• Title/Summary/Keyword: Material Erosion

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Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization

  • Stefanova, Y.;Cilek, F.;Endres, R.;Schwalke, U.
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.1
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    • pp.1-4
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    • 2007
  • This paper discusses two approaches for pre-polishing optimization of oxide chemical mechanical planarization (CMP) that can be used as alternatives to the commonly applied dummy structure insertion in shallow trench isolation (STI) and replacement gate (RG) technologies: reverse nitride masking (RNM) and oxide etchback (OEB). Wafers have been produced using each optimization technique and CMP tests have been performed. Dishing, erosion and global planarity have been investigated with the help of conductive atomic force microscopy (C-AFM). The results demonstrate the effectiveness of both techniques which yield excellent planarity without dummy structure related performance degradation due to capacitive coupling.

The Electrical Properties Dependent on the Filler in Silicone Composite Material for Power Distribution (옥외용 실리콘 고무 절연재료의 전기적 특성)

  • Kim, J.H.;Park, Y.G.;Kim, I.S.;Cho, H.G.;Kim, H.G.
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1597-1599
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    • 1996
  • In this study, we investigated the electrical characteristics such as tracking resistance, dielectric constant, insulating resistance, and arc resistance, of silicone rubber for outdoor use, and, focused on the tracking resistance. In the Inclined Plane Test, two kind of the contamination solutions were used, and their phenomena were observed. The average leakage current and the tracking breakdown time decreased, and erosion rate increased, using anionic surfactant added contaminant solution. The dielectric constant and dissipation factor were increased with increasing temperature.

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A Study on the Characteristics of Electro-Polishing and Utility Materials for Gas Transitting (Gas 이송용 Utility Materials의 전해연마 특성에 관한 연구)

  • An, Se-Won;Lee, Jong-Hyung;Park, Moo-Soo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.3 no.3
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    • pp.52-57
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    • 2004
  • Many kinds of gases, such as erosion gas, dilution gas, and toxic gas have been used in manufacturing process of LCD at semiconductor. In order to increase accumulation rate of manufacturing process, high degree of purity in these gases and minimized metalllic dust are required. All wetted stainless steel surface must be 316L electro-polished with $0254{\mu}m$ in average. Based on the AES analysis, Cr/Fe 11 and $Cr_2O_3$ thickness $25{\AA}$ are measured Molybdenum and silicon contaminants which is characteristic of stainless steel and oxygen were found on the surface.

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Electrical Lifetime Estimation of a Relay by Accelerated Life Test (가속수명시험을 이용한 릴레이의 전기적 수명예측)

  • Kim, Jae-Jung;Chang, Seog-Weon;Son, Young-Kap
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.5
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    • pp.430-436
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    • 2008
  • This paper proposes a way to predict electrical lifetime of a relay using Accelerated Life Testings (ALTs). The relay of interest mounting on printed circuit boards is usually under an inrush current stress. The inrush current is generated and accelerated through controlling a lamp switching device in the ALT. We find that the dominant failure mechanism under high levels of inrush current would be contact welding in the contact surface of the relay and the contact welding process is accelerated according to increase in inrush current. The electrical lifetime model based on Inverse Power Law in term of inrush current is proposed, and parameters characterizing relay's lifetime distribution are statistically estimated using ALTA 6 PRO software.

A Study on the Automation of the $N_2$ Splash Slag Coating System ($N_2$ Splash Slag Coating 시스템 자동화 연구)

  • Jang, Pill-Jang;Lee, Kee-Seong;Shin, Dong-Cheol;Cho, Hyun-Chul
    • Proceedings of the KIEE Conference
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    • 2002.11c
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    • pp.92-95
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    • 2002
  • A study on the system automation for the nitrogen splash slag coating in Basic Oxygen Blowing Furnace (BOF) is described. The engineers are trying to do their best efforts to increase the life of converter lining by developing improved refractory material and optimal operation techniques in the steel plants, A new slag coating method is needed to reduce the erosion rates of the refractory. In the current slag costing method, the BOF was swung back and forth. The new method uses the oxygen lance to blow the residual slag to the walls and cone of the converter. The nitrogen gas is used for blowing. This method is developed based on the automation process at factory in POSCO dated on the May 1998. The test results of nitrogen splash slag coating system for the BOF at POSCO are show to show the effectiveness of the system.

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HFPD Pattern Recognition Using Neural Network (신경회로망을 이용한 HFPD 패턴인식)

  • Kim, Duck-Keun;Jung, Young-Ill;Lim, Jang-Seub;Yeo, In-Sun
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1698-1700
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    • 2002
  • Recently, the HFPD measurement methods that detect high frequency bandwidth of frequency components of partial discharge pulses are proposed and many studies are carried out. The HFPD measurement method is able to detect partial discharge signal in active line, therefore this method has a merit that can does condition monitoring of power equipments and measure growth state of partial discharge erosion with on-line and real time. In this study, the radiated HFPD signals are detected by antenna and aging diagnosis is executed with a neural network algorithm. As a result of this study, the aging diagnosis of insulation material using neural networks is possible.

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Cavitation Characteristics on Impeller Materials of Centrifugal Pump for Ship in Sea Water and Fresh Water (해수와 청수환경에서 선박용 원심펌프 임펠러 재료의 캐비테이션 특성)

  • Im, Myeong-Hwan
    • Corrosion Science and Technology
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    • v.10 no.6
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    • pp.218-224
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    • 2011
  • The fresh water and sea water in present ships is used as cooling water for marine engine. Therefore, corrosion damage in seawater system is frequently occurred. In particular, in the impeller of pump, the performance and material span due to the corrosion and cavitation erosion has adverse effects. Most of the pump impellers in vessels are used Cu-Al alloy. Cu-Al alloy which having the excellent mechanical properties and corrosion resistance is widely used in marine environments. However, despite the excellent characteristics, the periodic replacement parts due to the cavitation damage in seawater is vulnerable to economic viewpoint. In this study, Cu-Al alloy used with impeller for centrifugal pump were conducted various experiments to evaluate its characteristics in seawater and fresh water solutions. As an electrochemical result, the dynamic conditions that exposed to the cavitation environment presented high corrosion current density with collapse of the cavity compared with the static conditions. Cavitation test results, the weightloss and weightloss rate in fresh water are observed more than those of seawater.

Research on Powder Metallurgy Technology in Fusion Materials in China

  • Ge, Chang-Chun;Zhou, Zhang-Jian;Du, Juan;Song, Shu-Xiang
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.896-897
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    • 2006
  • In the viewpoint of engineering, materials problem is a key problem, which determines whether the exploitation of fusion energy will be success. The most important class of fusion materials is plasma-facing materials (PFM). W, as high Z high melting-point metal is one of the most important candidate materials due to its high plasma erosion resistance. Improving the ductility of W and W based alloy, lowering its ductile-brittleness transition temperature for meeting the requirements of fusion application is an important task. In this paper, severalpowder meatllurgy methods of fabricating W and W based materials are being investigated.

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Application of Geosynthetic-Reinforced Structures for Railway (철도구조물에 적용되고 있는 토목섬유보강구조물의 현황)

  • Shin, Eun-Chul;Lee, Joong-Hwa
    • Proceedings of the Korean Geotechical Society Conference
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    • 2009.09a
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    • pp.337-349
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    • 2009
  • In recent years, the cutting and banking areas along the railway in Korea are exposed to the erosion problem during every year. The reinforcement is a composite construction material in which the strength of engineering fill is enhanced by the addition of strong tensile reinforcement in many different types. Various problems of the railway infrastructure have occurred due to the differential settlement, frost heaving, mud pumping, lack of bearing capacity, partially loss of embankment. In advanced countries, railway roadbed reinforcement is applied to solve these problems on railway roadbed. This paper presents the solution of such problems by means of the engineering works incorporated with railway reinforcement infrastructures such as geotextile bag method, existing grouting method, geocell, reinforced earth, soil nailing and so on.

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Effect of Conductor Radius of Polyesterimide- Polyamideimide Enameled Round Wire on Insulation Breakdown Voltage and Insulation Lifetime

  • Park, Jae-Jun;Shin, Seong-Sik;Lee, Jae-Young;Han, Se-Won;Kang, Dong-Pil
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.3
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    • pp.146-150
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    • 2015
  • Insulation breakdown voltage and insulation lifetime were investigated in straight lines or twisted pairs with polyesterimide-polyamideimide enameled round wires (EI/AIW ). The enamel thickness was 50 μm and the conducting copper radius was 0.50, 0.75, 1.09, and 1.50 mm, respectively. There were many air gaps in a twisted pair therefore, when voltage was applied to the twisted pair, enamel erosion took place in the air gap area because of partial discharge according to Paschen's law. Insulation breakdown voltage and insulation lifetime were highest in the sample of 0.75 mm conductor radius, which was higher than those values for 0.50 mm or 1.09 and 1.55 mm.