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http://dx.doi.org/10.5370/KIEE.2012.61.9.1330

An Auto Metrology Sampling Method Considering Quality and Productivity for Semiconductor Manufacturing Process  

Shin, Myung-Goo (성균관대학교 정보통신대학, 삼성전자)
Lee, Jee-Hyung (성균관대학교 정보통신대학)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.61, no.9, 2012 , pp. 1330-1335 More about this Journal
Abstract
This paper proposes an automatic measurement sampling method for the semiconductor manufacturing process. The method recommends sampling rates using information of process capability indexes and production scheduling plan within the restricted metrology capacity. In addition, it automatically controls the measurement WIP (Work In Process) using measurement priority values to minimize the measurement risks and optimize the measurement capacity. The proposed sampling method minimizes measurement controls in the semiconductor manufacturing process and improves the fabrication productivity via reducing measurement TAT (Turn Around Time), while guaranteeing the level of process quality.
Keywords
Auto metrology; Sampling; Quality; Productivity; Metrology capacity;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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