• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.2
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• pp.303-306
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• 2005

High aspect ration via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via hole, this sophisticated and important process still hold several problems, such as etching stop, loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.5
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• pp.397-401
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• 2008

Most of the topic in PCB industry was about increasing the volume of product for the development of electronics in numerous industrial application area. However, it has been emerged that yield improvement quality manufacturing via detecting any suspicious process in order to minimize the scrapped product and material waste. In addition, recently, restriction of hazardous substances (RoHS) claims that electronic manufacturing environment should reduce the harmful chemicals usage, thus the importance of monitoring copper etchant and detecting any mis-processing is crucial for electronics manufacturing. In this paper, we have developed real-time chemical monitoring system using RGB sensor, which is simpler but more accurate method than commercially utilized oxidation reduction potential (ORP) technique. The developed Cu etchant monitoring system can further be utilized for copper interconnect process in future nano-semiconductor process.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2001.05a
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• pp.96-99
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• 2001

• Journal of Korean Society of Transportation
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• v.4 no.1
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• pp.3-11
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• 1986

One important element of a systematic approach to the management and control of the flow of people over an urban street network is the monitoring and evaluation of system performance. The nature of TSM strategies that, in part, differentiates them from traditional long-range transportation improvement alternatives is that they are less costly, are more quickly implemented and modified, and are often oriented toward sub-area problems which must be addressed at a more microscopic level of analysis. These factors suggest that pre-implementation evaluations of alternative TSM actions will often have to rely on quick-turn around, manual methods of analysis to guide the choice of which management action should be implemented. This paper was prepared to focus on the definition and importance of TSM, specifically associated with monitoring and evaluating traffic performance in the context of TSM startegies. A simple case study of reversible lane technique was presented. The purposes of the case study is to illustrate the methodology of evaluating TSM strategies and demonstrate to identify the benefit from the reversible lane technique, which may otherwise be overlooked in real world. Applying the reversible lane technique to Sam-Il elevate highway, it was found to be a very promising low cost alternative to reduce total travel time(or delay) and fuel consumption.

• Nuclear Engineering and Technology
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• v.52 no.4
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• pp.776-783
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• 2020

As the refueling of a sodium-cooled fast reactor is conducted by rotating part of the reactor head without opening it, the monitoring of existing obstacles that can disturb the rotation of the reactor head is one of the most important issues. This paper deals with the ultrasonic ranging technique that directly monitors the existence of possible obstacles located in a lateral gap between the upper internal structure and the reactor core in a prototype generation IV sodium-cooled fast reactor (PGSFR). A 10 m long plate-type ultrasonic waveguide sensor, whose feasibility has been successfully demonstrated through preliminary tests, was employed for the ultrasonic ranging technique. The design of the sensor's wave radiating section was modified to improve the radiation performance, and the radiated field was investigated through beam profile measurements. A test facility simulating the lower part of the upper internal structure and the upper part of the reactor core with the same shapes and sizes as those in the PGSFR was newly constructed. Several under-water performance tests were then carried out at room temperature to investigate the applicability of the developed ranging technique using the plate-type ultrasonic waveguide sensor with the actual geometry of the PGSFR's internal structures.

• Transactions on Electrical and Electronic Materials
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• v.13 no.2
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• pp.78-84
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• 2012

An in-situ optical monitoring method for real-time process monitoring of electrochemical copper deposition (CED) is presented. Process variables to be controlled in achieving desired process results are numerous in the CED process, and the importance of the chemical bath conditions cannot be overemphasized for a successful process. Conventional monitoring of the chemical solution for CED relies on the pH value of the solution, electrical voltage level for the reduction of metal cations, and gravity measurement by immersing sensors into a plating bath. We propose a nonintrusive optical monitoring technique using three types of optical sensors such as chromatic sensors and UV/VIS spectroscopy sensors as potential candidates as a feasible optical monitoring method. By monitoring the color of the plating solution in the bath, we revealed that optically acquired information is strongly related to the thickness of the deposited copper on the wafers, and that the chromatic information is inversely proportional to the ratio of $Cu$ (111) and {$Cu$ (111)+$Cu$ (200)}, which can used to measure the quality of the chemical solution for electrochemical copper deposition in advanced interconnection technology.

• Structural Monitoring and Maintenance
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• v.3 no.1
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• pp.33-49
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• 2016

Structural Health Monitoring (SHM) has been attracting numerous research efforts around the world because it targets at monitoring structural conditions and performance to prevent catastrophic failure, and to provide quantitative data for engineers and infrastructure owners to design a reliable and economical asset management strategy. In the past decade, with supports from Australian Research Council (ARC), Cooperative Research Center for Infrastructure and Engineering Asset Management (CIEAM), CSIRO and industry partners, intensive research works have been conducted in the School of Civil, Environmental and Mining Engineering, University of Western Australia and Centre for Infrastructural Monitoring and Protection, Curtin University on various techniques of SHM. The researches include the development of hardware, software and various algorithms, such as various signal processing techniques for operational modal analysis, modal analysis toolbox, non-model based methods for assessing the shear connection in composite bridges and identifying the free spanning and supports conditions of pipelines, vibration based structural damage identification and model updating approaches considering uncertainty and noise effects, structural identification under moving loads, guided wave propagation technique for detecting debonding damage, and relative displacement sensors for SHM in composite and steel truss bridges. This paper aims at summarizing and reviewing the recent research advances on SHM of civil infrastructure in Western Australia.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2005.06a
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• pp.777-782
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• 2005

The importance of emergency diesel generator(EDG) has confirmed in the safety evaluation of PSA and the study on aging of EDG has been progressed actively as a part of the project of nuclear plant aging research in the U.S.A. As the result, the concept of performance evaluation is being transferred from statistical analysis of test results to performance monitoring and trending analysis for monitoring of aging and reliability. Recently, the study related aging characteristic and reliability for EDGS has begun in Korea. Consequently, the efficient performance monitoring based systematic and integrated monitoring and failure diagnostic technology is necessary. In the research, the knowledge basis of monitoring parameters for EDGS is constructed, and the prototype monitoring and diagnosis system applicable to Pielstick EDG is developed.

• Journal of Radiation Protection and Research
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• v.41 no.4
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• pp.333-338
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• 2016

Background: In case of radiation emergencies, internal exposure monitoring for the members of public will be required to confirm internal contamination of each individual. In-vivo monitoring technique using portable gamma spectrometer can be easily applied for internal exposure monitoring in the vicinity of the on-site area. Materials and Methods: In this study, minimum detectable doses (MDDs) for $^{134}Cs$, $^{137}Cs$, and $^{131}I$ were calculated adjusting minimum detectable activities (MDAs) from 50 to 1,000 Bq to find out the optimal in-vivo counting condition. DCAL software was used to derive retention fraction of Cs and I isotopes in the whole body and thyroid, respectively. A minimum detect-able level was determined to set committed effective dose of 0.1 mSv for emergency response. Results and Discussion: We found that MDDs at each MDA increased along with the elapsed time. 1,000 Bq for $^{134}Cs$ and $^{137}Cs$, and 100 Bq for $^{131}I$ were suggested as optimal MDAs to provide in-vivo monitoring service in case of radiation emergencies. Conclusion: In-vivo monitoring program for emergency response should be designed to achieve the optimal MDA suggested from the present work. We expect that a reduction of counting time compared with routine monitoring program can achieve the high throughput system in case of radiation emergencies.

• Korean Journal of Construction Engineering and Management
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• v.15 no.2
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• pp.3-11
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• 2014

As the recent construction projects have been carried out as a mixed-use complex project that includes architecture, civil, mechanical, electrical, and landscape, as well as become bigger and high-rise with the increased repetitive works, the TACT technique has received more attention as an effective method for achieving a target completion date by securing the continuous works. Although the TACT technique can maintain a steady flow without the interruption of works in order to utilize the resources of the repetitive works, it can not be considered as the systematic scheduling technique because the schedule computations are not possible as well as a critical path can not be recognized. This paper proposes the applicabilities of scheduling and monitoring the TACT schedule by the BDM technique as comparing and analyzing the methodologies for apartment finish works by the Excel, the Primavera(P6) based on the PDM technique, and the Beeliner based on the BDM technique that is a new networking technique, respectively.