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http://dx.doi.org/10.12656/jksht.2019.32.4.155

A Study on the Characteristics of Laser Processing in the DLC Thin Film according to Boron Doped Content  

Son, Ye-Jin (Department of Nano Fusion Technology, Pusan National University)
Choi, Ji-yeon (Department of Laser and Electron Beam Application, Korea Institute of Machinery and Materials (KIMM))
Kim, Tae-Gyu (Department of Nanomechatronics Engineering, Pusan National University)
Publication Information
Journal of the Korean Society for Heat Treatment / v.32, no.4, 2019 , pp. 155-160 More about this Journal
Abstract
Diamond Like Carbon (DLC) is a metastable form of amorphous carbon that have superior material properties such as high mechanical hardness, chemical inertness, abrasion resistance, and biocompatibility. Furthermore, its material properties can be tuned by additional doping such as nitrogen or boron. However, either pure DLC or doped DLC show poor adhesion property that makes it difficult to apply contact processing technique. Therefore we propose ultrafast laser micromachining which is non-contact precision process without mechanical degradation. In this study, we developed precision machining process of DLC thin film using an ultrafast laser by investigating the process window in terms of laser fluence and laser wavelength. We have also demonstrated various patterns on the film without generating any microcracks and debris.
Keywords
Boron Doped DLC(B-DLC); Ultrafast laser micromachining;
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