• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.188.1-188.1
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• 2014

Aluminum is widely used as a material for electrode on silicon based devices. Especially, aluminum films are used as backside and front-side electrodes in silicon quantum dot (QD) solar cells. In this point, the diffusion of aluminum is very important for the enhancement of power conversion efficiency by improvement of contact property. Aluminum was deposited on a Si (100) wafer and a Si QD layer by ion beam sputter system with a DC ion gun. The Si QD layer was fabricated by $1100^{\circ}C$ annealing of the $SiO_2/SiO_1$ multilayer film grown by ion beam sputtering deposition. Cs ion beam with a low energy and a grazing incidence angle was used in SIMS depth profiling analysis to obtain high depth resolution. Diffusion behavior of aluminum in the Al/Si and Al/Si QD interfaces was investigated by secondary ion mass spectrometry (SIMS) as a function of heat treatment temperature. It was found that aluminum is diffused into Si substrate at $450^{\circ}C$. In this presentation, the effect of heat treatment temperature and Si nitride diffusion barrier on the diffusion of Al will be discussed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.384.1-384.1
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• 2016

We reported that amorphous silicon (a-Si) thin film provide sample plate exhibiting a multimodality to measure biomolecules by secondary ion mass spectrometry (SIMS) and laser desorption/ionization mass spectrometry (LDI-MS). Kim et al.1 reported that a-Si thin film were suitable to detect small molecules such as drugs and peptides by SIMS and LDI-MS. Recently, bacterial identification has been required in many fields such as food analysis, veterinary science, ecology, agriculture, and so on.2 Mass spectrometry is emerging for identifying and profiling microbiology samples from its advantageous characters of label-free and shot-time analysis. Five species of bacteria - S. aureus, G. glutamicum, B. kurstaki, B. sphaericus, and B. licheniformis - were sampled for MS analysis without lipid extraction in sample preparation steps. The samples were loaded onto the a-Si thin film with a thickness of 100 nm which did not only considered laser-beam penetration but also surface homogeneity. Mass spectra were recorded in both positive and negative ionization modes for more analytical information. High reproducibility and sensitivity of mass spectra were demonstrated in a mass range up to mass-to-charge ratio(m/z) 1200 by applying the a-Si thin film in mentioned above MS. Principle component analysis (PCA) - a popular statistical analysis widely used in data processing was employed to differentiate between five bacterial species. The PCA results verified that each bacterial species were readily distinguished and differentiated effectively from our MS approach. It shows a new opportunity to rapid bacterial profiling and identification in clinical microbiology. More details will be discussed in the presentation.

• 터널과지하공간
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• 제27권4호
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• pp.230-242
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• 2017

이 연구에서는 국내 토목현장에서 수행된 하향식 탄성파탐사 및 굴절법 탄성파탐사 자료(177개)와 시추조사 시료(1,035개)에 대해 연암과 경암(보통암 포함)으로 분류한 후, 건설표준품셈과 지반조사표준품셈의 탄성파 속도에 의한 암반분류 기준을 비교하였다. 현장에서의 하향식 탄성파탐사 및 굴절법 탄성파탐사에 의한 탄성파 속도는 연암의 경우 1,400~2,900 m/s의 범위로 건설표준품셈 A그룹(1,200~1,900 m/s)과 지반조사표준품셈(1,200~2,500 m/s)의 기준보다 빠르게 나타났으며, 보통암과 경암의 경우 2,300~3,800 m/s의 범위로 기준범위와 유사하게 나타나는 것으로 나타났다. 실내암석시험에서 구해진 연암과 보통암~경암의 탄성파속도 또한 현장 탐사 결과와 유사한 경향을 보이는 것으로 나타났다. 암반 탄성파 속도와 품셈간의 상이점을 품셈이 절대적으로 옳다는 관점에서 본다면, 현장 탄성파 속도의 경우 하부지반의 영향을 받아 속도가 빨라지는 것과 실내암석시험의 경우에는 연암구간에서의 시료선별 시 무결암의 선별에 의한 것으로 여길 수 있다. 반대로 상이점의 원인을 품셈에 오류가 있는 것으로 본다면, 품셈상의 지층경계가 점이적이지 않은 뚜렷한 경계가 인위적으로 설정된 점, 지질 양상이 다른 외국의 기준을 그대로 차용하여 사용한다는 점, 품셈상 지층의 탄성파 속도에 대한 독립된 검증이 이루어지지 않은 점 등의 문제가 있음을 알 수 있다. 이 연구에서는 현장에서의 향후 이러한 검증 연구를 제안하며, 널리 쓰이는 품셈에 의한 지층분류에는 내포된 문제가 있음에 대한 인식이 중요하다.

• 한국입자에어로졸학회지
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• 제6권3호
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• pp.139-145
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• 2010

In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.

• Journal of Radiation Protection and Research
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• 제36권1호
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• pp.44-51
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• 2011

원자력발전소, 의료용 가속기 등 고선량 지역 및 능동형 열중성자 검출기를 사용하기 힘든 환경에서는 방사화 포일 기반 보너구 스펙트로메터를 사용하여 중성자 에너지 스펙트럼 측정을 수행한다. 중성자 방사화 포일을 보너구의 열중성자 검출기로 사용하는 경우, 중성자 방사화 포일의 위치 변동에 따른 보너구 반응도의 변화 및 중성자 방사화 포일의 질량과 반응도 사이의 상관관계 등 특성연구가 선행되어야만 한다. 본 연구에서는 MCNPX 모사계산을 통하여 중성자 방사화 포일 면에 수직입사하는 경우 중성자 방사화 포일의 위치 의존성이 크다는 사실과 중성자 방사화 포일의 질량과 반응도 사이에 선형관계가 없음을 알 수 있었다. 본 연구를 통하여 중성자 방사화 포일 기반 보너구의 반응함수 계산 방법 및 중성자 방사화 포일 위치 및 질량 차이에 따른 반응도 변화를 연구함으로써 중성자 방사화 포일 기반 보너구의 반응함수 결정방법을 확립하였다. 본 연구결과를 바탕으로 보너구 반응함수를 계산하여 추후 중성자 방사화 포일 기반 보너구 스펙트로메트리에 적용할 예정이다.

• 한국소음진동공학회논문집
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• 제21권4호
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• pp.365-373
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• 2011

This paper presents the dynamic response and the vibration characteristics for a rail-track supported by discrete springs and dampers. Recently, automatic conveyer system, rail-track, rack-master system demand the soundproof facilities and vibration suppression measures in order to satisfy the strict environmental standards. The equations of motions of the dynamic characteristics for a vibration suppression rail-track under a traveling mass were derived by Galerkin's mode summation method considering gravity, centrifugal force, Coriolis force, inertia force of the moving mass, transverse inertia of the rail-track. Also, numerical results were calculated by Runge-Kutta integration method. In order to investigate vibration characteristics and dynamic responses, modal testing and measurement of the responses of the rail-track were performed. Through the experiment and numerical simulations, numerical results have a good agreement with experimental ones.

• Bulletin of the Korean Chemical Society
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• 제31권10호
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• pp.2791-2796
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• 2010

In the present study, we constructed a membrane inlet assembly for selective permeation of volatile airborne organic compounds for subsequent analysis by time-of-flight mass spectrometry. The time-dependent diffusion of analytes through a $75\;{\mu}m$ thick polydimethylsiloxane membrane was measured by monitoring the ion signal after a step change in the sample concentration. The results fit well to a non-steady-state permeation equation. The diffusion coefficient, response time, and sensitivity were determined experimentally for a range of polar (halogenated) and nonpolar (aromatic) compounds. We found that the response times for several volatile organic compounds were greatly influenced by the alkyl chain length as well as the size of the substituted halogen atoms. The detection limits for benzene, ethylbenzene, and 2-propanol were 0.2 ppm, 0.1 ppm, and 3.0 ppm by volume, respectively, with a linear dynamic range greater than three orders of magnitude. These results indicate that the membrane inlet/time-of-flight mass spectrometry technique will be useful for a wide range of applications, particularly for in situ environmental monitoring.

• 대한화학회지
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• 제41권10호
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• pp.524-534
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• 1997

고무가황체는 고분자인 천연고무 및 합성고무에 여러 가지 유기첨가제를 배합하여 만든다. 이와 같은 배합고무의 분석은 여러 가지 다른 성질을 갖는 다양한 첨가제들로 인하여 많은 전처리 과정을 거쳐야 하므로 그 분석이 용이하지 않다. 이를 극복하기 위하여 열분해 가스크로마토그래피질량분석법(Pyrolysis Gas Chromatography-Mass Spectrometry)을 이용하여 고무가황체 중의 유기 고무약품들의 직접분석을 시도하였다. 점착제인 쿠마론-인덴수지(coumarone-indene resin $C-90^{TM}$), 접착제인 알킬페놀 레조시놀 포름알데히드 수지, 가류지연제 등의 고무첨가제의 열분해과정 및 열분해체들의 질량스펙트럼들을 확인하였고 이를 통하여 복잡한 구성 성분으로 이루어진 가황고무 중에서 이들 배합제의 직접분석이 가능하였다.

• Preventive Nutrition and Food Science
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• 제3권2호
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• pp.111-118
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• 1998

To develop a simple, rapid and simultaneous analytical method of phenolic compounds using gas chromatography (GC) and gas chromatography/mass spectrophometer (GC/Ms), this experiment was carried out to search the retention times of capillary columns and the characteristics of fragment ions in electron impact mass spectra. Most of trimethylsilyl derivatives and underivatized phenolic compounds were separated very well on three kinds of capillary columns(HP-1), Ultra-2 and HP-35). Quantitiative determination of phenolic compounds was achieved by internal standards (p-hydroxybenzoic acid iopropyl ester, p-hydroxybenzoic acid ethyl ester). Calibration plts were linear in the investigated range, and the limits of detection were about 5 ng at split mode method. When analyzed by three columns, theseparation times were fairly constant on two nonpolar columns, but a few compounds showed slightly different separation order by the itnermediate polar HP-35 column. The important characteristic patterns of TMS derivatives of phenolic compounds on the EI/MS spectrra appeared at the base peak of [M-15]+ ion and presented at high abundance in most TMS derivatives of phenoloc compounds. [M]+, [M-CH3-COO]+, [M-Si(CH3)4]+ and [M-Si(CH3)4 -CH3]+ also observed in mass spectra of these compounds . Although several compounds have the same retention times on GC column, it might be possible to identify these compounds by the different patternsof mass frgement ions. The TMS derivatives, thus , provide additional information for identification of phenolic compounds in biological systems.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.232-232
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• 2012

The doping of semiconducting elements is essential for the development of silicon quantum dot (QD) solar cells. Especially the doping elements should be activated by substitution at the crystalline sites in the crystalline silicon QDs. However, no analysis technique has been developed for the analysis of the activated dopants in silicon QDs in $SiO_2$ matrix. Secondary ion mass spectrometry (SIMS) is a powerful technique for the in-depth analysis of solid materials and the impurities analysis of boron and phosphorus in semiconductor materials. For the study of diffusion behaviour of B and P by SIMS, Si/$SiO_2$ multilayer films doped by B or P were fabricated and annealed at high temperatures for the activated doping of B and P. The distributions of doping elements were analyzed by SIMS. Boron found to be preferentially distributed in Si layer rather than the $SiO_2$ layer. Especially the B in the Si layers was separated to two components of an interfacial component and a central one. The central component was understood as the activated elements. On the other hand, phosphorus did not show any preferred diffusion.