• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.599-603
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• 2003

This paper present an error compensation system and On-Machine Measurement(OMM) system for improving the machining accuracy of ultra-precision lathe. The Fast-Tool-Servo(FTS) driven by a piezoelectric actuator is applied for error compensation system. The controller is implemented on the 32bit DSP for feedback control of piezoelectric actuator. The control system is designed to compensates three kinds of machining errors such as the straightness error of X-axis slide, the thermal growth error of the spindle. and the squareness between spindle and X-axis slide. OMM is preposed to measure the finished profile of workpiece on the machine-tool using capacitive sensor with highly accurate ruby tip probe guided by air bearing. The data acquisition system is linked to the CNC controller to get the position of each axis in real-time. Through the experiments, it is founded that the thermal growth of spindle and tile squareness error between spindle and X-axis slide influenced to machining error more than straightness error of X-axis slide in small travel length. These errors were simulated as a sinusoidal signal which has very low frequency and the FTS could compensate the signal less than 30 m. The implemented OMM system has been tested by measuring flat surface of 50 mm diameter and shows measurement error less than 400 mm

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.41-42
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• 2010

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.3-8
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• 2007

A machining system that generates accurate relative motions between the tool and workpiece is required to realize ultra precise machining or measurements. Accuracy improvements for each element of the machine are also required. This paper proposes a machining system that uses a compensation device for the six-degree-of-freedom (6-DOF) motion error between the tool and workpiece. The compensation device eliminates elastic and thermal errors of the joints and links due to temperature fluctuations and external forces. A hexapod parallel kinematics mechanism installed between the tool spindle and surface plate is passively actuated by a conventional machine. Then the parallel mechanism measures the 6-DOF motions. We describe the conception and fundamentals of the system and test a passively extensible strut with a compensation device for the joint errors.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.10a
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• pp.134-139
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• 1998

The objective of this study is to estimate and to compensate for the volumetric error of a machine tool. In this paper, the volumetric error is defined and error synthesis model is presented. Then, the volumetric error of workpiece is compared through the virtual machining and a new tool-path is generated to compensate for the error in the post-processor of CAM system using the error synthesis model. By this method, the error is compensated without modification or replacement of a machine tool being in use.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.961-964
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• 1995

For geometric accuracy in the net shape machining, the problem of tool deflection should be resolved in some fashion. In particular, this is crucial in finish cut operation where slim tools are used. The purpose of this paper is to verify the validity and effectiveness of the prediction model of the machined surface. Experimental results are presented for the cut of steel material with HSS endmill of diameter 6mm on machining center. The results shows that 1) the machining error due totool deflection is serious even in the low cutting load, 2) by using the mechanistic simulation model with experimental coefficients, the machining error was predicted with maximum prediction error of 10% which was significantly reduced to the desired level by the path modification method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.6 no.4
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• pp.71-75
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• 2007

Geometrical error of ultra-precision machining due to spherical tool alignment error is analyzed. Deviation of spherical edge, ranged several ten micrometers, generates vertical and horizontal error of tool path and affects profile accuracy of machined surface. Simulation of machined error shows effect of tool alignment error and enables to estimate alignment error. This work provides technical insights into the minimizing of geometrical error of ultra-precision machining.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.4 no.3
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• pp.39-47
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• 1995

This paper suggests generalize mathematica mode for the benefit of volumetric error analysis of a multi-axis machine tool machining a sculptured surfaces. The volumetric error, in this paper, is defined as a three dimensional error at the cutting point, which is caused by the geometric errors and the kinematic errors of each axis and alignment errors of the cutting tool. The actual cutting position is analyzed based on the form shaping model including a geometric error of the moving carriage, where a form shaping model is derived from the homogeneous transformation matrix. Then the volumetric error is obtained by calculating the position difference between the actual cutting position and the ideal one calculated from a Nonuniform Rational B-Spline named as NURES. The simulation study shows the effectiveness for predicting the behavior of machining error and for the method of error compensation.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.56-64
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• 2002

Machine tools are engineered to give high dimensional accuracy in machining operation. However, errors due to thermal effects degrade dimensional accuracy of machine tools considerably, and many machine tools are equipped with thermal error compensation function. In general, thermal errors can be generated in the angular directions as well as linear directions. Among them, thermal errors in the angular directions contribute a large amount of error components in the presence of offset distance as in the case of Abbe error. Because most of thermal error compensation function is based on a good correlation between temperature change and thermal deformation, angular thermal deformation is often to be the most difficult hurdle for enhancing compensation accuracy. In this regard, this paper investigates the effect of thermal bending to total thermal error and gives how to deal with thermally induced bending effects in thermal error compensation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.527-532
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• 1993

MascMC system is one of the MMC system module which performs measuring and checking of machined workpieces on the machine tools. Accuracy of the MascMC was compensated for developing a reliable measuring system by measurement error calibration. Reference gauges, ring gauges, block gauges,squares, spheres and cylindrical squares, were used for error identification and compensation. .+-. 10 .mu. m accuracy with 95% confidence interval was confirmed on the vertical and the horizontal machining center through the large number of experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1186-1189
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• 2005

Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.