3-1 타입 트리모프 캔틸레버의 마이크로발전 응용기술 개발

Development of Application Technique for 3-1 Type Triple-morph Cantilever

With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device. The made 31type triple-morph cantilever was resulted from the conditions of $100k{\Omega}$, 0.25g, 154Hz respectively. The thick film was prepared at the condition of 6.57Vrms, and its power was $432.31{\mu}W$ and its thickness was $50{\mu}m$. And than, the fabricated piezoelectric cantilever was packaged for application.