Measurement of 2-Dimensional Dopant Profiles by Electron Holography and Scanning Capacitance Microscopy Methods |
Park, Kyoung-Woo
(Measurement & Analysis Team, National Nanofab Center)
Shaislamov, Ulugbek (Measurement & Analysis Team, National Nanofab Center) Hyun, Moon Seop (Measurement & Analysis Team, National Nanofab Center) Yoo, Jung Ho (Measurement & Analysis Team, National Nanofab Center) Yang, Jun-Mo (Measurement & Analysis Team, National Nanofab Center) Yoon, Soon-Gil (School of Nano Science and Technology, Chungnam National University) |
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