• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.188.1-188.1
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• 2014

Aluminum is widely used as a material for electrode on silicon based devices. Especially, aluminum films are used as backside and front-side electrodes in silicon quantum dot (QD) solar cells. In this point, the diffusion of aluminum is very important for the enhancement of power conversion efficiency by improvement of contact property. Aluminum was deposited on a Si (100) wafer and a Si QD layer by ion beam sputter system with a DC ion gun. The Si QD layer was fabricated by $1100^{\circ}C$ annealing of the $SiO_2/SiO_1$ multilayer film grown by ion beam sputtering deposition. Cs ion beam with a low energy and a grazing incidence angle was used in SIMS depth profiling analysis to obtain high depth resolution. Diffusion behavior of aluminum in the Al/Si and Al/Si QD interfaces was investigated by secondary ion mass spectrometry (SIMS) as a function of heat treatment temperature. It was found that aluminum is diffused into Si substrate at $450^{\circ}C$. In this presentation, the effect of heat treatment temperature and Si nitride diffusion barrier on the diffusion of Al will be discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.384.1-384.1
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• 2016

We reported that amorphous silicon (a-Si) thin film provide sample plate exhibiting a multimodality to measure biomolecules by secondary ion mass spectrometry (SIMS) and laser desorption/ionization mass spectrometry (LDI-MS). Kim et al.1 reported that a-Si thin film were suitable to detect small molecules such as drugs and peptides by SIMS and LDI-MS. Recently, bacterial identification has been required in many fields such as food analysis, veterinary science, ecology, agriculture, and so on.2 Mass spectrometry is emerging for identifying and profiling microbiology samples from its advantageous characters of label-free and shot-time analysis. Five species of bacteria - S. aureus, G. glutamicum, B. kurstaki, B. sphaericus, and B. licheniformis - were sampled for MS analysis without lipid extraction in sample preparation steps. The samples were loaded onto the a-Si thin film with a thickness of 100 nm which did not only considered laser-beam penetration but also surface homogeneity. Mass spectra were recorded in both positive and negative ionization modes for more analytical information. High reproducibility and sensitivity of mass spectra were demonstrated in a mass range up to mass-to-charge ratio(m/z) 1200 by applying the a-Si thin film in mentioned above MS. Principle component analysis (PCA) - a popular statistical analysis widely used in data processing was employed to differentiate between five bacterial species. The PCA results verified that each bacterial species were readily distinguished and differentiated effectively from our MS approach. It shows a new opportunity to rapid bacterial profiling and identification in clinical microbiology. More details will be discussed in the presentation.

• Tunnel and Underground Space
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• v.27 no.4
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• pp.230-242
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• 2017

Seismic velocities measured from in-situ tests (n=177) and through rock core samples (n=1,035) are reviewed in light of construction standards, widely used standards as a first-hand approximation of rock classification solely based on seismic velocities. In-situ down hole tests and refraction survey for soft rocks showed seismic velocities of 1,400~2,900 m/s which is faster than those specified in construction standards. For moderate~ hard rocks, in-situ down hole tests and refraction survey showed 2,300~3,800 m/s which roughly corresponds with the range specified in the construction standards. A similar trend is also observed for seismic velocities measured from rock core samples. The observed differences between construction standards and seismic velocities can be explained in two ways. If construction standards are correct the observed differences may be explained with seismic velocities affected by underlying fast velocities and also possibly with selection of intact cores for velocity measurement. Alternatively, construction standards may have intrinsic problems, namely artificial discrete boundaries between soft rocks and moderate rocks, application of foreign standards without consideration of geologic setting and lack of independent verification steps. Therefore, we suggest a carefully designed verification studies from a test site. We also suggest that care must be exercised when applying construction standards for the interpretation and accessment of rock mass properties.

• Particle and aerosol research
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• v.6 no.3
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• pp.139-145
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• 2010

In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.

• Journal of Radiation Protection and Research
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• v.36 no.1
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• pp.44-51
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• 2011

Activation foil-based Bonner sphere spheres are used to obtain neutron energy spectra of nuclear power plants or accelerator-produced neutrons. The position and the foil mass dependence of response functions should be studied carefully before measurement of Bonner spheres. This study showed that the normal incidence to the foil surface made a large shift of responses while parallel and isotropic incidence made no position dependence. The correlation between foil mass and response was not linear. Therefore, the response functions of activation-foil based Bonner spheres should be calculated for every different foil mass and the direction of Bonner spheres for parallel incidence will be preferred for radioactive neutron source or accelerator target produced neutrons.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.4
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• pp.365-373
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• 2011

This paper presents the dynamic response and the vibration characteristics for a rail-track supported by discrete springs and dampers. Recently, automatic conveyer system, rail-track, rack-master system demand the soundproof facilities and vibration suppression measures in order to satisfy the strict environmental standards. The equations of motions of the dynamic characteristics for a vibration suppression rail-track under a traveling mass were derived by Galerkin's mode summation method considering gravity, centrifugal force, Coriolis force, inertia force of the moving mass, transverse inertia of the rail-track. Also, numerical results were calculated by Runge-Kutta integration method. In order to investigate vibration characteristics and dynamic responses, modal testing and measurement of the responses of the rail-track were performed. Through the experiment and numerical simulations, numerical results have a good agreement with experimental ones.

• Bulletin of the Korean Chemical Society
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• v.31 no.10
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• pp.2791-2796
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• 2010

In the present study, we constructed a membrane inlet assembly for selective permeation of volatile airborne organic compounds for subsequent analysis by time-of-flight mass spectrometry. The time-dependent diffusion of analytes through a $75\;{\mu}m$ thick polydimethylsiloxane membrane was measured by monitoring the ion signal after a step change in the sample concentration. The results fit well to a non-steady-state permeation equation. The diffusion coefficient, response time, and sensitivity were determined experimentally for a range of polar (halogenated) and nonpolar (aromatic) compounds. We found that the response times for several volatile organic compounds were greatly influenced by the alkyl chain length as well as the size of the substituted halogen atoms. The detection limits for benzene, ethylbenzene, and 2-propanol were 0.2 ppm, 0.1 ppm, and 3.0 ppm by volume, respectively, with a linear dynamic range greater than three orders of magnitude. These results indicate that the membrane inlet/time-of-flight mass spectrometry technique will be useful for a wide range of applications, particularly for in situ environmental monitoring.

• Journal of the Korean Chemical Society
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• v.41 no.10
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• pp.524-534
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• 1997

Analysis of additives in cured rubber is often a difficult task for analytical chemists because of a wide variety of complex components. Conventional analyses of additives and rubbers have been done in multistep, off-line processes with large sample size and extensive sample preparations. The coumarone-indene resin, resorcinol-formaldehyde resin, and prevulcanization inhibitor have been characterized by their pyrolysis pathways and mass spectra of characteristic pyrolyzates. Pyrolysis Gas Chromatography/Mass Spectrometry (Py-GC/MS) was used in the identification of additives without any sample pretreatment. This result shows that several organic additives in cured rubber can be directly analyzed.

• Preventive Nutrition and Food Science
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• v.3 no.2
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• pp.111-118
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• 1998

To develop a simple, rapid and simultaneous analytical method of phenolic compounds using gas chromatography (GC) and gas chromatography/mass spectrophometer (GC/Ms), this experiment was carried out to search the retention times of capillary columns and the characteristics of fragment ions in electron impact mass spectra. Most of trimethylsilyl derivatives and underivatized phenolic compounds were separated very well on three kinds of capillary columns(HP-1), Ultra-2 and HP-35). Quantitiative determination of phenolic compounds was achieved by internal standards (p-hydroxybenzoic acid iopropyl ester, p-hydroxybenzoic acid ethyl ester). Calibration plts were linear in the investigated range, and the limits of detection were about 5 ng at split mode method. When analyzed by three columns, theseparation times were fairly constant on two nonpolar columns, but a few compounds showed slightly different separation order by the itnermediate polar HP-35 column. The important characteristic patterns of TMS derivatives of phenolic compounds on the EI/MS spectrra appeared at the base peak of [M-15]+ ion and presented at high abundance in most TMS derivatives of phenoloc compounds. [M]+, [M-CH3-COO]+, [M-Si(CH3)4]+ and [M-Si(CH3)4 -CH3]+ also observed in mass spectra of these compounds . Although several compounds have the same retention times on GC column, it might be possible to identify these compounds by the different patternsof mass frgement ions. The TMS derivatives, thus , provide additional information for identification of phenolic compounds in biological systems.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.232-232
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• 2012

The doping of semiconducting elements is essential for the development of silicon quantum dot (QD) solar cells. Especially the doping elements should be activated by substitution at the crystalline sites in the crystalline silicon QDs. However, no analysis technique has been developed for the analysis of the activated dopants in silicon QDs in $SiO_2$ matrix. Secondary ion mass spectrometry (SIMS) is a powerful technique for the in-depth analysis of solid materials and the impurities analysis of boron and phosphorus in semiconductor materials. For the study of diffusion behaviour of B and P by SIMS, Si/$SiO_2$ multilayer films doped by B or P were fabricated and annealed at high temperatures for the activated doping of B and P. The distributions of doping elements were analyzed by SIMS. Boron found to be preferentially distributed in Si layer rather than the $SiO_2$ layer. Especially the B in the Si layers was separated to two components of an interfacial component and a central one. The central component was understood as the activated elements. On the other hand, phosphorus did not show any preferred diffusion.