[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4218/etrij.16.0115.1075

Flexible Engineering Tool for Radiofrequency Parameter Identification of RF-MEMS BAW Filters

Mabrouk, Mohamed (ISETCOM de Tunis and GRESCOM (SUPCOM de Tunis))
Boujemaa, Mohamed-Ali (INNOVCOM (SUPCOM de Tunis), University of Carthage)
Choubani, Fethi (INNOVCOM (SUPCOM de Tunis), University of Carthage)

Publication Information

ETRI Journal / v.38, no.5, 2016 , pp. 988-995 More about this Journal

Abstract

In this paper, we present a new specific and customized interface tool with parameter identification of Modified Butterworth-Van Dyke models for ladder bulk acoustic wave filters. The aforementioned tool is easy to use and flexible because it allows simulations and reengineering to be conducted in an application. A modular design approach is applied to simplify the extension of the proposed tool for different topologies. The proposed tool was validated using measurements from an aluminum-nitride based ladder BAW filter dedicated to the frequency ranges of the Universal Mobile Telecommunications Service and standards and Wideband Code Division Multiple Access.

Keywords

Bulk Acoustic Wave Filter; MBVD; SMR resonator; MEMS; Modeling; Characterization Tool;

Citations & Related Records

Reference

1	R. Aigner et al., "Advancement of MEMS into RF-Filter Applications," Int. Electron Devices Meeting, San Francisco, CA, USA, Dec. 8-11, 2002, pp. 897-900.
2	K.M. Lakin, G.R. Kline, and K.T. McCarron, "High-Q Microwave Acoustic Resonators and Filters," IEEE Trans. Microw. Theory Techn., vol. 41, no. 12, Dec. 1993, pp. 2139-2146 DOI
3	F. Constantinescu et al., "Behavioral Circuit Models of Power BAW Resonators and Filters," Analog Integr. Circuits Signal Process., vol. 73, no. 1, Oct. 2012, pp. 57-64. DOI
4	F. Constantinescu et al., "Artificial Transmission Line Model For Power BAW Resonators with Mechanical Nonlinearity," Revue Roumaine des Sci. Techn., Serie Electrotechn. Energetique, vol. 56, no. 2, Dec. 2011, pp. 237-246.
5	F.Z. Bi and B.P. Barber, "Improved MBVD Model to Consider Frequency Dependent Loss for BAW Filter Design," IEEE Ultrason. Symp., New York, USA, Oct. 28-31, 2007, pp. 1025-1028.
6	S. Razafimandimby et al., "An Electronically Tunable Bandpass BAW-Filter for a Zero-IF WCDMA Receiver," Proc. Eur. Solid-State Circuits Conf., Montreux, Switzerland, Sept. 19-21, 2006, pp. 142-145.
7	J.D. Larson et al., "Power Handling and Temperature Coefficient Studies in fbar Duplexers for the 1900 Mhz PCS Band," IEEE Ultrason. Symp., San Juan, Argentina, Oct. 22-25, 2000, pp. 869-874.
8	D.P. Morgan, "History of SAW Devices," Proc. IEEE Int. Freq. Contr. Symp., May 27-29, 1998, Pasadena, CA, USA, pp. 439-460.
9	J. Olivares et al., "Sputtered $SiO_2$ as Low Acoustic Impedance Material for Bragg Mirror Fabrication in BAW Resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 57, no. 1, Jan. 2010, pp. 23-29. DOI
10	C.P. Moreira et al., "Design of a Fully-Integrated Bicmos/FBAR Reconfigurable RF Receiver Front-End," Symp. Integr. Circuits Syst. Design, Florianopolis, Sept. 4-7, 2005, Brazil, pp. 138-143.
11	J.D. Larson et al., "Modified Butterworth-Van Dyke Circuit for FBAR Resonators and Automated Measurement System," IEEE Ultrason. Symp., San Juan, Brazil, Oct. 22-25, 2000, pp. 863-868.
12	M.A. Dubois et al., "Integration of High-Q BAW Resonators and Filters above IC," IEEE Int. Solid-State Circuits Conf., San Francisco, CA, USA, Feb. 6-10, 2005, pp. 391-393.
13	D.A. Feld, "One-Parameter Nonlinear Mason Model for Predicting 2nd and 3nd Order Nonlinearities in BAW Devices," IEEE Int. Ultrason. Symp., Rome, Italy, Apr. 20-23, 2009, pp. 316-1087.
14	K. Misu et al., "Acoustic Field Analysis of Surface Acoustic Wave Dispersive Delay Lines Using Inclined Chirp IDT," IEICE Trans. Fundam. Electron. Commun. Comput. Sci., vol. E90-A, no. 5, May 2007, pp. 1014-1020. DOI
15	D.A. Frickey, "Conversions between S, Z, Y, H, ABCD, and T Parameters, Which are Valid for Complex Source and Load Impedances Behavioral Circuit Models of Power BAW Resonators and Filters," IEEE Trans. Microw. Theory Techn., vol. 42, no. 12, Feb. 1994, pp. 205-211. DOI