• Journal of Acupuncture Research
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• v.31 no.1
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• pp.61-73
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• 2014

Objectives : The purpose of this study is to estimate the test-retest reliability and the intratest repeatability in measuring the lumbar range of motion of healthy volunteers with wireless microelectromechanical system inertial measurement unit(MEMS-IMU) system and to discuss the feasibility of this system in the clinical setting to evaluate the lumbar spine movement. Methods : 19 healthy male volunteers were participated, who got under 21 points at oswestry disability index(ODI) were adopted. Their lumbar motion were measured with IMU twice in consecutive an hour for the test-retest reliability study. Intratest repeatability was calculated in the two tests separately. The calculated intraclass correlation coefficients(ICC) were discussed and compared with the those of the previous studies. Results : Lumbar range of motion of flexion $41.45^{\circ}$, extension $16.34^{\circ}$, right lateral bending $16.41^{\circ}$ left lateral bending $13.63^{\circ}$ right rotation $-2.47^{\circ}$, left rotation $-0.61^{\circ}$. ICCs were 0.96~1.00(intratest repeatability) and 0.61~0.92(test-retest reliability). Conclusion : This study shows that MEMS-IMU system demonstrates a high test-retest reliability and intratest repeatability by calculated intraclass correlation coefficients. The results of this study represents that wireless inertial sensor measurement system has portable and economical efficiency. By MEMS-IMU system, we can measures lumbar range of motion and analyze lumbar motion effectively.

• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.258-263
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• 2004

In this study, we carried out a basic study for the development of optical transcutaneous $pCO_{2}$ gas sensor and analyzer using non-invasive method. The basic principle of $pCO_{2}$ measurement is adapted Beer lambert's law and embodied the system using NDIR method. This measuring system was composed of a IR lamp, a optical filter, a optical reaction chamber, pyroelectric sensor and a signal process. We measured $EtCO_{2}'s$ concentration in basis step instead of $pCO_{2}$ gas that can collect by inflicting heat in outer skin. We minimize the size of optical reaction chamber which takes up the largest volume, to make the portable sensor. We made optical reaction chamber in Si wafer using MEMS technology and the optical reaction chamber was shortened to 2 mm and we carried out an experiment. When we injected the $EtCO_{2}$ to the inside of the optical reaction chamber, we could confirm change of 4.6 mV. The system response time was within 2 second that is fairly fast.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.1
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• pp.82-89
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• 2014

Recently, inertial sensors are popularly used for the location and position recognition of small devices for M2M/IoT. In this paper, we designed low power, low noise, small sized 6-axis inertial sensor IC for mobile applications, which uses a 3-axis piezo-electric gyroscope sensor and a 3-axis piezo-resistive accelerometer sensor. Proposed IC is composed of 3-axis gyroscope readout circuit, two gyroscope sensor driving circuits, 3-axis accelerometer readout circuit, 16bit sigma-delta ADC, digital filter and control circuit and memory. TSMC $0.18{\mu}m$ mixed signal CMOS process was used. Proposed IC reduces 27% of the current consumption of LSM330.

• International Journal of Automotive Technology
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• v.7 no.7
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• pp.827-832
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• 2006

Occupant classification and position detection have been significant research areas in intelligent safety systems in the automotive field. The detection and classification of seat occupancy open up new ways to control the safety system. This paper deals with a novel algorithm development, hardware implementation and testing of a prototype intelligent safety system for occupant classification and position detection for in-vehicle environment. Borland C++ program is used to develop the novel algorithm interface between the sensor and data acquisition system. MEMS strain gauge hermatic pressure sensor containing micromachined integrated circuits is installed inside the passenger seat. The analog output of the sensor is connected with a connector to a PCI-9111 DG data acquisition card for occupancy detection, classification and position detection. The algorithm greatly improves the detection of whether an occupant is present or absent, and the classification of either adult, child or non-human object is determined from weights using the sensor. A simple computation algorithm provides the determination of the occupant's appropriate position using centroidal calculation. A real time operation is achieved with the system. The experimental results demonstrate that the performance of the implemented prototype is robust for occupant classification and position detection. This research may be applied in intelligent airbag design for efficient deployment.

• Journal of Sensor Science and Technology
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• v.20 no.5
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• pp.317-321
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• 2011

A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.

• Journal of Sensor Science and Technology
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• v.30 no.6
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• pp.388-394
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• 2021

The conventional microelectromechanical system (MEMS) process has been used to fabricate sensors with high costs and high-volume productions. Emerging 3D printing can utilize various materials and quickly fabricate a product using low-cost equipment rather than traditional manufacturing processes. 3D printing also can produce the sensor using various materials and design its sensing structure with freely optimized shapes. Hence, 3D printing is expected to be a new technology that can produce sensors on-site and respond to on-demand demand by combining it with open platform technology. Therefore, this paper reviews three standard 3D printing technologies, such as Fused Deposition Modeling (FDM), Direct Ink Writing (DIW), and Digital Light Processing (DLP), which can apply to the sensor fabrication process. The review focuses on strain/load sensors having both sensing material features and structural features as well. NCPC (Nano Carbon Piezoresistive Composite) is also introduced as a promising 3D material due to its favorable sensing characteristics.

• Journal of Sensor Science and Technology
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• v.9 no.4
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• pp.297-306
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• 2000

To improve the performance of MEMS devices, fabricating single-crystalline silicon HARS (high aspect ratio structure) with thicknesses of up to several tens of micrometers has been an active research topic in recent years. However, achieving electrical isolation, which is required for actuating a structure or sensing an electrical signal, has been one of the main problems in single-crystalline silicon HARS fabrication technologies. In this paper, new isolation technologies using high aspect ratio oxide beams and sidewalls are developed to achieve electrical isolation between electrodes of single-crystalline silicon HARS. The developed isolation technologies use insulating oxide structural supports from either the structural sides or from the bottom. In this case because the trench oxide supports have a depth of several tens of ${\mu}m$, the effects of residual stress must be considered. In this paper, insulating supports are fabricated using PECVD TEOS films, the residual stress of the insulating supports is measured, and the effect of the residual stress on the structure is analyzed. It is shown using microresonators, that the developed isolation technologies can be effectively used for HARS using single-crystalline silicon.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.39-47
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• 2024

In this study, LiDAR-detective black material is synthesized by recycling silicon sludge (SS) that is generated from semiconductor manufacturing process, and its recognition is confirmed using two types of LiDAR sensors (MEMS and Rotating LiDAR). In detail, metal impurities on the surface of SS is removed, followed by coating of titanium dioxide (TiO₂) and subsequent chemical reduction to obtain SS-derived black TiO₂ (SS/bTiO₂) material. As-prepared SS/bTiO₂ is mixed with transparent paint to prepare hydrophilic black paints and applied to a glass substrate using a spray gun. SS/bTiO₂-based paint shows similar blackness (L^*=15.7) compared to commercial carbon black-based paint, and remarkable NIR reflectance (26.5R%, 905nm). Furthermore, MEMS and Rotating LiDAR have successfully detected the SS/bTiO₂-based paint. This is attributed to the occurrence of high reflection of light at the interface between the black TiO₂ and the silicon sludge according to the Fresnel's reflection principle. Hence, the new application field to effectively recycle silicon sludge generated in the semiconductor manufacturing process has been presented.

• Journal of KIISE:Databases
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• v.35 no.3
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• pp.208-217
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• 2008

Sensors have a function to gather environment-related information operating by small-size battery in sensor networks. The issue related with energy is still an important in spite of the recent advancements in micro-electro-mechanical-system(MEMS) related techology. Generally it is assumed that replacement or rechargement of battery power in sensor is not feasible and a message send operation may spend at least 1000 times battery than a local operation. Thus, there have been several kinds of research efforts to lessen the number of unnecessary messages by maintaining the information of the other neighboring(or all) sensors. In this paper, we propose an index structure based on parent-children relationship to the purpose. Namely, parent node gathers the set of location information and MBA per child. It's named PH and may allow to process the range query with higher accurate and small size information. Through extensive experiments, we show that our index structure has better energy consumption.

• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.