• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.7
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• pp.1218-1223
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• 2007

A surface micro machined angular rate sensor utilizing a vibrating MEMS structure on a silicon has been developed. These tuning fork angular rate sensors are extremely rugged, inherently balanced, and easy to fabricate. The device is fabricated using a temperature compensation method based on automatic gain control technique. A linearity of approximately 0.6%, limited by the on-chip electronics has been obtained with this new sensor. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.2079_2080
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• 2009

MEMS 기술을 이용한 다양한 센서의 개발과정에서 신뢰성 확보는 매우 중요한 문제이며, 여러 가지 신뢰성 항목 가운데 낙하시험은 가장 기본이 되는 항목이다. 단시간 내에 낙하에 대한 내충격성을 확보하는 MEMS 센서를 개발하기 위해 본 논문에서는 FEA와 high-level 모델을 결합한 낙하시험 모의진단법을 제안하였다. 제안된 모의진단법을 통해 MEMS 소자에서의 최대응력과 응력분포, 최대변위, 그리고 낙하시의 과도응답과 오신호 등의 결과를 확보할 수 있으며 이들을 토대로 MEMS 소자에서의 취약부위를 파악하고 이를 보완할 수 있으며 낙하시의 오동작을 제거하도록 신호처리 회로 등을 보완할 수도 있을 것이며 이를 통해 단시간 내에 최소의 비용으로 내충격성을 확보한 MEMS 센서를 개발하는 것이 가능해질 것이다.

• Tunnel and Underground Space
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• v.28 no.6
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• pp.547-554
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• 2018

Using crowdsourced sensor data collection technique, it is possible to collect high-density ground vibration data which is difficult to obtain by conventional methods. In this study, we have developed a crowdsourced ground vibration data collection system using MEMS sensors mounted on small electronic devices including smartphones, and implemented client and server based on the proposed infrastructure system design. The system is designed to gather vibration data quickly through Android-based smartphones or fixed devices based on Android Things, minimizing the usage of resource like power usage and data transmission traffic of the hardware.

• Journal of Korea Multimedia Society
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• v.22 no.9
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• pp.1011-1019
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• 2019

In this paper, we propose a system that can more precisely identify and monitor the position of the tool used in the assembling workplace such as automobile production. The proposed positioning monitoring system is a combination of UWB communication module and MEMS IMU sensor. Since UWB does not need modulation and demodulation function and has low power density, UWB is widely used in indoor positioning field. However, it may cause positioning error due to errors in RF transmission and reception process, which may cause positioning accuracy. Therefore, in this paper, we propose an algorithm that uses IMU as an auxiliary means to compensate for errors that may occur in positioning using only UWB. The tag and anchor of UWB module measure the transmission / reception time by transmitting signals to each other and then estimate the distance between tag and anchor. The MEMS IMU sensor serves to provide positioning calibration information. The tag, which is a mobile node and attached to a moving tool, measures the three-dimensional position of the tool and transfers the coordinate data to the anchor. Thus, it is possible to confirm whether or not the specific tool is properly used according to the prescribed regulations.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.20 no.6
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• pp.1103-1108
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• 2016

The development of a variety of sensor technology, users smart phone, the use of motion recognition apparatus such as a console game machines is increasing. It tends to user needs motion recognition-based input device are increasing. Existing motion recognition mouse is equipped with a modified form of the mouse button on the outside and serves as a wheel mouse left and right buttons. Existing motion recognition mouse is to manufacture a small, there is a difficulty to operate the button. It is to apply the motion recognition technology the motion recognition technology is used only pointing the cursor there is a limit. In this paper, use of MEMS-based motion recognition sensor, the body of the two-point operation data by recognizing the operation of the (thumb and forefinger) and generating a control signal, followed by studies on the generated control signal to a wireless transmitting computer input device.

• The Journal of the Korea institute of electronic communication sciences
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• v.6 no.5
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• pp.709-716
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• 2011

Recently, there are many difficult for maintenance in the power in established sensor networks. In order to solve this problems, the power development has been interested using vibration in MEMS that insert the MEMS oscillator. In this paper, we propose the MEMS system with Duffing equation to generate vibration signal that can be use power signal in MEMS and confirm and verify the chaotic behaviors in vibration signal of MEMS by computer simulation. As a verification methods, we confirm the existence of period motion and chaotic motion by parameter variation through the time series, phase portrait, power spectrum and poincare map.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.7
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• pp.979-986
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• 2013

Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.816-820
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• 2011

A method for increasing the difference of side-lobe level in spherical microphone array is presented. In array signal processing, it is known that narrow interval between sensors can increase the difference between main lobe and side-lobe of array response which eventually increase the source recognition capability. Recent commercial array being used, however, have shown certain limitation in using the number of sensors due to its costs and geometrical size of array. To overcome this problem, we have adapted MEMS sensors into spherical microphone array. To check out the improvement, two different types of spherical microphone array were designed. One array is composed with 32 regular instrument microphones and the other one is 85 MEMS sensors. Simulation and experiments were conducted on a sinusoidal noise source with two arrays. The time history data were analyzed with spherical harmonic decomposition and beamforming technique. 85 MEMS sensors array showed the improved side-lobe level suppression by more than 4 dB above the frequency content of 2 kHz compared to 32-sensor array.

• Smart Structures and Systems
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• v.12 no.1
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• pp.23-39
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• 2013

In this article, a smart multifunctional optical system-on-a-chip (SOC) sensor platform is presented and its application for fiber Bragg grating (FBG) sensor interrogation in optical sensor networks is investigated. The smart SOC sensor platform consists of a superluminescent diode as a broadband source, a tunable microelectromechanical system (MEMS) based Fabry-P$\acute{e}$rot filter, photodetectors, and an integrated microcontroller for data acquisition, processing, and communication. Integrated with a wireless sensor network (WSN) module in a compact package, a smart optical sensor node is developed. The smart multifunctional sensor platform has the capability of interrogating different types of optical fiber sensors, including Fabry-P$\acute{e}$rot sensors and Bragg grating sensors. As a case study, the smart optical sensor platform is demonstrated to interrogate multiplexed FBG strain sensors. A time domain signal processing method is used to obtain the Bragg wavelength shift of two FBG strain sensors through sweeping the MEMS tunable Fabry-P$\acute{e}$rot filter. A tuning range of 46 nm and a tuning speed of 10 Hz are achieved. The smart optical sensor platform will open doors to many applications that require high performance optical WSNs.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1761-1766
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• 2004

In this lecture, we reviewed the principle and types of force sensors with strain gages, tactile sensors based on MEMS and force sensor as well as nano force sensors. Also we investigated applications of force sensors for NT, BT and RT.