• 제목/요약/키워드: Magnesium thin films

검색결과 45건 처리시간 0.027초

Vapor Phase Epitaxy of Magnesium Oxide on Si(001) Using a Single Precursor

  • Lee, Sun-Sook;Lee, Sung-Yong;Kim, Chang G.;Lee, Sang-Heon;Nah, Eun-Ju;Kim, Yunsoo
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
    • /
    • pp.122-122
    • /
    • 2000
  • Magnesium oxide is thermodynamically very stable, has a low dielectric constant and a low refractive index, and has been widely used as substrate for growing various thin film materials, particulary oxides of the perovskite structure. There has been a considerable interest in integrating the physical properties of these oxides with semiconductor materials such as GaAs and Si. In this regard, it is considered very important to be able to grow MgO buffer layers epitaxially on the semiconductors. Various oxide films can then be grown on such buffer layers eliminating the need for using MgO single crystal substrates. Vapor phase epitaxy of magnesium oxide has been accomplished on Si(001) substrates in a high vacuum chamber using the single precursor methylmagnesium tert-butoxide in the temperature range 750-80$0^{\circ}C$. For the epitaxy of the MgO films, SiC buffer layers had to be grown on Si(001). The films were characterized by reflection high energy electron diffraction (RHEED) in situ in the growth chamber, and x-ray diffraction (XRD), x-ray pole figure analysis, scanning electron microscopy (SEM), and x-ray photoelectron spectroscopy (XPS) after the growth.

  • PDF

교류형 플라즈마 디스플레이용 MgO 박막의 조성변화에 따른 방전전압특성의 영향 (Stoichiometry dependency of the firing and sustain voltage properties of MgO thin films for AC plasma display panels)

  • 손충용;조진희;김락환;김정열;박종완
    • 한국진공학회지
    • /
    • 제9권1호
    • /
    • pp.24-29
    • /
    • 2000
  • MgO thin films were deposited on soda lime glass substrates by rf magnetron sputtering using a MgO target at various oxygen flow ratios in order to probe the relationship between MgO film properties and discharge characteristics. MgO films have a tendency to form microstructures with a preferred growth orientation of (200) with increasing oxygen flo ration up to 0.1 $O_2$/(Ar+$O_2$). MgO film obtained at 0.1[$O_2$/(Ar+$O_2$)] was found to be fully stoichiometric. The stoichiometric MgO film was observed to have relatively very clean surface and grains of large size and contain almost no hydroxyl group. The AC PDP with fully stoichiometric MgO film showed lower firing and sustain voltages than those with magnesium-rich or oxygen-rich MgO films, being largely attributed to the larger grain size and the minimized hydroxyl group.

  • PDF

XAS Studies of Ion Irradaited MgO Thin Films

  • Suk, Jae-Kwon;Gautam, Sanjeev;Song, Jin-Ho;Lee, Jae-Yong;Kim, Jae-Yeoul;Kim, Joon-Kon;Song, Jong-Han;Chae, Keun-Hwa
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
    • /
    • pp.312-312
    • /
    • 2012
  • Magnesium oxide has become focus for research activities due to its use in magnetic tunnel junctions and for understanding of do ferromagnetism. Theoretical investigations on such type of system indicate that the presence of defects greater than a threshold value is responsible for the magnetic behaviour. It has also been shown experimentally that by decreasing the film thickness and size of nanoparticles, enhancement/increase in magnetization can be achieved. Apart from the change in dimension, swift heavy ions (SHI) are well known for creating defects and modifying the properties of the materials. In the present work, we have studied the irradiation induced effects in magnesium oxide thin film deposited on quartz substrate via X-ray absorption spectroscopy (XAS). Magnesium oxide thin films of thickness 50nm were deposited on quartz substrate by using e-beam evaporation method. These films were irradiated by 200 MeV Ag15+ ion beam at fluence of $1{\times}10^{11}$, $5{\times}10^{11}$, $1{\times}10^{12}$, $3{\times}10^{12}$ and $5{\times}10^{12}ions/cm^2$ at Nuclear Science Centre, IUAC, New Delhi (India). The grain size was observed (as studied by AFM) to be decreased from 37 nm (pristine film) to 23 nm ($1{\times}10^{12}ions/cm^2$) and thereafter it increases upto a fluence of $5{\times}10^{12}ions/cm^2$. The electronic structure of the system has been investigated by X-ray absorption spectroscopy (XAS) measurements performed at the high energy spherical grating monochromator 20A1 XAS (HSGM) beamline in the National Synchrotron Radiation Research Center (NSRRC), Taiwan. Oxides of light elements like MgO/ZnO possess many unique physical properties with potentials for novel application in various fields. These irradiated thin films are also studied with different polarization (left and right circularly polarized) of incident x-ray beam at 05B3 EPU- Soft x-ray scattering beamline of NSRRC. The detailed analysis of observed results in the wake of existing theories is discussed.

  • PDF

RF 마그네트론 스퍼터링법을 이용한 MgO 박막의 특성에 관한 연구 (A Study on the Characteristics of MgO Thin Film Prepared by RF Magnetron Sputtering Method)

  • 정연우;윤차근;황기웅
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1996년도 추계학술대회 논문집 학회본부
    • /
    • pp.206-208
    • /
    • 1996
  • Thin films of magnesium oxide(MgO) were deposited on glass substrates by RF magnetron sputtering method. The characteristics of MgO thin films were analyzed as a function of various deposition conditions such as substrate temperature, substrate self-bias, input power and pressure. As the substrate temperature and bias voltage were increased, the grain size of MgO thin film increased. XRD peaks of (111) and (222) direction became dominant, as the substrate bias voltage increases and temperature decreases.

  • PDF

Plasma-PVD법에 의해 제작한 Zn-Mg합금 박막의 특성 분석 (Properties Analysis of Zn-Mg Alloy Thin Films Prepared by Plasma Enhanced PVD Method)

  • 이경희;배일용;김여중;문경만;이명훈
    • 한국마린엔지니어링학회:학술대회논문집
    • /
    • 한국마린엔지니어링학회 2005년도 후기학술대회논문집
    • /
    • pp.194-195
    • /
    • 2005
  • (100-x)Zn xMg alloy films are prepared onto cold-rolled steel substrates; where x ranged from 0 to about 38 atomic %. The alloy films show microcrystalline and grain structures respectively, according to preparation conditions such as composition ratio of zinc and magnesium or gas pressures etc.. And X-ray diffraction analysis indicates not only the presence of Zn-Mg thin films with forced solid solution but also the one of $MgZn_2$ alloy films partly. In addition the influence of Mg/Zn composition ratio and morphology of the Zn-Mg alloy films on corrosion behavior is evaluated by electro-chemical anodic polarization tests in deaerated 3% NaCl solution. From this experimental results, all the prepared Zn-Mg alloy films showed obviously good corrosion resistance to compare with 99.99% Zn and 99.99% Mg Ingots for evaporation metal. It is thought that the Zn-Mg films with effective forced solid solution prepared by plasma enhanced PVD method, produces smaller and denser grain structure so that may improve the formation of homogeneous passive layer in corrosion environment.

  • PDF

건습환경중 순 Mg박막의 EIS부식 모니터링 특성 관찰 (Properties Investigation of Corrosion Monitoring for Pure Mg Thin Films under Wet-Dry Cyclic Conditions by Using Electrochemical Impedance Spectroscopy Method)

  • 배일용;이경희;김기준;문경만;이명훈
    • 한국마린엔지니어링학회:학술대회논문집
    • /
    • 한국마린엔지니어링학회 2005년도 후기학술대회논문집
    • /
    • pp.192-193
    • /
    • 2005
  • Magnesium thin films were prepared on cold-rolled steel substrates by RF(Radio Frequency) magnetron sputtering technique.$^{1)}$ The crystal orientation and monitoring of the deposited films were investigated by using XRD(X-ray Diffraction) and EIS(Electrochemical Impedance Spectroscopy), respectively. The corrosion rates of Mg thin films deposited with different argon gas pressure and substrate bias voltage were monitored by AC impedance method under a cyclic wet-dry condition, which was conducted by exposure to alternate conditions of 1h immersion in 3%NaCl solution and 5h drying at 60% RH and 25$^{\circ}C$. The result of corrosion rate of Mg thin films deposited at various Ar gas pressures and substrate bias voltage under wet-dry cyclic exposure in chloride-containing solutions was showed the following conclusions. At the region I during the onset of the wet cycle, corrosion rate showed relatively low value. The increase in the Corrosion rate of region II is due to the increase in the chloride concentration. Corrosion rate of region III during the onset of the cycle zero and salt crystals remain on the metal surface.$^{2)}$

  • PDF

과망간산칼륨 용액에서 화학적으로 형성된 AZ31B 마그네슘 합금의 피막 특성평가 (Characteristics of Films Formed on AZ31B Magnesium Alloy by Chemical Oxidation Process in Potassium Permanganate Solution)

  • 김민정;김형찬;윤석영;정우창
    • 한국표면공학회지
    • /
    • 제44권2호
    • /
    • pp.44-49
    • /
    • 2011
  • The films formed on AZ31B magnesium alloy were prepared from alkaline solution composed of potassium permanganate and sodium hydroxide. The immersion tests were carried out at the different concentration of sodium hydroxide and pre-treatment method in 5 minute. The morphology and the phase composition of the film were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The corrosion behavior of the film in 5.0% NaCl solution was evaluated using potentiodyanmic polarization. Open circuit potential in developing film was examined with time. The thin and transparent film was mainly composed of MgO and $Mg(OH)_2$. The film with the best corrosion resistance was obtained at $70^{\circ}C$ bath temperature, 1.6 M concentration of sodium hydroxide and chemical pre-treatment.

Electrolyte Temperature Dependence on the Properties of Plasma Anodized Oxide Films Formed on AZ91D Magnesium Alloy

  • Lee, Sung-Hyung;Yashiro, Hitoshi;Kure-Chu, Song-Zhu
    • 한국재료학회지
    • /
    • 제29권5호
    • /
    • pp.288-296
    • /
    • 2019
  • The passivation of AZ91D Mg alloys through plasma anodization depends on several process parameters, such as power mode and electrolyte composition. In this work, we study the dependence of the thickness, composition, pore formation, surface roughness, and corrosion resistance of formed films on the electrolyte temperature at which anodization is performed. The higher the electrolyte temperature, the lower is the surface roughness, the smaller is the oxide thickness, and the better is the corrosion resistance. More specifically, as the electrolyte temperature increases from 10 to $50^{\circ}C$, the surface roughness (Ra) decreases from 0.7 to $0.15{\mu}m$ and the corrosion resistance increases from 3.5 to 9 in terms of rating number in a salt spray test. The temperature increase from 10 to $50^{\circ}C$ also causes an increase in magnesium content in the film from 25 to 63 wt% and a decrease in oxygen from 66 to 21 wt%, indicating dehydration of the film.

Fabrication and Characterization of Tunable Bandpass Filter using BST Thin Films

  • Kim, Il-Doo;Kim, Duk-Su;Park, Kyu-Sung;Kim, Ho-Gi
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
    • /
    • pp.581-584
    • /
    • 2002
  • In this work, a CPW resonator was designed and fabricated to investigate the basic microwave properties, such as effective dielectric constant, of BST thin films. Their properties were used as basic data to simulate and design CPW tunable bandpass filter. We also report on gold/$Ba_{0.5}Sr_{0.5}TiO_3$(BST) ferroelectric thin film C-band tunable bandpass filters(BPFs) designed and fabricated on magnesium oxide substrates using CPW structure. The 2 pole filter was designed for a center frequency of 5.88 GHz with a bandwidth of 9 %. The BST based CPW filter offers a high sensitivity parameter as well as a low loss parameter. The tuning range for the bandpass filter with CPW structure was determined to be 170 MHz.

  • PDF