• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.473-476
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• 1997

Focused Ar ion laser beam can be utilized to fabricate microstructures on silicon substrate as well as other materials(e.g. such as ceramic). The laser using in this study is an argon ion laser with maximum power of 6 W, wavelength of 514 nm. This laser beam is focused by objectives with a high numerical aperture, a long working distance. We have achieved line width about 1 ${\mu}{\textrm}{m}$ with high scan speed. The resolution for Si machining is determined by the selectivity of the chemical reaction rather than the laser spot size. In this study, we have obtained the maximum etch rate of 434.7 ${\mu}{\textrm}{m}$/sec with high aspect ratio. The characteristics of etched groove was investigated by scanning electron microscope(SEM) and auger electron spectroscopy(AES). It is assumed that the technique using arson ion laser is applicab1e to fabricate microstructures.

• 대한공업교육학회지
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• 제31권2호
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• pp.350-363
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• 2006

최근 마이크로 엔드밀을 이용한 가공은 소형구조물이나 소형기계의 부품과 금형산업에서 양호한 표면 거칠기와 가공시간의 단축을 위해 고정도의 기술을 요구하고 있다. 마이크로 엔드밀을 이용한 가공에 있어서 가공조건은 절삭면의 표면거칠기에 커다란 영향을 미치게 된다. 따라서 본 연구에서는 마이크로 엔드밀을 이용하여 스테인리스 강(STS 304)의 표면을 가공하였고, 실험계획법에 의해 최적의 표면거칠기를 얻기 위한 가공조건에 대해 분산분석하였다. 본 연구를 통하여 마이크로 엔드밀에 의한 가공에서 가공조건은 절삭깊이, 스핀들의 회전수, 이송속도의 순서로 표면거칠기에 영향을 미치는 것을 알았다.

• 한국정보통신학회논문지
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• 제18권2호
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• pp.276-281
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• 2014

본 논문은 산업용 로봇을 위한 힘 피드백 제어는 사람의 감각을 기반으로 한 작업을 대체하여 구현하기에 적합한 연마 시스템을 제안하였다. 기존 연마작업의 표면 연마, 비드처리, 기계 가공 디버링 등의 공정은 그 복잡성에서 자동화가 가장 곤란하다고 인식되어 주로 인력에 의존 해왔다. 본 연구에서는 연마 공구를 파지시킨 힘 제어 로봇에 의한 자동 연마 시스템의 구축과 힘 센서로부터 신호 피드백 제어 방식의 특성 파악과 연마 공정에 적응성을 검증했다. 또한 실용화를 목적을 위한 선박의 바닥 및 측면 연마에의 응용을 진행했다. 따라서 자체 제작한 연마로봇을 활용 한 표면 연마작업을 통하여 실험결과를 검증하였다.

• 소성∙가공
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• 제12권7호
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• pp.640-646
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• 2003

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• 한국기계가공학회지
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• 제18권11호
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• pp.109-114
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• 2019

Hydraulic pumps are widely used in fields such as machinery manufacturing, engineering and construction. Although the research on hydraulic engineering is mature, it is still necessary to examine various performance aspects in detail for specific applications. This paper will focus on the hydraulic pump used in special construction machinery that needs high temperature and high pressure resistance. It will analyze the theoretical design, structure and thermal characteristics of the pump system using the Fundamentals of Engineering (FE) method, and will measure the key tolerance parameters of the hydraulic pump to ensure the accuracy of the machining. Through this research, a good design method for the linear reciprocating type of hydraulic pump can be summarized.

• 열처리공학회지
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• 제32권4호
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• pp.155-160
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• 2019

Diamond Like Carbon (DLC) is a metastable form of amorphous carbon that have superior material properties such as high mechanical hardness, chemical inertness, abrasion resistance, and biocompatibility. Furthermore, its material properties can be tuned by additional doping such as nitrogen or boron. However, either pure DLC or doped DLC show poor adhesion property that makes it difficult to apply contact processing technique. Therefore we propose ultrafast laser micromachining which is non-contact precision process without mechanical degradation. In this study, we developed precision machining process of DLC thin film using an ultrafast laser by investigating the process window in terms of laser fluence and laser wavelength. We have also demonstrated various patterns on the film without generating any microcracks and debris.

• 한국기계가공학회지
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• 제20권6호
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• pp.10-16
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• 2021

Drilling is a crucial process that takes up a significant amount of weight during machining operations. In addition, drill tip-type tools and related operations have been developed for manufacturing industries to achieve economic efficiency. In this study, SM45C carbon steel, widely used for machine structures, was utilized as the working material after quenching and tempering. Insert-tip types of carbide tools, such as TiN and TiAlN, were used as tool materials. Drilling conditions such as the spindle revolution, feed rate, step of cut, and tool diameter were used to measure roughness, roundness, and straightness using the orthogonal array table statistical method. The surface roughness, roundness, and straightness characteristics based on the conditions were analyzed using ANOVA. The results showed that the spindle speed and feed rate were the main factors influencing carbide insert-tip drilling under the same conditions as the experimental conditions.

• 한국주조공학회지
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• 제42권3호
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• pp.191-197
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• 2022

This study aims to improve the machinability of gray cast irons in high speed cutting by using nonmetallic inclusions. In this research, small quantities of AL and Mg were added to conventional gray cast irons without influencing their mechanical characteristics and castability to investigate the effects of these nonmetallic inclusions in the gray cast irons on tool wear in high speed cutting. During the high speed turning of gray cast iron containing Al and Mg using a cermet tool, protective layers consisting of Al, Mg, Si, Mn, S and O were detected on the flank face and rake face of the tool, and flank and crater wear were significantly reduced compared to the turning of conventional gray cast iron and gray cast iron added with Al. The effect of inclusions on tool wear increased with increasing cutting speed, and flank and crater wear was the smallest at the cutting speed of 700m/min. Moreover, in face milling, the addition of Al and Mg drastically decreased the wear rate, and wear hardly progressed even in prolonged cutting length after initial wear. The amount of adhesion on tool faces increased as the cutting speed increased. This increase in cutting speed resulted in the formation of a thick protective layer and the reduction of tool wear. Furthermore, the addition of small amounts of Al and Mg prevented thermal cracks in the face milling of gray cast irons.

• 한국정밀공학회지
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• 제13권12호
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• pp.151-157
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• 1996

The tool condition monitoring is one of the most important aspects to improve productivity and quality of workpiece. In this study, the wear of ceramic tool (A1$_{2}$0$_{3}$-TiC Series) cutting the hardened die material(SKD11) was investigated. Flank wear was more dominant than crater wear. Therefore the modeling of cutting force related to flank wear has been performed. The cutting force model was construct- ed by an assumption that the stress distribution on the tool face is affected by tool wear. The relationship between characteristics as cutting force and tool wear can be suggested by machining parameters depending on cutting conditions. Experiments were performed under the various cutting conditions to ensure the validity of force models. The theoretical predictions on the flank wear are approximately in good agreement with experimental results.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.770-779
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• 2004

This paper describes the micro cutting of wear resistant tungsten carbides using PCD (Poly-Crystalline Diamond) cutting tools in performance with SEM (Scanning Electron Microscope) direct observation method. Turning experiments were also carried out on this alloy (V50) using a PCD cutting tool. One of the purposes of this study is to describe clearly the cutting mechanism of tungsten carbides and the behavior of WC particles in the deformation zone in orthogonal micro cutting. Other purposes are to achieve a systematic understanding of machining characteristics and the effects of machining parameters on cutting force, machined surface and tool wear rates by the outer turning of this alloy carried out using the PCD cutting tool during these various cutting conditions. A summary of the results are as follows: (1) From the SEM direct observation in cutting the tungsten carbide, WC particles are broken and come into contact with the tool edge directly. This causes tool wear in which portions scrape the tool in a strong manner. (2) There are two chip formation types. One is where the shear angle is comparatively small and the crack of the shear plane becomes wide. The other is a type where the shear angle is above 45 degrees and the crack of the shear plane does not widen. These differences are caused by the stress condition which gives rise to the friction at the shear plane. (3) The thrust cutting forces tend to increase more rapidly than the principal forces, as the depth of cut and the cutting speed are increased preferably in the orthogonal micro cutting. (4) The tool wear on the flank face was larger than that on the rake face in the orthogonal micro cutting. (5) Three components of cutting force in the conventional turning experiments were different in balance from ordinary cutting such as the cutting of steel or cast iron. Those expressed a large value of thrust force, principal force, and feed force. (6) From the viewpoint of high efficient cutting found within this research, a proper cutting speed was 15 m/min and a proper feed rate was 0.1 mm/rev. In this case, it was found that the tool life of a PCD tool was limited to a distance of approximately 230 m. (7) When the depth of cut was 0.1 mm, there was no influence of the feed rate on the feed force. The feed force tended to decrease, as the cutting distance was long, because the tool was worn and the tool edge retreated. (8) The main tool wear of a PCD tool in this research was due to the flank wear within the maximum value of $V_{max}$ being about 260 $\mu\textrm{m}$.