• Bulletin of the Korean Chemical Society
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• v.32 no.4
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• pp.1298-1302
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• 2011

This study describes the development of an electrochemical array immunochip for the detection of IgG. Interdigitated immunochip platforms were fabricated by sputtering gold on a glass wafer by using MEMS process and then were coated with Eudragit S100, an enteric polymer, forming an insulating layer over the working area of immunochips. The breakdown of the polymer layer was exemplified by the catalytic action of urease which, in the presence of urea, caused an alkaline pH change. This subsequently caused an increase of the double layer capacitance of the underlying electrode. Used in conjunction with a competitive immunoassay format, this allowed the ratio of initial to final electrode capacitance to be directly linked with the concentration of analyte, i.e. IgG. Responses to IgG could be detected at IgG concentration as low as $250\;ngmL^{-1}$ and showed good linearity up to IgG concentration as high as $20\;{\mu}gmL^{-1}$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.11
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• pp.918-924
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• 2009

In this paper, we designed micro-structured electromagnetic transducers for energy harvesting and verified the performance of proposed transducers using finite element analysis software, COMSOL Multiphysics. To achieve higher energy transduce efficiency, around the magnetic core material, three-dimensional micro-coil structures with high number of turns are fabricated using semiconductor fabrication process technologies. To find relations between device size and energy transduce efficiency, generated electrical power values of seven different sizes of transducers ($3{\times}3\;mm^2$, $6{\times}6\;mm^2$, $9{\times}9\;mm^2$, $12{\times}12\;mm^2$, $15{\times}15\;mm^2$, $18{\times}18\;mm^2$, and $21{\times}21\;mm^2$) are analyzed on various magnetic flux density environment ranging from 0.84 T to 1.54 T and it showed that size of $15{\times}15\;mm^2$ device can generate $991.5\;{\mu}W$ at the 8 Hz of environmental kinetic energy. Compare to other electromagnetic energy harvesters, proposed system showed competitive performance in terms of power generation, operation bandwidth and size. Since proposed system can generate electric power at very low frequency of kinetic energy from typical life environment including walking and body movement, it is expected that proposed system can be effectively applied to various pervasive computing applications including power source of embodied medical equipment, power source of RFID sensors and etc. as an secondary power sources.

• Journal of Biomedical Engineering Research
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• v.37 no.5
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• pp.168-177
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• 2016

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.

• Journal of KIISE:Databases
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• v.35 no.3
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• pp.208-217
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• 2008

Sensors have a function to gather environment-related information operating by small-size battery in sensor networks. The issue related with energy is still an important in spite of the recent advancements in micro-electro-mechanical-system(MEMS) related techology. Generally it is assumed that replacement or rechargement of battery power in sensor is not feasible and a message send operation may spend at least 1000 times battery than a local operation. Thus, there have been several kinds of research efforts to lessen the number of unnecessary messages by maintaining the information of the other neighboring(or all) sensors. In this paper, we propose an index structure based on parent-children relationship to the purpose. Namely, parent node gathers the set of location information and MBA per child. It's named PH and may allow to process the range query with higher accurate and small size information. Through extensive experiments, we show that our index structure has better energy consumption.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1968-1970
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• 1996

We investigate a surface-micromachined polysilicon microgyroscope, whose resonant frequencies are electrostatically-tunable after fabrication. The microgyroscope with two oscillation nudes has been designed so that the resonant frequency in the sensing mode is higher than that in the actuating mode. The microgyroscope has been fabricated by a 4-mask surface-micrormachining process, including the deep RIE of a $6{\mu}m$-thick LPCVD polycrystalline silicon layer. The resonant frequency in the sensing mode has been lowered to that in actuating mode through the adjustment of an inter-plate bias voltage; thereby achieving a frequency matching at 5.8kHz under the bias voltage of 2V in a reduced pressure of 0.1torr. For an input angular rate of $50^{\circ}/sec$, an output signal of 20mV has been measured from the tuned microgyroscope under an AC drive voltage of 2V with a DC bias voltage of 3V.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• Journal of Sensor Science and Technology
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• v.22 no.2
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• pp.150-155
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• 2013

Recently, various hearing aids are developed to overcome hearing loss. There are available hearing aids, such as air conduction hearing aid, implantable middle ear hearing aid and so on. But air conduction hearing aid is inconvenience caused by howling, and ossicle chain driving type implantable middle ear hearing aid has some week point due to problem of possible nercobiosis of coupling spot along incus long process. In recent years, in order to improve these shortcomings round window (RW) driving hearing aid has been paying attention. In this paper, the physical cochlear model is proposed for a performance evaluation of the RW driving hearing aids of a transducer. In order to verify an experiment proposed on a performance of physical cochlear model, the transducer which has ossicles characteristics is used. By measuring and comparing the frequency characteristics of transducer with ossicles and human temporal bone, performance of physical cochlear model was verified. As from the result of experiment, it is expected that an implemented cochlear model is useful for evaluating characteristics of RW transducer.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.508-515
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• 2005

We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.1
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• pp.82-89
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• 2014

Recently, inertial sensors are popularly used for the location and position recognition of small devices for M2M/IoT. In this paper, we designed low power, low noise, small sized 6-axis inertial sensor IC for mobile applications, which uses a 3-axis piezo-electric gyroscope sensor and a 3-axis piezo-resistive accelerometer sensor. Proposed IC is composed of 3-axis gyroscope readout circuit, two gyroscope sensor driving circuits, 3-axis accelerometer readout circuit, 16bit sigma-delta ADC, digital filter and control circuit and memory. TSMC $0.18{\mu}m$ mixed signal CMOS process was used. Proposed IC reduces 27% of the current consumption of LSM330.

• Journal of the Economic Geographical Society of Korea
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• v.17 no.1
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• pp.200-213
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• 2014

During the 1970s and 1980s, most of the industrial cities of the Western World went through serious de-industrialization process. While the economy of the cities declined, the cities were suffering from the lack of job opportunities, under-use of industrial infrastructure, and environmental degradation. Many of the cities attempted to tackle such problems, but very few of them have succeeded. However, the Ruhr area is showing some promising signs. This paper attempts to analyze regional revitalization policies of Dortmund, a central city of the Ruhr, and looks into the processes and outcomes of the policies. The author argues Dortmund has successfully created and set forth a new industrial path based on high-tech industries, such as information technology, micro-electromechanical systems(MEMS), logistics, and biomedical industries, away from its traditional industries, such as coal mining and steel making. Speaking from the perspective of path theory, he continues to argue that Dortmund has successfully 'locked-out' from the traditional industries, in contrast to the Grabher's argument.