• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.485-485
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• 2009

Double side polishing process has been used for various industrial applications, such as polishing of semiconductor substrates and flat panel display glasses. In wafer manufacturing, double side polishing process is applied to improve wafer flatness and to minimize particle generation from wafers in device manufacturing processes, which is recognized as one of the most important processes. Whereas the kinematical modeling and analysis results of single side polishing, extensively used for chemical-mechanical polishing (CMP) in device manufacturing, are well investigated, the studies in conjunction with double side polishing are barely carried out, due to the complication of polishing system and the uncertainty of wafer motion in the carrier. This paper suggests the derivation of kinematical model with consideration of carrier and wafer motion in double side polishing, and then presents the effect of kinematical parameters on material removal amount and its non-uniformity. The kinematical analysis results help to understand the double side polishing process and to control the polishing results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.551-554
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• 2002

The paper discusses new approach for machining operation simulation using enhanced Z map algorithm. To extract the required geometric information from NC code, suggested algorithm uses supersampling method to enhance the efficiency of a simulation process. By executing redundant Boolean operations in a grid cell and averaging down calculated data, presented algorithm can accurately represent material removal volume though tool swept volume is negligibly small. Supersampling method is the most common form of antialiasing and usually used with polygon mesh rendering in computer graphics. The key advantage of enhanced Z map model is that the data structure is same with conventional Z map model, though it can acquire higher accuracy and reliability with same or lower computation time. By simulating machining operation efficiently, this system can be used to improve the reliability and efficiency of NC machining process as well as the quality of the final product.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.5
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• pp.617-623
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• 2004

This paper describes a dynamic thermal model for a representative dual axis rotational Chemical-Mechanical Polishing (CMP) tool. The model is one-dimensional but configured in the two-dimensional space and consists of three sub-models (pad, wafer and slurry fluid), with the first and the second that are time-dependent heat conduction-convection models with linear stationary (wafer) and nonlinear moving (pad) boundary conditions, and the last one that is a heat transport-convection model (slurry fluid). The modeling approach is validated by comparing the simulation results with available experimental data.

• Carbon letters
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• v.14 no.1
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• pp.27-33
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• 2013

An increase in population initiating rapid industrialization was found to consequently increase the effluents and domestic wastewater into the aquatic ecosystem. In this research the potentialities of Sambucus nigra L. (SNL) plant in the remediation of water, contaminated with methylene blue (MB), a basic dye were investigated. SNL was chemically impregnated with $KHCO_3$. Operating variables studied were pH, amount of adsorbent and contact time. In general, pH did not have any significant effect on colour removal and the highest adsorption capacity was obtained in 0.035 g MB/g-activated carbon. The Langmuir, Freundlich, Temkin and Dubinin-Radushkevich adsorption models were applied to describe the equilibrium isotherms. The adsorption isotherm data were fitted to the Temkin isotherm. The mass transfer property of the sorption process was studied using Lagergren pseudo-first-order and chemisorption pseudo-second-order kinetic models. The sorption process obeyed the pseudo-second-order kinetic model. The surface area, pores volume and diameter were assessed by the Brunauer-Emmett-Teller and Barrett-Joyner-Halenda methods. The results were compared to those from activated carbon (Merck) and an actual sample. The results indicate that SNL can be employed as a natural and eco-friendly adsorbent material for the removal of dye MB from aqueous solutions.

• Advances in environmental research
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• v.4 no.2
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• pp.119-133
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• 2015

Water pollution means that the physical, chemical and biological properties of water are changing. In this study, adsorption was chosen as the treatment method because it is an eco-friendly and low cost approach. Magnetite is a magnetic material that can synthesize chemical precipitation. Magnetite was used for the removal of copper in artificial water samples. For this purpose, metal removal from water dependent on the pH, initial concentration of metal, amount of adsorbent and effect of sorption time were investigated. Magnetite was characterized using XRD, SEM and particle size distribution. The copper ions were determined by atomic absorption spectrometry. The adsorption of copper on the magnetite was studied in a batch process, with different aqueous solutions of Cu (II) at concentrations ranging from 10 to $50mg\;l^{-1}$. Optimum conditions for using magnetite were found to be concentration of $10mg\;L^{-1}$, pH: 4.5, contact time: 40 min. Optimum adsorbent was found to be 0.3 gr. Furthermore, adsorption isotherm data were analyzed using the Langmuir and Freundlich equations. The adsorption data fitted well with the Freundlich ($r^2=0.9701$) and Langmuir isotherm ($r^2=0.9711$) equations. Kinetic and equilibrium aspects of the adsorption process were studied. The time-dependent Cu (II) adsorption data were described well by a pseudo-second-order kinetic model.

• Environmental Engineering Research
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• v.20 no.4
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• pp.342-346
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• 2015

Haloacetonitriles (HANs) are nitrogenous disinfection by-products (DBPs) that have been reported to have a higher toxicity than the other groups of DBPs. The adsorption process is mostly used to remove HANs in aqueous solutions. Functionalized composite materials tend to be effective adsorbents due to their hydrophobicity and specific adsorptive mechanism. In this study, the removal of dichloroacetonitrile (DCAN) from tap water by adsorption on thiol-functionalized mesoporous composites made from natural rubber (NR) and hexagonal mesoporous silica (HMS-SH) was investigated. Fourier-transform infrared spectroscopy (FTIR) results revealed that the thiol group of NR/HMS was covered with NR molecules. X-ray diffraction (XRD) analysis indicated an expansion of the hexagonal unit cell. Adsorption kinetic and isotherm models were used to determine the adsorption mechanisms and the experiments revealed that NR/HMS-SH had a higher DCAN adsorption capacity than powered activated carbon (PAC). NR/HMS-SH adsorption reached equilibrium after 12 hours and its adsorption kinetics fit well with a pseudo-second-order model. A linear model was found to fit well with the DCAN adsorption isotherm at a low concentration level.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.39-47
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• 2004

In mold machining, there are many concave machining regions where chatter and tool deflection occur since MRR(material removal rate) increases as curvature increases even though cutting speed and depth of cut are constant. Boolean operation between stock and tool model is widely used to compute MRR in NC milling simulation. In finish cutting, the side step is reduced to about 0.3mm and tool path length is sometimes over loom, so Boolean operation takes long computation time and includes much error if the resolution of stock and tool model is larger than the side step. In this paper, curvature of CL (cutter location) surface and side step of tool path is used to compute the feedrate for constant MRR machining. The data structure of CL surface is Z-map generated from NC tool path. The algorithm to get local curvature from discrete data was developed and applied to compute local curvature of CL surface. The side step of tool path was computed by point density map which includes cutter location point density at each grid element. The feedrate computed from curvature and side step is inserted to new tool path to regulate MRR. The resultants were applied to feedrate optimization system which generates new tool path with feedrate from NC codes for finish cutting. The system was applied to the machining of speaker and cellular phone mold. The finishing time was reduced to 12.6%, tool wear was reduced from 2mm to 1.1mm and chatter marks and over cut on corner were reduced, compared to the machining by constant feedrate. The machining time was shorter to 17% and surface quality and tool was also better than the conventional federate regulation using curvature of the tool path.

• Journal of Korean Society of Environmental Engineers
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• v.37 no.12
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• pp.689-695
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• 2015

A biofilm filtration for the removal of gaseous pollutants has been recognized as a process with a complex interaction between the gas flow characteristics and the process operating variables. This study aims to develop an one dimensional dynamic numerical model which can be utilized as a tool for the analysis of biofilm filtration process operated in plug flow mode. Since, in a plug flow system, minor environmental changes in a gaseous unit process cause a drastic change in reaction and the interaction between the pollutants is an influencing factor, plug flow system was generalized in developing the model. For facilitation of the model development, dispersion was simplified based on the principles of material balance. Several reactions such as competition, escalation, and control between the pollutants were included in the model. The applicability of the developed model was evaluated by taking the calibration and verification steps on the experimental data performed for the removal of BTX at both low and high flow concentration. The model demonstrated a correlation coefficient ($R^2$) greater than 0.79 under all the experimental conditions except for the case of toluene at high flow condition, which suggested that this model could be used for the generalized gaseous biofilm plug flow filtration system. In addition, this model could be a useful tool in analyzing the design parameters and evaluating process efficiency of the experiments with substantial amount of complexity and diversity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.37-42
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• 1997

Off-line feed rate scheduling is an advanced methodology to automatically determine optimum feed rates for the optimization of NC code. However, the present feed rate scheduling systems have lim~tations to generate the optimized NC codes because they use the material removal rate or non-generalized cutting force model. In this paper, a feed rate scheduling system based on an improved cutting force model that can predrct cutting forces exactly in general machining was presented. Original blocks of NC code were divided to small ones with the modified feed rates to adjust the peak value of cutting forces to a constant vale. The characteristic of acceleration and deceleration for a given machrne tool was considered when off-line feed rate scheduhng was performed. Software for the NC code optimization was developed and applied to pocket machining simulation.

• Journal of Soil and Groundwater Environment
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• v.8 no.2
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• pp.55-61
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• 2003

The objective of this study was to investigate the characteristics of nitrate removal by conducting the column test in order to see the performance of surfactant modified zeolite (SMZ) as a permeable reactive barrier material. The prediction of nitrate removal was tested using the one-dimensional advective-dispersive model fitted to the experimental breakthrough curve. A methodology for scaling up to in-situ permeable reactive barrier was also proposed. The breakthrough of nitrate in the column packed with SMZ was well predicted using linear equilibrium adsorption model. The breakthrough time and half-life obtained by breakthrough experiment with variation of flowrates were decreased with the increase of flowrates. When 10㎥/day of groundwater containing the 50 mg/l of nitrate is to be treated to satisfy the potable water quality criteria (10 mg/l) by SMZ reactive barrier, 300 tons of SMZ and about 6 years of breakthrough time will be required, suggesting that 165 million wons are needed as barrier material expenses in each 6 years besides the initial design and construction expenses and the minimal monitoring and maintenance expenses.