• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.389-390
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• 2008

• 디지털산업정보학회논문지
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• 제18권4호
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• pp.47-54
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• 2022

In this paper, MEMS embedded system design implemented the sensor events via analyzing the characteristics that dynamically happened to an abnormal status in power IoT environments in order to guarantee a maintainable operation. We used three kinds of tools in this paper, at first Bluetooth Low Energy (BLE) technology which is a suitable protocol that provides a low data rate, low power consumption, and low-cost sensor applications. Secondly LSM6DSOX, a system-in-module containing a 3-axis digital accelerometer and gyroscope with low-power features for optimal motion. Thirdly BM1422AGMV Digital Magnetometer IC, a 3-axis magnetic sensor with an I2C interface and a magnetic measurable range of ±120 uT, which incorporates magneto-impedance elements to detect the magnetic field when the current flowed in the power devices. The proposed MEMS system was developed based on an nRF5340 System on Chip (SoC), previously compared to the standalone embedded system without bluetooth technology via mobile App. And also, MEMS embedded system with BLE 5.0 technology broadcasted the MEMS system status to Android mobile server. The experiment results enhanced the performance of MEMS system design by combination of sensors, BLE technology and mobile application.

• 한국항해항만학회지
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• 제35권10호
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• pp.785-791
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• 2011

본 논문에서는 소형 선박용 관성측정장치(Inertial Measurement Unit, IMU) 개발에 적합한 MEMS(Micro-Electro Mechanical System) 기반의 관성 센서 평가와 선정에 관하여 기술했다. 먼저, 오일러 공식에 기초한 관성 센서의 오차 모델과 잡음 모델을 정의하고, 앨런 분산(Allan Variance) 기법과 몬테카르로(Monte Carlo) 시뮬레이션 기법을 도입하여 관성 센서를 평가하였다. ADIS16405, SAR10Z, SAR100Grade100, LIS344ALH, ADXL103 등 다섯 가지 관성 센서에 대한 평가결과, ADIS16405의 자이로와 가속도계를 조합한 경우 오차가 가장 작게 나타났는데, 600 초 경과시 속도 오차의 표준편차가 약 160 m/s, 위치 오차의 표준편차가 약 35 km로 나타났다. 평가를 통해 ADIS16405 관성 센서가 IMU 구축에 최적임을 알았고, 이러한 오차 감소 방법에 대해서 참고문헌을 조사하여 검토하였다.

• ETRI Journal
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• 제35권4호
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• pp.617-624
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• 2013

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a $NO_2$ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.

• 한국정보통신학회논문지
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• 제12권10호
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• pp.1822-1829
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• 2008

항체가 정밀한 항법 정보를 얻기 위해서는 관성 센서의 초기 오차에 대한 보정이 매우 중요하다. 본 논문에서는 레이트 테이블과 고성능 센서를 기준 센서로 사용하여, 저급 MEMS 관성 센서 오차 보정에 따르는 비용과 효율성의 어려움을 극복하는 방법을 제안하였다. 초기 오차 보정 과정에서 기준 센서와 타겟 센서에 같은 동적 입력을 인가한 후 결과를 분석하였다. 실험 결과를 통해 제안된 초기 오차 보정 방법이 실제로 매우 효율적이며 유용함을 확인할 수 있었다.

• 대한기계학회논문집A
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• 제28권9호
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• pp.1297-1305
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• 2004

Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

• Journal of Advanced Marine Engineering and Technology
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• 제39권5호
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• pp.522-526
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• 2015

Generally, underwater unmanned vehicle have adopted an inertial navigation system (INS), dead reckoning (DR), acoustic navigation and geophysical navigation techniques as the navigation method because GPS does not work in deep underwater environment. Even if the tactical inertial sensor can provide very detail measurement during long operation time, it is not suitable to use the tactical inertial sensor for small size and low cost UUV because the tactical inertial sensor is expensive and large. One alternative to INS is attitude heading reference system (AHRS) with the micro-machined electro mechanical system (MEMS) inertial sensor because of MEMS inertial sensor's small size and low power requirement. A cost effective and small size attitude heading reference system (AHRS) which incorporates measurements from 3-axis micro-machined electro mechanical system (MEMS) gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for UUV. The AHRS based MEMS overcome many problems that have inhibited the adoption of inertial system for small UUV such as cost, size and power consumption. Several evaluation experiments were carried out for the validation of the developed AHRS's function and these experiments results are presented. Experiments results prove the fact that the developed MEMS AHRS satisfied the required specification.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.132-136
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• 2004

대기중의 NO₂ 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. WO₃와 같은 가스 감응물질을 목표 온도까지 가열하기 위해서 마이크로 핫플레이트를 가스센서에 장착하였다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘 웨이퍼 기판의 온도가 거의 상온에 가까워 핫플레이트에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 마이크로 핫플레이트의 형상을 변경함으로써 가스 감지물질의 온도 균일도를 높일 수 있다.

• 센서학회지
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• 제18권5호
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• pp.359-364
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• 2009

This paper presents flexible electrocardiography(ECG) sensors using micro electro mechanical systems(MEMS) and flexible printed circuit(FPC) technology. By using FPC technology, ECG sensors which consisted of an outer hook-shaped electrode and an inner circular-shaped electrode were fabricated on the polyimide substrate. Thereafter, the bipolar ECG sensor was miniaturized using MEMS technology. The ECG measurement capability was examined by attaching the sensor to the human chest and wrist. Performance of the proposed sensors was then compared with ECG measured by commercial Ag/AgCl electrodes. It was verified that ECG could be measured using proposed sensors at only single body.

• 한국공간구조학회논문집
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• 제17권3호
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• pp.57-64
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• 2017

Recently, measuring instruments for SHM of structures had being developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to its absence of triboelectric noise and elimination of the requirement for cumbersome cable. Preliminary studies on the continuous vibration measurement of high-rise buildings using MEMS sensors have been carried out. However, the research on the low-rise buildings with relatively small vibration levels is insufficient. Therefore, in this paper, we used the wireless MEMS sensor to compare and analyze the vibration measurements of three low-rise buildings.