• Title/Summary/Keyword: MEMS Sensor

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Performance Evaluation of Smart Accelerometers for Structural Health Monitoring (구조 건전성 감시를 위한 스마트 가속도계의 성능 평가)

  • Yi, Jin-Hak;O, Hye-Sun;Yun, Chung-Bang
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.4A
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    • pp.605-609
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    • 2006
  • In this study, two kinds of smart accelerometers are investigated for the application of smart sensors to the structural health monitoring of infrastructures. Smart optical Fiber Bragg Grating (FBG) type and Micro-Electo-Mechanical System (MEMS) type accelerometers are selected for this study and the high sensitive ICP type accelerometer is used for the reference sensor. Small size shaking table tests were performed with 3-story shear building model using random input ground motions. The output only modal identification was carried out using stochastic subspace identification and the performances of sensors are compared in modal domain indirectly. The modal sensitivity method was applied to update the story stiffness of numerical model and the updated results were verified using the additional experiments for the same structure with additional mass.

Development and Application of Three-axis Motion Rate Table for Efficient Calibration of Accelerometer and Gyroscope (효율적인 각/가속도 센서 오차 보상을 위한 3 축 각도 측정 장치의 개발 및 활용)

  • Kwak, Hwan-Joo;Hwang, Jung-Moon;Kim, Jung-Han;Park, Gwi-Tae
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.7
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    • pp.632-637
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    • 2012
  • This paper introduces a simple and efficient calibration method for three-axis accelerometers and three-axis gyroscopes using three-axis motion rate table. Usually, the performance of low cost MEMS-based inertial sensors is affected by scale and bias errors significantly. The calibration of these errors is a bothersome problem, but the previous calibration methods cannot propose simple and efficient method to calibrate the errors of three-axis inertial sensors. This paper introduces a new simple and efficient method for the calibration of accelerometer and gyroscope. By using a three-axis motion rate table, this method can calibrate the accelerometer and gyroscope simultaneously and simply. Experimental results confirm the performance of the proposed method.

Fabrication of Pd/poly 3C-SiC Schottky diode hydrogen sensors (다결정 3C-SiC 마이크로 공진기의 온도 특성)

  • Ryu, Kyong-Il;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.130-130
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    • 2009
  • This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2 ${\mu}m$ and 0.4 ${\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 ${\mu}m$ long cantilever resonators were -9.79, -7.72 and -8.0 $ppm/^{\circ}C$. On the other hand, TCF of 60, 80 and 100 ${\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 $ppm/^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

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Measurements of pedestrian's ioad using smartphones

  • Pan, Ziye;Chen, Jun
    • Structural Engineering and Mechanics
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    • v.63 no.6
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    • pp.771-777
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    • 2017
  • The applications of smartphones or other portable smart devices have dramatically changed people's lifestyle. Researchers have been investigating useage of smartphones for structural health monitoring, earthquake monitoring, vibration measurement and human posture recognition. Their results indicate a great potential of smartphones for measuring pedestrian-induced loads like walking, jumping and bouncing. Smartphone can catch the device's motion trail, which provides with a new method for pedestrain load measurement. Therefore, this study carried out a series of experiments to verify the application of the smartphone for measuring human-induced load. Shaking table tests were first conducted in order to compare the smartphones' measurements with the real input signals in both time and frequency domains. It is found that selected smartphones have a satisfied accuracy when measuring harmonic signals of low frequencies. Then, motion capture technology in conjunction with force plates were adopted in the second-stage experiment. The smartphone is used to record the acceleration of center-of-mass of a person. The human-induced loads are then reconstructed by a biomechanical model. Experimental results demonstrate that the loads measured by smartphone are good for bouncing and jumping, and reasonable for walking.

Pixel-Structured Scintillator with Polymeric Microstructures for X-Ray Image Sensors

  • Jung, Im-Deok;Cho, Min-Kook;Bae, Kong-Myeong;Lee, Sang-Min;Jung, Phill-Gu;Kim, Ho-Kyung;Kim, Sung-Sik;Ko, Jong-Soo
    • ETRI Journal
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    • v.30 no.5
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    • pp.747-749
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    • 2008
  • We introduce a pixel-structured scintillator realized on a flexible polymeric substrate and demonstrate its feasibility as an X-ray converter when it is coupled to photosensitive elements. The sample was prepared by filling $Gd_2O_2S:Tb$ scintillation material into a square-pore-shape cavity array fabricated with polyethylene. For comparison, a sample with the conventional continuous geometry was also prepared. Although the pixelated geometry showed X-ray sensitivity of about 58% compared with the conventional geometry, the resolving power was improved by about 70% above a spatial frequency of 3 $mm^{-1}$. The spatial frequency at 10% of the modulation-transfer function was about 6 $mm^{-1}$.

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Fabrication and Improved Sensitivity with Surface Treatment of TiO2/GOD Mixture based Glucose Biosensor (TiO2/GOD 혼합물 기반의 글루코스 바이오 센서의 제작과 표면 처리를 통한 감도개선)

  • Lee, Junyeop;Jung, Dong Geon;Lee, Jae Yong;Kim, Jae Keon;Jung, Daewoong;Kong, Seong Ho
    • Journal of Sensor Science and Technology
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    • v.27 no.3
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    • pp.170-174
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    • 2018
  • In this paper, the $TiO_2$/glucose oxidase (GOD) mixture has synthesized through simple and low-cost fabrication methods. The physical properties of the mixture were proved using an FT-IR/NIR spectrometer, an X-Ray diffractometer, and a Raman spectrometer. GOD maintained its bioactivity during all fabrication process. The current characteristics of the glucose biosensor were proportional to the glucose concentration and effective surface area of square pyramid on a silicon substrate. The maximum current change was measured in a pH 7.0 buffer solution. The simple and low-cost fabrication process and surface treatment can be used widely in previous research for improvements in effective surface area.

Dynamic Position of Vehicles using AHRS IMU Sense (AHRS IMU 센서를 이용한 이동체의 동적 위치 결정)

  • Back Ki-Suk;Lee Jong-Chool;Hong Soon-Hyun;Cha Sung-Yeoul
    • Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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    • 2006.04a
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    • pp.77-81
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    • 2006
  • GPS cannot determine random errors such as multipath and signal cutoff caused by surrounding environment that determines the visibility of satellites and the speed of data creation and transmission is lower than the speed of vehicles, it is difficult to determine accurate dynamic positions. Thus this study purposed to implement a method of deciding the accurate dynamic position of vehicles by combining AHRS (Attitude Heading Reference System) IMU (Initial Measurement Unit) based on low-priced MEMS (Micro Electro Mechanical System) in order to provide the information of attitude, position and speed at a high transmission rate without external help. This study conducted an initialization test to decide dynamic position using AHRS IMU sensor, and derived attitude correction angles of vehicles against time through regression analysis. The roll angle was $y=(A{\times}10^{-6})x^2 -(B{\times}10^{-5})x+Cr{\times}10^{-2}$ and the pitch angle was $y=(A{\times}10^{-6})x^2-(B{\times}10^{-7})x+C{\times}10^{-2}$, each of which was derived from second-degree polynomial regression analysis. It was also found that the heading angle was stabilized with variation less than $1^{\circ}$ after 60 seconds.

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Development of Application Technique for 3-1 Type Triple-morph Cantilever (3-1 타입 트리모프 캔틸레버의 마이크로발전 응용기술 개발)

  • Kim, In-Sung;Joo, Hyeon-Kyu;Jeong, Soon-Jong;Kim, Min-Soo;Song, Jae-Sung;Jeon, So-Hyeon
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1303_1304
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    • 2009
  • With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device. The made 31type triple-morph cantilever was resulted from the conditions of $100k{\Omega}$, 0.25g, 154Hz respectively. The thick film was prepared at the condition of 6.57Vrms, and its power was $432.31{\mu}W$ and its thickness was $50{\mu}m$. And than, the fabricated piezoelectric cantilever was packaged for application.

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Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators (다결정 3C-SiC 마이크로 공진기의 온도특성)

  • Chung, Gwiy-Sang;Lee, Tae-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.4
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    • pp.314-317
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    • 2009
  • This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The $1.2{\mu}m$ and $0.4{\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/$^{\circ}C$. On the other hand, TCF of 60, 80 and $100{\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/$^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

Micro-power Properties of 31Type Triple-morph Cantilever for Energy Harvesting Device (31 타입 트리모프 켄틸레버의 마이크로 발전 특성 연구)

  • Kim, In-Sung;Joo, Hyeon-Kyu;Jung, Soon-Jong;Kim, Min-Soo;Song, Jae-Sung;Jeon, So-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.220-221
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    • 2008
  • With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device. The made 31 type triple-morph cantilever was resulted from the conditions of 100k$\Omega$, 0.25g, 154Hz respectively. The thick film was prepared at the condition of $6.57V_{rms}$, and its power was $432.31{\mu}W$ and its thickness was $50{\mu}m$.

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