• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.12
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• pp.1648-1656
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• 2018

The configuration of redundant inertial sensors are very important when considering navigation performance and fault detection and isolation (FDI) performance. By constructing a redundant sensor system using multiple inertial sensors, it is possible to improve the navigation performance and fault detection and isolation performance, which are highly related to the sensor configuration and allocation. In order to deploy multiple MEMS inertial measurement units effectively, a configuration and allocation methods considering navigation performance, fault detection and isolation performance, and lever arm effect in one plane are presented, and the performance is analyzed through simulation in this research. From the results, it is confirmed that the proposed configuration and allocation method can improve navigation, FDI, and lever arm effect rejection performances more effectively by more than 70%.

• Current Research on Agriculture and Life Sciences
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• v.32 no.2
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• pp.79-84
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• 2014

The precision aerial application of agricultural unmanned helicopters has become a new paradigm for small farms with orchards, paddy, and upland fields. The needs of agricultural applications require easy and affordable control systems. Recent developments of MEMS technology based on inertial sensors and high speed DSP have enabled the fabrication of low-cost attitude system. Therefore, this study evaluates inertial MEMS sensors for estimating the attitude of an agricultural unmanned helicopter. The accuracies and errors of gyro and acceleration sensors were verified using a pendulum system. The true motion values were calculated using a theoretical estimation and absolute encoder measurement of the pendulum, and then the sensor output was compared with reference values. When comparing the sensor measurements and true values, the errors were determined to be 4.32~5.72%, 3.53~6.74%, and 3.91~4.16% for the gyro rate and x-, z- accelerations, respectively. Thus, the measurement results confirmed that the inertial sensors are effective for establishing an attitude and heading reference system (AHRES). The sensors would be constructed in gimbals for the estimating and proving attitude measurements in the following paper.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.11
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• pp.1-8
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• 2005

In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.

• Journal of Navigation and Port Research
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• v.35 no.10
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• pp.785-791
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• 2011

This paper describes the evaluation and selection of MEMS(Micro-Elect Mechanical System) based inertial sensor to fit to implement the Inertial Measurement Unit(IMU) for a small-sized vessel at sea. At first, the error model and the noise model of the inertial sensors are defined with Euler's equations and then, the inertial sensor evaluation is carried out with Allan Variance techniques and Monte Carlo simulation. As evaluation results for the five sensors, ADIS16405, SAR10Z, SAR100Grade100, LIS344ALH and ADXL103, the combination of gyroscope and accelerometer of ADIS16405 is shown minimum error having around 160 m/s standard deviation of velocity error and around 35 km standard deviation of position error after 600 seconds. Thus, we select the ADIS16405 inertial sensor as a MEMS-based inertial sensor to implement IMU and, the error reducing method is also considered with the search for reference papers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.376-377
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• 2006

Chemical Mechanical Planarization (CMP) has emerged as an enabling technology for the manufacturing of multi-level metal interconnects used in high-density Integrated Circuits (IC). Recently, multi-level structures have been also widely used m the MEMS device such as micro engines, pressure sensors, micromechanical fluid pumps, micro mirrors and micro lenses. Especially, among the thin films available in IC technologies, polysilicon has probably found the widest range of uses in silicon technology based MEMS. This paper presents the characteristic of polysilicon CMP for multi-level MEMS structures. Two-step CMP process verifies that is possible to decrease dishing amount with two type of slurries characteristics. This approach is attractive because two-step CMP process can be decreased dishing amount considerably more then just one CMP process.

• Journal of Sensor Science and Technology
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• v.19 no.3
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• pp.191-196
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• 2010

In this paper, modeling of the non-ideal frequency response, especially "notch-and-spike" magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal frequency response, a new electro-mechanical simulation model based on SPICE is proposed using the driving loop of the capacitive vibratory gyroscope. The parasitic components of the driving loop are found to be the major factors of non-ideal frequency response, and it is verified with the measurement results.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.8
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• pp.872-878
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• 2008

Many industrial operations require continuous or nearly-continuous operation of machines, interruption of which can result in significant cost loss. The condition monitoring of these machines has received considerable attentions in recent years. Rapid developments in semiconductor, computing, and communication with a remote site have led to a new generation of sensor called "smart" sensors which are capable of wireless communication with a remote site. The purpose of this research is to develop a new type of smart sensor for on-line condition monitoring. This system is addressed to detect conditions that may lead to equipment failure when it is running. Moreover it will reduce condition monitoring expense using low cost MEMS accelerometer. This system is capable for signal preprocessing task and analog to digital converter which is controlled by CPU. This sensor communicates with a remote site PC using TCP/IP protocols. The developed sensor executes performance tests for data acquisition accuracy estimations.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.265-271
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• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• Transactions on Electrical and Electronic Materials
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• v.10 no.4
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• pp.131-134
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• 2009

The electrical properties and the microstructure of nitrogen-doped poly 3C-SiC films used for micro thermal sensors were studied according to different thicknesses. Poly 3C-SiC films were deposited by LPCVD (low pressure chemical vapor deposition) at $900^{\circ}C$ with a pressure of 4 torr using $SiH_2Cl_2$ (100%, 35 sccm) and $C_2H_2$ (5% in $H_2$, 180 sccm) as the Si and C precursors, and $NH_3$ (5% in $H_2$, 64 sccm) as the dopant source gas. The resistivity of the poly SiC films with a 1,530 ${\AA}$ thickness was 32.7 ${\Omega}-cm$ and decreased to 0.0129 ${\Omega}-cm$ at 16,963 ${\AA}$. The measurement of the resistance variations at different thicknesses were carried out within the $25^{\circ}C$ to $350^{\circ}C$ temperature range. While the size of the resistance variation decreased when the films thickness increased, the linearity of the resistance variation improved. Micro heaters and RTD sensors were fabricated on a $Si_3N_4$ membrane by using poly 3C-SiC with a 1um thickness using a surface MEMS process. The heating temperature of the SiC micro heater, fabricated on 250 ${\mu}m$${\times}$250 ${\mu}m$ $Si_3N_4$ membrane was $410^{\circ}C$ at an 80 mW input power. These 3C-SiC heaters and RTD sensors, fabricated by surface MEMS, have a low power consumption and deliver a good long term stability for the various thermal sensors requiring thermal stability.

• Journal of Sensor Science and Technology
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• v.26 no.6
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• pp.391-396
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• 2017

Human body motion detection is important in several industry sectors, such as entertainment, healthcare, rehabilitation, and so on. In this paper, we first discuss commercial human motion detection technologies (optical markers, MEMS acceleration sensors, infrared imaging, etc.) and then explain recent advances in the development of flexible and stretchable strain sensors for human motion detection. In particular, flexible and stretchable strain sensors that are fabricated using carbon nanotubes, silver nanowires, graphene, and other materials are reviewed.