• 센서학회지
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• 제20권1호
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• pp.40-45
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• 2011

Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40\;{\mu}m$ long, $7\;{\mu}m$ wide, and $3\;{\mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.

• Journal of information and communication convergence engineering
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• 제3권4호
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• pp.191-194
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• 2005

SU-8 is a epoxy based photoresist designed for MEMS applications, where a thick, chemically and thermally stable image are desired. However SU-8 has proven to be very sensitive to variation in processing variables and hence difficult to use in the fabrication of useful structures. In this paper, negative SU-8 photoresist processed has been characterized in terms of delamination, based on a full factorial designed experiment. Employing the design of experiment (DOE), a process parameter is established, and analyzing of full factorial design is generated to investigate degree of delamination associated with three process parameters: post exposure bake (PEB) temperature, PEB time, and exposure energy. These results identify acceptable ranges of the three process variables to avoid delamination of SU-8 film, which in turn might lead to potential defects in MEMS device fabrication.

• ETRI Journal
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• 제38권5호
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• pp.988-995
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• 2016

In this paper, we present a new specific and customized interface tool with parameter identification of Modified Butterworth-Van Dyke models for ladder bulk acoustic wave filters. The aforementioned tool is easy to use and flexible because it allows simulations and reengineering to be conducted in an application. A modular design approach is applied to simplify the extension of the proposed tool for different topologies. The proposed tool was validated using measurements from an aluminum-nitride based ladder BAW filter dedicated to the frequency ranges of the Universal Mobile Telecommunications Service and standards and Wideband Code Division Multiple Access.

• 대한금속재료학회지
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• 제49권4호
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• pp.304-312
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• 2011

In this study, MOSFET type micro hydrogen gas sensors with platinum catalytic metal gates were designed, fabricated, and their electrical characteristics were analyzed. The devised MOSFET Hydrogen Sensors, called MHS-1 and -2, were designed with a platinum gate for hydrogen gas adsorption, and an additional sensing part for higher gas sensitivity and with a micro heater for operation temperature control. In the electrical characterization of the fabricated Pt-gate MOSFET (MHS-1), the saturated drain current was 3.07 mA at 3.0 V of gate voltage, which value in calculation was most similar to measurement data. The amount of threshold voltage shift and saturated drain current increase to variation of hydrogen gas concentration were calculated and the hydrogen gas sensing properties were anticipated and analyzed.

• 한국산학기술학회논문지
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• 제15권8호
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• pp.5288-5293
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• 2014

본 논문은 차세대 ROADM을 구성하는 핵심기술인 파장선택스위치에서 기존에 사용되는 MEMS소자 기술대신에 LCOS 디스플레이 기술을 적용한 파장선택스위치의 특성을 고찰한 논문이다. LCOS소자를 이용한 5개의 포트를 갖는 파장선택 스위치 시스템을 구성하고 응답특성과 빔제어 특성, insertion loss와 channel isolation등 파장선택 스위치로서의 기본적인 특성들을 검토하였다. 본 파장선택스위치의 응답특성은 11.6 mS 로 양호하며 LCOS상에서의 grating 이미지 패턴에 따른 입사빔의 편향특성이 잘 구현되었다. C밴드내의 40개 채널에 대한 Insertion loss 측정에서 채널에 따라 5.5~12.7 dB 사이의 값이 측정되었으며 인접채널간의 channel isolation 측정은 16~18 dB 값이 측정되었다. 기존의 MEMS소자를 이용한 파장선택스위치 상용화된 제품에 비해 특성은 아직 다소 부족하지만 향후 보완연구에 의해 LCOS소자를 이용한 파장선택스위치 시스템의 기술경쟁력이 충분히 확보될 것으로 기대한다.

• 한국전기전자재료학회논문지
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• 제26권11호
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• pp.831-835
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• 2013

In this study, we fabricated a micro $Pb(Zr,Ti)O_3$ (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about $4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$ and $1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$ each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 ${\mu}W$ each, at 0.8 g acceleration and 23.7 $k{\Omega}$ load resistance, respectively.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.22-23
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• 2003

광섬유 가변 감쇠기는 광증폭기, add／drop 모듈, Mux／Demux, 광송수신기 등 중요한 광통신 시스템의 입력 및 출력 광신호 레벨을 적절하게 제어하기 위해 요구되는 중요한 소자이다. 가변 감쇠기는 높은 신뢰성, 높은 해상도, 작은 삽입손실, 낮은 편광 및 파장 의존성 손실 등이 요구되어 진다. 가변 광감쇠기는 평면 기판에 형성된 도파로 의 열광학 효과나 전기광학 효과를 이용하는 기법과 MEMS 기술에 기초한 방법이 잘 알려져 있다. (중략)

• 대한기계학회논문집A
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• 제31권10호
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• pp.986-992
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• 2007

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.467-468
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• 2006

In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.

• Applied Microscopy
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• 제47권3호
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• pp.208-213
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• 2017

The microstructural changes in Co nanoparticles and an Au-10at.%Pd thin film have been investigated using an in situ heating holder with a micro-electro-mechanical system (MEMS). In Co nanoparticles, two phases (face-centered cubic and hexagonal close-packed crystal structures) were found to coexist at room temperature and microstructures at temperatures, higher than $1,000^{\circ}C$, were observed with a quick response time and significant stability. The actual temperature of each specimen was directly estimated from the changes in the lattice spacing (Bragg-peak separation). For the Au-10at.%Pd thin film, at a set temperature of $680^{\circ}C$, the actual temperature of the sample was estimated to be $1,020^{\circ}C{\pm}123^{\circ}C$. Note that the specimen temperature should be carefully evaluated because of the undesired effects, i.e., the temperature non-uniformity due to the sample design of the MEMS chip, and distortion due to thermal expansion.