의 측정 (Measurement of 2-Dimensional Dopant Profiles by Electron Holography and Scanning Capacitance Microscopy Methods)

  • 박경우;;현문섭;유정호;양준모;윤순길
    • 대한금속재료학회지
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    • 제47권5호
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    • pp.311-315
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    • 2009
  • 2-dimensional (2D) dopant profiling in semiconductor device was carried out by electron holography and scanning capacitance microscopy methods with the same multi-layered p-n junction sample. The dopant profiles obtained from two methods are in good agreement with each other. It demonstrates that reliability of dopant profile measurement can be increased through precise comparison of 2D profiles obtained from various techniques.

기계통풍식 냉각탑 유닛의 성능에 관한 실험적 연구 (An Experimental Study on the Performance of Cooling Tower Unit for Mechanical Draft)

  • 정순영
    • 한국수소및신에너지학회논문집
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    • 제32권6호
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    • pp.642-648
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    • 2021
  • In this paper, an experimental study was conducted on the performance of the cooling tower. In order to improve reliability in the cooling tower performance test, the measurement uncertainty of the instrument was estimated. Measurement uncertainty refers to the uncertainty of a measurement, estimates the range in which the expected value of the measurement can be within a certain confidence level, and suggests a range in which the measured representative value is incorrect. Therefore, the measurement result of the performance experiment is not an actual value, but a reasonable estimated value. The measurement uncertainty for the test was calculated and the measured results were presented.