• ETRI Journal
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• 제38권4호
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• Journal of Welding and Joining
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• 제30권4호
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• pp.38-43
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• 2012

Using a fiber laser heat source, an oil pressure sensor was fabricated to measure the pressure in commercial vehicles. A stepping motor was used for the rotational and translational motion in the diaphragms and hardware joining. Laser welding process algorism including shielding gas control and vision system was integrated by using LabVIEW software for the high quality welding and in-line monitoring purpose. For the maximum flexibility in pressure transmission to the pressure sensor, thin sheet metal diaphragm, $25{\sim}50{\mu}m$(SUS-316L), was used and the diaphragms were optimally designed with FEM analysis. The welded samples were cross-sectioned the observation showed that the maximum depth ratio was more than seven times of diaphragms. The maximum welding speed was measured to be as high as 50in/mm by the developed automation mechanism. The fabricated prototypes were tested for the proof pressure, spring constant and sealing. The FEM results of spring constant measurement was as accurate as up to 80% of the design value and the sensor was safely operated up to the nominal pressure of 10bars.

• Smart Structures and Systems
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• 제8권1호
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• pp.53-67
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• 2011

Human state in human-machine systems highly affects the overall system performance, and should be detected and monitored. Physiological cues are essential indicators of human state and useful for the purpose of monitoring. The study presented in this paper was focused on developing a bio-inspired sensing system, i.e., Nano-Skin, to non-intrusively measure physiological cues on human-machine contact surfaces to detect human state. The paper is presented in three parts. The first part is to analyze the relationship between human state and physiological cues, and to introduce the conceptual design of Nano-Skin. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography are closely related with human state. They can be measured through human-machine contact surfaces using Nano-Skin. The second part is to discuss the technologies for skin temperature measurement. The third part is to introduce the design and manufacture of the Nano-Skin for skin temperature measurement. Experiments were performed to verify the performance of the Nano-Skin in temperature measurement. Overall, the study concludes that Nano-Skin is a promising product for measuring physiological cues on human-machine contact surfaces to detect human state.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.347-348
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• 2007

On-chip micro humidity sensor, using $CN_x$ films for the sensing material, was designed, simulated, and fabricated with Op amp based readout circuit and diode temperature sensors. To compensate the temperature and other gases, two methods were applied. One is wheatstone-bridge with reference FET that eliminates other undesirable chemical species, and the other is a diode temperature sensor to compensate the temperature effect. $CN_x$ film can be a new humidity sensing material, and has a strong potential to adapt to smart sensors or multi-sensors using MEMS or nano-technology. A particular design technology for integration of sensors and systems together was proposed that whole fabrication process could be achieved by a standard CMOS process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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• pp.264-266
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• 2005

Recently, on-line diagnosis methods through wired and wireless networks are widely adopted in the diagnosis of industrial Electric Facilities, such as generators, transformers and motors. Also smart sensors which includes sensors, signal conditioning circuits and micro-controller in one board are widely studied in the field of condition monitoring. This paper suggests an self-powered system suitable for condition-monitoring smart sensors, which uses parasitic vibrations of the facilities as energy source. First, vibration-driven noise patterns of the electric facilities are presented. And then, an electromagnetic generator which uses mechanical mass-spring vibration resonance are suggested and designed. Finally energy consumption of the presented smart sensor, which consists of MEMS vibration sensors, signal conditioning circuits, a low-power consumption micro-controller, and a ZIGBEE wireless tranceiver, are presented. The usefulness and limits of the presented electromagnetic generators in the field of electric facility monitoring are also suggested.

• 대한기계학회논문집B
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• 제33권8호
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

• 대한전자공학회논문지SD
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• 제49권8호
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• pp.16-21
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• 2012

MEMS 기반의 자이로 센서는 회전 각도를 추출하는 과정에서 잡음성분에 의한 누적오차(drift) 및 영점(zero angle) 이탈현상이 발생한다. 본 연구에서는 이러한 누적오차를 제거하기 위한 DCF(Drift Compensatio Filter) 알고리즘과 각도 추출 시영점 이탈 방지를 위한 BACF(Boot Angle Compensation Filter) 알고리즘을 제안한다. DCF 알고리즘은 자이로 센서의 출력값에서 오프셋 및 잡음성분을 제거하여 순수 이동량을 얻을 수 있도록 설계한다. BACF 알고리즘은 자이로 센서로부터 출력되는 오프셋(Offset)에 포함된 잡음 성분을 재귀 평균법으로 계산하여 평균 오프셋을 구한다. 실험환경은 2축 자이로 센서 및 모바일 OIS 카메라가 탑재된 컨트롤 보드를 이용하여 5Hz의 ${\pm}0.5^{\circ}$의 진동에 대하여 BACF 및 DCF 알고리즘을 적용한 결과 누적 오차가 발생하지 않았으며, 영점 각도 추종이 정확히 이루어지는 결과를 확인하였다.

• 한국광학회지
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• 제27권4호
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• pp.133-142
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• 2016

본 논문에서는 DS-OCDMA(direct sequence optical code division multiple access)와 스캐닝 방식의 MEMS (microelectromechanical system) 거울을 이용하여 픽셀별로 스캐닝하는 라이다 시스템(light detection and ranging, LIDAR)의 설계와 시뮬레이션 결과를 기술한다. 제안하는 라이다는 $848{\times}480$ 해상도의 거리 영상을 1초에 60번 측정한다. 영상을 구성하는 각각의 픽셀마다 픽셀 정보와 체크섬을 DS-OCDMA로 부호화한 레이저 펄스로 방출하므로, 반사파를 검출하기 위하여 대기할 필요없이 연속으로 거리 측정이 가능하다. MEMS 거울은 부호화된 레이저 펄스를 반사하여 측정을 원하는 방향으로 보내기 위한 용도로 사용한다. 하나의 거리 영상을 구성하는 픽셀 정보의 처리가 모두 완료되면, 픽셀 개개의 반사파 비행시간을 이용하여 포인트 클라우드를 생성한다.

• Journal of Electrical Engineering and Technology
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• 제9권3호
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• pp.950-956
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• 2014

Special purpose sensor design using MEMS (Micro-Electro-Mechanical Systems) technique is commonly used in Nondestructive Testing (NDT) research for the evaluation of existing structures and for the safety control and requirements. Various sensors and network have been developed for general infrastructures as well as safety-critical applications, e.g., aerospace, defense, and nuclear system, etc. In this paper, one of sensor technique using Fiber Bragg Gratings (FBG) and Finite Element Method (FEM) evaluation is discussed. The experimental setup and data collection technique is also demonstrated. The factors influencing test result and the advantages/limitations of this technique are also reviewed using various methods.

• 한국항공우주학회지
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• 제38권3호
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• pp.300-308
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• 2010

전세계적으로 적용되는 개발개념인 보다 빨리, 더 좋게, 더 값싼 위성을 설계하는 일에 있어 향상된 자세결정시스템을 도입하는 것은 자명한 일이라고 할 수 있다. 오늘날 CCD나 APS 기반의 별추적기는 현존하는 위성의 자세결정용 센서중에서 가장 좋은 정밀도를 제공하고 있다. 본 논문에서는, 별추적기의 기본적인 동작원리와 관련 기술의 개요를 소개함과 동시에 별추적기 개발에서 주요 이슈가 되었던 기술들을 비교 분석한다. 또한 별스캐너로부터 MEMS기술을 적용한 별추적기에 이르기까지, 별추적기의 간추린 역사와 세계 각국에서의 개발현황을 소개한다.