Development of Finite Element Model for Dynamic Characteristics of MEMS Piezo Actuator in Consideration of Semiconductor Process (반도체 공정을 고려한 유한요소해석에 의한 MEMS 압전 작동기의 동특성 해석)
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- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 2013.04a
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- pp.454-459
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- 2013