• 한국항공우주학회지
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• 제30권6호
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• pp.1-6
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• 2002

마이크로 연소실을 장착한 MAV 추진 장치용 단기통 MEMS 엔진을 제작하였다. 본연구에서는 MEMS 크기의 왕복운동 내연기관의 타당성을 검증하고 실용화를 위한 설계 및 가공데이터를 축적하고자 하였다. 엔진 블록은 가공의 정밀도와 내열성등을 고려하여 감광유리 웨이퍼를 사용하였으며, 점화 전극은 베이스 플레이트 위에 니켈 도금으로 제작하였다. 감광유리판은 등방성 에칭의 특성이 탁월하여 마이크로 엔진의 실린더와 피스톤과 같이 비교적 깊은 식각이 가능함을 확인하였다. 전체 엔진은 세 개의 별도 가공된 레이어를 접착하여 조립한다. 본연구의 엔진 연소실은 깊이는 1mn, 폭 2mn이며, 피스턴은 수소-공기 예 혼합 가스의 연소압력에 의하여 구동된다. 가공된 엔진의 연소실험을 통하여, 점화, 화염전파 및 피스턴 구동을 확인하였으며, 실용화를 위한 연구가 요구되고 있다.

• 대한기계학회논문집B
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• 제34권9호
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• pp.835-841
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• 2010

MEMS 가스터빈 엔진에서 연료와 공기의 혼합에 영향을 미치는 중요한 요소중 하나는 연료 분사구 형상의 설계이다. 본 연구에서는 3 개의 연료 주입부와 각 주입부에 연결된 여러 개의 분사구에 의해 연료와 공기가 혼합되는 시스템을 고려하여 분사구의 배열과 연료 공급비율의 변화에 따른 혼합 정도를 당량비를 통하여 정량적으로 해석하였다.

• 센서학회지
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• 제25권2호
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• pp.116-123
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• 2016

This paper presents the fabrication and evaluation of the novel drag force type air flowmeter using MEMS technologies for the vehicle applications. To obtain the air drag force, the flowmeter utilized the curved beam structure, which was realized by the difference of residual stress between the silicon oxide layer and the silicon nitride layer. The paddle structure was applied for the maximum air drag force, and the dual-beam was adapted to prevent distortion. The basic experiments were performed in the wind tunnel, and the stable outputs were obtained. The device was applied to the internal combustion engine, and the results were compared with the HI-DS output where the convection thermal flowmeter was used as the reference sensor. The results indicated that the comparable resolutions and response times were obtained under the various engine speeds.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.31-36
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• 2001

As a part of micro engine development feasibility estimation was done through fabrication and test of down scaled combustor and MEMS fabricated spark electrode. In an experimental observation of the down scaled combustion phenomena where flame propagation was observed by optical method and pressure change in combustor which gives the information about the reaction generated thermal energy was recorded and analyzed. Optimal combustor scale was derived to be about 2mm considering increased heat loss effect and thermal energy generation capability. Through the fabrication and discharge test of MEMS electrode effects of electrode width and gap was investigated. Electrode was fabricated by thick PR mold and electroplating. From the result discharge voltage characteristic in sub millimeter scale electrode having thickness of $40{\mu}m$ was obtained. From the result base technology for design and fabrication of micro engine was obtained.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.157-162
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• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.362-363
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• 2005

The objectives of this paper are to achieve good planarization of the deposited film and to improve deposition efficiency of multi-layer structures by using surface-micromaching process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages and disadvantages of CMP for MEMS structures are observed respectively by using the test patterns with structures larger than 1 um line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of slurries: ILD1300 and Nalco2371. And then, the experiments were conducted based on the pretest.

• 한국유체기계학회 논문집
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• 제19권1호
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• pp.24-30
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• 2016

In this study, a 2W micro-gas turbine engine was designed using micro-electro-mechanical systems (MEMS) technology, and experimental investigations of its potential under actual combustion conditions were performed. A micro-gas turbine (MGT) contains a turbo-charger, combustor, and generator. Compressor and turbine blades, and generator coil were manufactured using MEMS technology. The shaft was supported by a precision computer numerical control (CNC) machined static air bearing, and a permanent magnet was attached to the end of the shaft for generation. A heat transfer analysis found that the cooling effect of the air bearing and compressor was sufficient to cover the combustor's high temperature, which was verified in an actual experiment. The generator performance test showed that it can generate 2W at design rotational speed. Prototype micro-gas turbine generated maximum 1 mW electric power and lasted up to 15 minutes.

• 전기전자학회논문지
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• 제13권4호
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• pp.37-42
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• 2009

본 연구에서는 졸겔법으로 ZnO, 수열합성법으로 $SnO_2$ 나노분말을 제조하고 이들 나노분말에 Pd, Ru 등의 촉매를 첨가하였다. MEMS 기술로 제작된 히터 및 전극 구조 위에 나노 감지 분말을 도포하여 CO and $NO_2$ 가스 센서를 제작하였다. 0.1 wt% Pd 도핑된 $SnO_2$ 가스센서와 Ru 도핑된 ZnO 가스 센서는 각각 CO 30 ppm, $NO_2$ 1 ppm의 낮은 농도에서도 높은 감지 특성을 보였다.

• 대한기계학회논문집B
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• 제39권2호
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• pp.153-159
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• 2015

본 연구에서는 MEMS기술을 적용한 2W급 초소형 가스터빈엔진의 개발과 실제 연소 환경에서의 발전 가능성을 해석적, 실험적으로 입증하였다. 초소형 가스터빈엔진은 터보차저, 연소기, 발전기로 이루어져 있다. 터보차저는 각각 직경 10mm와 9mm의 MEMS 공정 압축기와 터빈으로 구성되어 있으며 발전코일 또한 MEMS공정으로 설계되었다. 제작된 압축기와 터빈은 정밀 기계 가공된 축과 공기 베어링으로 지지되고 회전하며, 회전축 끝단에 영구자석을 설치하여 발전을 하게 된다. 공기 베어링과 압축기를 통한 냉각 효과를 해석하여 연소기에서 발생한 열을 충분히 차단할 수 있는 것으로 분석되었고, 이를 실험을 통해 검증하였다.

• 대한기계학회논문집B
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• 제26권12호
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• pp.1639-1645
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• 2002

Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer form the engine. Combustor size was determined to be 1 mm scale. Movable piston is engraved inside the wafer. Ignition was done by nickel spark plug which was electroplated with thickness of 40 ${\mu}{\textrm}{m}$. The wafers were bonded by epoxy that resists high temperature. In firing test due to the bonding method and design tolerance pressure buildup by reaction was not confirmed. But ignition, flame propagation and actuation of micro structure from the reaction was observed. From the result basement of design and fabrication technology was obtained.