• Title/Summary/Keyword: Material and Contamination

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Effect of PVA Brush Contamination on Post-CMP Cleaning Performance (Post-CMP Cleaning에서 PVA 브러시 오염이 세정 효율에 미치는 영향)

  • Cho, Han-Chul;Yuh, Min-Jong;Kim, Suk-Joo;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.2
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    • pp.114-118
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    • 2009
  • PVA (polyvinyl alcohol) brush cleaning method is a typical cleaning method for semiconductor cleaning process especially post-CMP cleaning. PVA brush contacts with the wafer surface and abrasive particle, generating the contact rotational torque of the brush, which is the removal mechanism. The brush rotational torque can overcome theoretically the adhesion force generated between the abrasive particle and wafer by zeta potential. However, after CMP (chemical mechanical polishing) process, many particles remained on the wafer because the brush was contaminated in previous post-CMP cleaning step. The abrasive particle on the brush redeposits to the wafer. The level of the brush contamination increased according to the cleaning run time. After cleaning the brush, the level of wafer contamination dramatically decreased. Therefore, the brush cleanliness effect on the cleaning performance and it is important for the brush to be maintained clearly.

The Survey about Toxic Material Contamination at the Streamwater around the Sudokwon Kandfill Area (수도권 매립지 주변 하천의 독성물질 오염실태 조사)

  • Kang, Chang-Min;Lee, In-Hyun;Jang, Won
    • Journal of Environmental Science International
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    • v.7 no.4
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    • pp.565-572
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    • 1998
  • This study estimate the degree of contamination in the streamwater around the Sudokwon landfill site. It was sampled at 10 sites in Jan., Apr., Jul. and Oct., 1996. There were analyzed five kinds of toxic chemical material-CN, AES, PCB, As, Org-p, and four kinds of heavy metal-Pb, Hg, Cd, $C^{+6}$ The result are 1)The COD was generally increased to compare before landfall, 2) The Org-P and PCB were not detected at all points, 3) The concentrations of Pb, $C^{+6}$ and As were lower than the environmental criteria values, 4) The CN, Hg and Cd were over envirommental criteria values. and so emergent regulation is needed, 5) The effects of the streamwater contamination were not only the leachate of the landfall, but also the small factories and agricultural land around the landfill.

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Practical Radiation Safety Control: (I) Application of Annual Limit on Intake and Derived Air Concentration (방사선안전관리 실무: (I) 연간섭취한도와 유도공기중농도의 적용)

  • Kim, Hyun Kee
    • Journal of Radiation Protection and Research
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    • v.38 no.4
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    • pp.234-236
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    • 2013
  • Some of radioactive contamination is unavoidable in the facilities using the unsealed radioactive material. The primary purpose of radioactive contamination control in the workplace with contamination concern is the effects from the potential intake of radioactive material into the body. This paper provides procedures to estimate the level of internal exposure for the worker based on the conservative assumptions and simple calculations. They consist of two processes; to calculate air concentration of radioactive material and annual intake by inhalation with contaminated air and to compare each of them to Derived Air Concentration and Annual Limit on Intake mentioned in the related notification. The procedures are applicable to make a decision on practical requirements for monitoring air contamination and internal exposure of worker as follows; needs for measurement of air contamination and internal exposure and acquisition of information on the design of the ventilation system.

Diagnosis Technique of Surface Contamination Degree for EPDM Insulator according to Variation of Environment Condition (환경조건의 변화에 따른 EPDM 애자의 표면 오손정도의 진단기술)

  • Park, Jae-Jun;Choi, In-Hyuk;Kim, Jeong-Boo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.10
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    • pp.1132-1141
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    • 2004
  • The waveforms of the leakage currents for the surface discharge according to the degree of salt contamination and the variation of environmental condition on the EPDM polymer insulators, were shown in this paper. The variation phenomena of fundamental wave, 3rd and 5th harmonic waveforms were also shown from the beginning of the applied voltage and to the flashover voltage. To develop the technique of percentage contamination degree of EPDM polymer insulator according to the variation of environmental condition, the distortion degree of 3rd and 5th harmonic wave to the fundamental wave was utilized through the spectrum analysis for the waveforms of leakage current in the simulation of salt and fog test. The fact that distortion degree % of 3rd and 5th harmonics for fundamental wave is a necessary indicator for the assessment of contamination degree for the polymer insulators, was known.

Comparative Study of Particulate Contamination from Ampoule and Prefilled Syringe (앰플 및 1회용 주사용기에서의 미립자 혼입에 관한 비교연구)

  • Shim, Chang-Koo;Han, Yong-Hae;Kwon, Don-Sun
    • Journal of Pharmaceutical Investigation
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    • v.21 no.3
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    • pp.155-160
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    • 1991
  • Particulate is the foreign insoluble material in injectable solution inadvertently present in a given product. Considerable efforts have been made to avoid or minimize particulate contamination by pharmaceutical manufacturers during the production of parenteral products. Particulate contamination of the parenteral products can occur mainly during the opening (cutting) the container immediately before clinical use. In this study, particulate contamination generated during the opening process of ampoules (conventional type, 1-point and color-break ampoules) was compared with that of a prefilled injectable container (prefilled syringe). The particles were examined under a microscope after filtration of the total fluids in the containers. Particles having wide range of size distribution were found from all the ampoules tested. The contamination from the I-point ampoule and colorbreak ampoule was much less than from the conventional ampoule. Glass particles generated by cutting the glass-made ampoules seemed a principal source of the particulate contamination. The glass-partiaulte contamination could be improved substantially by replacing the ampoule containers with the prefilled syringe. Prefilled syringe, which can be used without any cutting process. did not generate particulates during the use. Therefore, it was concluded that prefilled syringe is most preferable container for the small volume parenteral (SVP) fluids in terms of particulate contamination.

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Correlation Analysis between Climate and Contamination Degree through Multiple Regression Analysis (다중회귀 분석을 통한 기후 및 오손도 간의 상관관계 분석)

  • Kim, Do-Young;Lee, Won-Young;Shim, Kyu-Il;Han, Sang-Ok;Park, Kang-Sik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05e
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    • pp.49-52
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    • 2003
  • The performance of insulators under contaminated conditions is the underlying and the most factor that determines insulation design for outdoor applications, Among the contamination factors, The sea salt is the most dangerous factor, and the salt factor have closed relation with climatic conditions, such as wind, temperature, humidity and so on, Effect of these factors to insulation system is different of each other, and need to show the correlation by multiple regression analysis techniques. In this paper, predicted and analyzed equivalent salt deposit density (ESDD) by change climatic condition through multiple regression analysis.

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Flashover Failure of Polymer Insulator in Distribution Lines (배전용 폴리머애자의 섬락고장)

  • 한재홍;이병성;김찬영;윤태상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.767-770
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    • 2000
  • This study was investigated for searching a cause of flashover failure of polymer insulator and preparing countermeasures. Hydrophobicity, microstructure and chemical structural change of polymer weathershed were studied by polymer characterization methods. In addition, the electrical properties such as power frequency dry flashover voltage/impulse voltage tests, contamination characteristics were carried out. The hydrophobicity of polymer weathershed was decreased significantly and cracks were observed on the surface. Also, the electrical characteristics did not satisfy the KEPCO specification. The failed polymer insulators showed the more leakage current than 4 years service-aged ones. From the result, it can be concluded that the flashover failure of polymer insulator was attributed to the surface aging and severe contamination.

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Leakage Current Properties Analysis of Outdoor Insulator on Climatic.Environmental Factor (기후.환경 인자에 의한 옥외 절연물의 누설전류 특성 분석)

  • Lee, Won-Yeong;Shim, Kyu-Il;Han, Sang-Ok;Park, Gang-Sik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.27-30
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    • 2002
  • In this paper, we were investigated leakage current properties of outdoor insulator on climatic environmental factor. Contamination is one of the most important factor to determine the performance of insulator. Thus, it is very important to exam the contamination degree on the outdoor insulator. There are many limits, such as reliability of data, interval of measurement and similarity of environmental conditions, in conventional method. So, we measured phase and leakage current of outdoor insulator using the temperature & humidity chamber. In this investigation, phase difference was measured to compare the variance of phase difference with the contamination degree and relative humidity.

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Analysis of Salt Contamination on the Location and the Distance from the coastline (지역 및 해안거리에 따른 염분오손 분석에 관한 연구)

  • Kim, Chan-Young;Kim, Dong-Myung;Kwon, Tae-Ho;Chun, Sung-Nam;Ko, Dong-Hyeon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.511-512
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    • 2006
  • The salt contamination on the distribution facilities is one of the major concern areas because more than 90% of salt contaminated failure occurs in distribution facilities. The periodic measurement of the Equivalent Salt Deposit Density(ESDD) is essential to manage and operate the power line. The ESDD has taken from the 112 position which is located on the coastline of the Korean Peninsula. The ESDD will be presented with the location and the distance from the coastline.

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Evaluation of Artificially Contaminated Suspension Insulators for Transmission (송전용 현수애자의 인공오손 평가)

  • Kim, Chan Young;Choi, In-Hyuk;Hong, Dong-Suk;Kim, Beom-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.08a
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    • pp.123-127
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    • 2002
  • This paper presented the results of evaluation of artificially contaminated suspension insulators for transmission lines. The suspension insulators were contaminated with kaolin and clay which were included various amount of natural salt. The degree of contamination were evaluated by measuring equivalent salt deposit density(ESDD). Then, the leakage currents were measured as a function of applied voltage, degree of contamination, humidity.

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