• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Journal of Institute of Control, Robotics and Systems
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• v.21 no.12
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• pp.1167-1172
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• 2015

This paper describes the implementation of wearable AHRS for an electromagnetic motion capture system that can trace and analyze human motion on the principal nine axes of inertial sensors. The module provides a three-dimensional (3D) attitude and heading angles combining MEMS gyroscopes, accelerometers, and magnetometers based on the extended Kalman filter, and transmits the motion data to the 3D simulation via Wi-Fi to realize the unrestrained movement in open spaces. In particular, the accelerometer in AHRS is supposed to measure only the acceleration of gravity, but when a sensor moves with an external linear acceleration, the estimated linear acceleration could compensate the accelerometer data in order to improve the precision of measuring gravity direction. In addition, when an AHRS is attached in an arbitrary position of the human body, the compensation of the axis of rotation could improve the accuracy of the motion capture system.

• Transactions of Materials Processing
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• v.14 no.5 s.77
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.1
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• pp.61-69
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• 2014

In this paper, we have researched semiconductor optical filters to solve the problem of the high failure rate that are recognize bad of financial account, jam of financial account and the ATM service interruption due to failure of accurate location information among the operation of the ATM (automatic teller machine) systems. A semiconductor optical filters that have high resolution and less diffuse, high transmittance are able to detect the information of financial account surface accurately. Therefore, it is a stable filter that is able to minimize the incidence of disability. In this paper, we drew the determinants by element for implement an excellent semiconductor optical filters. Based on this, we had to be able to implement the semiconductor optical filter that is able to be mounted on the actual ATM system through future studies.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.616-618
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• 2008

This paper propose nonlinear electromagnet suspension system model and defines electromagnet design specification of Maglev vehicle for transport system of semiconductor manufacturing line. The bandwidth of the acceleration sensor is defined and manufactured using i-mems technique acceleration sensor from this Nonlinear electromagnet suspension model. Through the simulation of non-linear model it was possible to compare the gain with the experiment to confirm the accuracy of the nonlinear suspension system. Till now mainly linear model has been used in many electromagnet suspension system, which results different gains in simulation and experiments. This more accurate non-linear model can be applied in many ways in designing electromagnet suspension systems.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.41 no.6 s.324
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• pp.59-68
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• 2004

Thanks to the development of microelectromechanical systems(MEMS), wireless communication technology and microsensor technology, it was Possible to manufacture a very small and low costdata acquisition node with sensing function, processing function, wireless communication function and battery. Thus sensor networks begin to be prevailed. The sensor network is a spontaneous system which sets up automatically routing paths and transmits asignificant data to the destination. Sensor nodes requires low-power operation because most of them use a battery as operating power. Sensor nodes transmit a sensing data to the destination. Moreover, they play a router. In fact, because the later consumes more energy than the former, the low-power routing is very important. Sensor networks don't have a routing standard unlike general wireless Ad-hoc networks. So This paper proposes a low-power routing method for anting to sensor networks. It is based on AODV and adapts a method to drop probably RREQ depending on remaining power. We examined it through simulations. From simulation results, we could confirm to reduce power consumption about $10-20\%$ and distribute equally power consumption among nodes.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.604-609
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• 2019

In this study, we fabricated a capacitive humidity sensor with interdigitated (IDT) electrodes using a thermosetting polyimide as a humidifying material. First, the number of electrodes, thickness, and spacing of the polyimide film were optimized, and a mask was designed and fabricated. The sensor was fabricated on a silicon substrate using semiconductor processing equipment. The area of the sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were each $3{\mu}m$. The number of electrodes was 166, and the length of an electrode was 1.294 mm for the sensitivity of the sensor. The sensor was then packaged on a PCB for measurement. The sensor was inserted into a chamber environment with a temperature of $25^{\circ}C$ and connected to an LCR meter to measure the change in capacitance at relative humidity (RH) of 20% to 90%, 1 V, and 20 kHz. The results showed a sensitivity of 26fF/%RH, linearity of < ${\pm}2%RH$, and hysteresis of < ${\pm}2.5%RH$.

• Proceedings of the Korean Information Science Society Conference
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• 2005.11a
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• pp.451-453
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• 2005

유비쿼터스 센서네트워크는 저 전력 무선통신, 초소형 마이크로프로세서, Ad-Hoc네트워크, MEMS등 다양한 종류의 센서들과 임베디드 시스템의 기술 발전을 기반으로 모든 사물에 컴퓨팅 능력 및 무선통신 능력을 부여하여 "언제", "어디서나" "어느 것"과도 사물들끼리의 통신이 가능한 환경을 구현하는 것이다. 이러한 무선센서네트워크의 응용 분야는 산업 전반에서 일상생활에 이르기 까지 수많은 분야에 응용되어지며, 군사용. 교통, 환경 감시, 의료분야, 홈 네트워크, 빌딩 제어 등 다양한 분야에 응용될 수 있다. 이에 본 논문에서는 무선 센서네트워크 노드인 MicaZ와 자기센서를 이용하여 자기장을 감지하고, 얻어진 데이터를 MS-SQL 데이터베이스에 저장하고 저장된 데이터를 이용하여 자성체의 이동경로 추적 및 위치제어에 관하여 연구하였다.

• Journal of Sensor Science and Technology
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• v.22 no.1
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• pp.44-48
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• 2013

For a successful commercialization of microbolometer, it is required to develop a robust package including thermal stabilizing mechanism. In order to regulate the temperature within some operating range, thermoelectric cooler is generally used but it's not easy to model the whole package due to the coupled physics nature of thermoelectric cooler. In this paper, SPICE-compatible modeling methodology of a microbolometer package is presented, whose steady-state results matched well with FEM results at the maximum difference of 5.95%. Although the time constant difference was considerable as 15.7%, it can be offset by the quite short simulation time compared to FEM simulation. The developed model was also proven to be useful for designing the thermal stabilizer through parametric and transient analyses under the various working conditions.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.1
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• pp.45-50
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• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.